Method and apparatus for measuring thickness of transparent films

• US 6,545,765 B1
• Filed: 11/08/2000
• Issued: 04/08/2003
• Est. Priority Date: 11/08/1999
• Status: Expired due to Fees

• Current Assignee: Leica Microsystems CMS GmbH (Danaher Corporation)
• Original Assignee: Leica Microsystems Heidelberg GmbH (Danaher Corporation)
• Inventors: Weiss, Albrecht, Ganser, Michael
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Hashmi, Zia R.
• Application Number:
  US09/708,778
• Time in Patent Office: 881 Days
• Field of Search: 356/632, 356/382, 356/381, 356/357, 356/355, 356/345, 356/445, 156/626.1, 156/601, 156/612, 156/626, 156/627, 250/560
• US Class Current: 356/632
• CPC Class Codes: G01B 11/0616 of coating

Abstract

A method and an apparatus for measuring thickness of transparent films is described in which an illumination beam is directed through an objective onto an object comprising a transparent film. A structured focusing aid is disposed in the illumination beam, a camera is disposed in an imaging beam. The focusing aid and the camera each are disposed in locations conjugated with the focal plane of the objective. The focal plane of the objective is displaced stepwise through the object. At each position, a camera image is recorded and its focus score is determined, the image of the focusing aid being used as the contrast indicator. The positions with maximal focus scores are assigned to the locations of the interfaces. The thickness of the transparent film is calculated from the difference between the positions of its interfaces.

Claims

1. A method of measuring thickness of a film comprising:

providing a single illumination beam propagating along an optical axis and illuminating the transparent film, the transparent film having a first and a second surface;

causing the illumination beam to reflect from the first surface of the transparent film, pass through a focusing means and form an image on an image capturing device, the image being characterized by a first image score;

altering a position of the transparent film along the optical axis relative to the focusing means, thereby altering the first image score until it reaches a second image score corresponding to an image being formed on the image capturing device by the illumination beam being reflected from the second surface of the transparent film; and

utilizing the first image score and the second image score to measure the thickness of the transparent film.

2. The method of claim 1, wherein altering the position of the film along the optical axis relative to the focusing means comprises displacing the film along the optical axis.

3. The method of claim 1, wherein the first image score corresponds to a first maximal contrast of the image and wherein the second image score corresponds to a second maximal contrast of the image.

4. The method of claim 2, wherein altering the position of the film comprises discreetly displacing the film along the optical axis and assigning a discreet image score to each intermediate image formed during the discreet displacement.

5. The method of claim 1, wherein utilizing the first image score and the second image score to measure the thickness of the film comprises measuring a displacement of the film between positions corresponding to the first and second image scores.

6. A method for thickness measurement on transparent films, comprising the following steps:

a) illuminating an object, having a transparent film, by a single illumination beam that is guided through an objective which has an optical axis oriented perpendicular to the transparent film, a structured focusing aid being arranged in the illumination beam, and a camera being arranged in an imaging beam, in positions conjugated with the focal plane of the objective;

b) stepwise displacing the object relative to the objective in a Z direction, parallel to the optical axis, to discrete positions z_i;

c) recording of a camera image at each stop position z_i, and measuring an associated z_i value;

d) identifying a focus score F(z_i), assigned to the respective position z_i, from each recorded camera image;

e) determining the maxima of the focus scores F(z_i);

f) assigning the maxima to interfaces of the object; and

g) determining the thickness of the transparent film enclosed in the object from the difference between the two z_i positions z₁, Z₂ of the maxima assigned to its interfaces, the thickness d of the transparent film being given by d=(z₁−

z₂)×

n_film, where n_film=the refractive index of the film.

7. The method as defined in claim 6, comprising the further steps:

a) determining an approximating function F(z) from the discrete focus scores F(z_i);

b) determining the analytical maxima of the function F(z); and

c) determining the thickness of the transparent film from the analytical maxima of the function F(z).

8. The method as defined in claim 6, comprises determining an approximation function F(z) in the vicinity of those discrete focus scores F_n(z_i) whose adjacent focus scores F_n−

m(z_i) and F_n+m(z_i) have lower values, the vicinity being defined as m≧

1.

9. An apparatus for carrying out the method for thickness measurement on transparent films, comprising:

a) an object that has a transparent film;

b) a light source;

c) an objective through which an illumination beam, proceeding from the light source and having an optical axis oriented perpendicular to the transparent film, is directed onto the object;

d) a structured focusing aid arranged in the illumination beam in a position conjugated with a focal plane of the objective;

e) a camera arranged in an imaging beam, defined by the apparatus, in a position conjugated with the focal plane of the objective;

f) a drive unit for displacing the object relative to the objective in a Z direction, parallel to the optical axis, to discrete positions z_i;

g) a Z-position measurement unit for measuring the z_i values of the z_i positions stopped at;

h) an image recording unit connected to the camera;

i) an image processing unit for identifying a focus score F(z_i), assigned to one of the respective positions z_i, from each recorded camera image;

j) a calculation unit for evaluating the focus scores F(z_i) and determining the thickness of the transparent film; and

k) a control unit, for controlling execution of the method, that is connected to the other units.

10. The apparatus as defined in claim 9, wherein the object is an object support that carries a transparent liquid film.

11. The apparatus as defined in claim 9, wherein the object is a microcuvette that contains a transparent liquid.

12. The apparatus as defined in claim 9 wherein the structure on the focusing aid is at least one bar whose bar length is a multiple of the bar width, the bar width being a multiple of the resolution capability of the objective and the camera.

13. The apparatus as defined in claim 12, wherein the structure on the focusing aid is at least one cross made up of two bars.