Embedded interferometer for reference-mirror calibration of interferometric microscope

• US 6,545,761 B1
• Filed: 11/30/1999
• Issued: 04/08/2003
• Est. Priority Date: 11/30/1999
• Status: Expired due to Fees

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Veeco Instruments Incorporated
• Inventors: Guenther, Bryan W., Aziz, David J.
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): LEE, HWA S
• Application Number:
  US09/452,334
• Time in Patent Office: 1,225 Days
• Field of Search: 356/450, 356/497, 356/498, 356/499, 356/511, 356/512, 356/513, 356/514, 356/508
• US Class Current: 356/497
• CPC Class Codes: G01B 2290/60 Reference interferometer, i.e. additional interferometer not interacting with object
• CPC Class Codes: G01B 9/02042 Confocal imaging
• CPC Class Codes: G01B 9/02043 Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
• CPC Class Codes: G01B 9/02063 by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/04 Measuring microscopes
• CPC Class Codes: G02B 21/14 affording illumination for phase-contrast observation
• CPC Class Codes: G02B 21/247 Differential detectors

Abstract

A laser interferometer is embedded into an interference microscope to precisely determine the in-focus position of the microscope objective'"'"'s reference mirror. A collimated laser beam is introduced into the microscope system and split into two beams directed toward a calibration reference surface and the interference objective. The light reflected from the calibration reference surface is returned to the camera. The light into the interference objective is focused onto the reference mirror and returned to the camera. For the purpose of calibration, the two beams are combined at the camera to produce interference fringes. When the reference mirror is in focus, the returned beam is collimated; if the mirror is on either side of focus, the beam is either converging or diverging. Accordingly, the interferogram produced at the camera reflects the in-focus or out-of-focus condition of the reference mirror. The curvature of the wavefront returned from the reference mirror is determined electronically by analyzing the interference fringes produced with the beam returned from the calibration reference surface. By minimizing the curvature of the reference-mirror wavefront as the mirror is translated along the optical path, the reference mirror can be focused with an accuracy greater than possible by visual observation. Furthermore, by automating the focusing system with a precise translation mechanism driven by closed-loop control, operator-to-operator variations are completely eliminated.

Claims

1. An apparatus for calibrating the in-focus position of a reference mirror in an interference microscope objective, comprising:

a light source adapted to provide a light beam directed to a reference mirror;

means for determining a shape of a return wavefront reflected from the reference mirror; and

focusing means for translating the reference mirror to an in-focus position.

2. The apparatus of claim 1, further comprising a conoscopic imaging lens positioned in an optical path of the interference microscope for imaging an exit pupil of the objective on a light-intensity sensor.

3. The apparatus of claim 2, further comprising means for alternatively placing said conoscopic imaging lens in the optical path of the interference microscope or removing said lens from the optical path of the interference microscope.

4. The apparatus of claim 1, wherein said light source is a laser.

5. The apparatus of claim 1, further comprising means for automatically determining said shape of the return wavefront reflected from the reference mirror.

6. The apparatus of claim 5, further comprising a conoscopic imaging lens positioned in an optical path of the interference microscope for imaging an exit pupil of the objective on a light-intensity sensor.

7. The apparatus of claim 6, further comprising means for alternatively placing said conoscopic imaging lens in the optical path of the interference microscope or removing said lens from the optical path of the interference microscope.

8. The apparatus of claim 5, wherein said light source is a laser.

9. The apparatus of claim 5, further comprising means for displaying an interferogram corresponding to said shape of the return wavefront reflected from the reference mirror.

10. The apparatus of claim 9, further comprising a conoscopic imaging lens positioned in an optical path of the interference microscope for imaging an exit pupil of the objective on a light-intensity sensor.

11. The apparatus of claim 10, further comprising means for alternatively placing said conoscopic imaging lens in the optical path of the interference microscope or removing said lens from the optical path of the interference microscope.

12. The apparatus of claim 9, wherein said light source is a laser.

13. The apparatus of claim 5, further comprising means for automatically controlling said focusing means to translate the reference mirror toward an in-focus position.

14. The apparatus of claim 13, further comprising a conoscopic imaging lens positioned in an optical path of the interference microscope for imaging an exit pupil of the objective on a light-intensity sensor.

15. The apparatus of claim 14, further comprising means for alternatively placing said conoscopic imaging lens in the optical path of the interference microscope or removing said lens from the optical path of the interference microscope.

16. The apparatus of claim 13, wherein said light source is a laser.

17. The apparatus of claim 13, further comprising means for displaying an interferogram corresponding to said shape of the return wavefront reflected from the reference mirror.

18. The apparatus of claim 17, further comprising a conoscopic imaging lens positioned in an optical path of the interference microscope for imaging an exit pupil of the objective on a light-intensity sensor.

19. The apparatus of claim 18, further comprising means for alternatively placing said conoscopic imaging lens in the optical path of the interference microscope or removing said lens from the optical path of the interference microscope.

20. The apparatus of claim 19, wherein said light source is a laser.

21. The apparatus of claim 1, wherein said means for determining a shape of a return wavefront reflected from the reference mirror comprises:

a calibration reference surface adapted to reflect a calibration beam in optical alignment with an optical path of the interference microscope; and

a beam splitter dividing said light beam into said calibration beam and a reference beam directed to said reference mirror.

22. The apparatus of claim 1, wherein said return wavefront is directed to a light-intensity sensor and said means for determining a shape of the return wavefront reflected from the reference mirror comprises a second light source adapted to provide a light beam directed to the light-intensity sensor.

23. The apparatus of claim 22, wherein said second light source is produced by a fiber-optic splitter.

24. The apparatus of claim 1, wherein said means for determining a shape of the return wavefront reflected from the reference mirror comprises a shearing interferometer placed in an optical path of the return wavefront to a light-intensity sensor.

25. The apparatus of claim 1, wherein said light beam is collimated.

26. The apparatus of claim 21, wherein said light beam is collimated.

27. The apparatus of claim 22, wherein said light beam is collimated.

28. The apparatus of claim 24, wherein said light beam is collimated.

29. A method for calibrating the in-focus position of a reference mirror in an interference microscope objective, comprising the steps of:

(a) providing a light beam;

(b) directing said light beam toward a reference mirror;

(c) determining a shape of a return wavefront reflected from the reference mirror;

(d) determining a position of the reference mirror relative to an in-focus position thereof as a function of said shape of the return wavefront reflected from the reference mirror; and

(e) translating the reference mirror toward said in-focus position.

30. The method of claim 29, wherein said step (c) comprises the step of providing an interferogram between said return wavefront and a collimated calibration beam.

31. The method of claim 30, wherein said step (c) further comprises the step of imaging an exit-pupil of the microscope objective on a light-intensity sensor.

32. The method of claim 31, wherein said imaging step is carried out with a conoscopic imaging lens in an optical path of the interference microscope.

33. The method of claim 29, wherein said light beam is produced with a laser and collimated.

34. The method of claim 33, wherein said step (c) comprises the step of providing an interferogram between said return wavefront and a collimated calibration beam.

35. The method of claim 34, wherein said step (c) further comprises the step of imaging an exit-pupil of the microscope objective on a light-intensity sensor.

36. The method of claim 35, wherein said imaging step is carried out with a conoscopic imaging lens in an optical path of the interference microscope.

37. The method of claim 29, wherein said steps (c), (d) and (e) are carried out automatically.

38. The method of claim 37, wherein said step (c) comprises the step of providing an interferogram between said return wavefront and a collimated calibration beam.

39. The method of claim 38, wherein said step (c) further comprises the step of imaging an exit-pupil of the microscope objective on a light-intensity sensor.

40. The method of claim 39, wherein said imaging step is carried out with a conoscopic imaging lens in an optical path of the interference microscope.

41. The method of claim 38, further comprising the step of displaying said interferogram.

42. The method of claim 29, wherein said light beam is collimated and step (c) includes the steps of:

i.) splitting said collimated light beam into a calibration beam and a reference beam directed toward the reference mirror; and

ii.) producing an interferogram between said calibration beam and said return wavefront from the reference mirror.

43. The method of claim 42, further including the steps of:

iii.) providing a calibration reference surface; and

iv.) directing said calibration beam toward the calibration reference surface to produce a collimated calibration beam for interference with said return wavefront.

44. The method of claim 29, wherein said step (c) includes the steps of:

i.) passing said return wavefront through a shearing interferometer to produce two beams; and

ii.) producing an interferogram between said two beams.

45. The method of claim 29, wherein said step (c) includes performing phase-shifting measurements.

46. The method of claim 42, wherein said step (c) includes performing phase-shifting measurements.

47. The method of claim 44, wherein said step (c) includes performing phase-shifting measurements.

48. The method of claim 29, wherein said light beam is collimated.

49. The method of claim 44, wherein said light beam is collimated.