Micro-electro-mechanical systems resonant optical gyroscope

• US 6,546,798 B1
• Filed: 06/26/2001
• Issued: 04/15/2003
• Est. Priority Date: 03/14/2001
• Status: Active Grant

• Current Assignee: The United States of America As Represented By The Secretary of Agriculture
• Original Assignee: the united states of america as represented by the secretary of the navy
• Inventors: Waters, Richard L., Aklufi, Monti E.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US09/892,301
• Time in Patent Office: 658 Days
• Field of Search: 735/040.1, 735/040.2, 735/040.4, 735/040.8, 735/140.2, 735/142.7, 356/459, 356/460, 356/477, 356/454
• US Class Current: 73/504.01
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

A gyroscope is based upon the integration of an optical resonant cavity and a photodiode to detect minute perturbations due to angular forces. A Fabry-Perot cavity is created from two parallel semitransparent mirrors used in conjunction with a monochromatic light source. One mirror is fixed while the other is allowed to rotate with respect to the first mirror. A resonant cavity is thereby formed on either side of the axis. The gap between the mirrors is set so that light transmission through the mirrors is optimized. Rotation of the mirror from this position causes the distance between the mirrors to be altered and the light transmission on either side of the rotational axis to be change. Photodiodes on these sides sense this change as a change in photo-generated current, enabling the amount of change in rotation to be calculated. The photo-currents can be differentially amplified for sensitivity.

Claims

1. A high sensitivity micro-electro-mechanical optical gyroscope comprising:

an interferometer section, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is disposed to rotate with respect to a second of said surfaces about an axis that is spaced apart from and parallel to said second surface so that an even gap exists between said surfaces when said surfaces are parallel, said first surface having first and second portions extending radially oppositely from said axis;

a proof mass attached to said rotatably disposed first surface;

a source of monochromatic light, said light for irradiating through said first and second surfaces wherein said light is also partially reflected between said surfaces;

a first photosensor for sensing said light as projected through said first portion of said first surface and said second surface; and

a second photosensor for sensing said light as projected through said second portion of said first surface and through said second surface,

wherein said gap is set so that rotational forces as sensed by said gyroscope cause said first surface to rotate with respect to said second surface thereby either initially increasing light transmission through said first surface'"'"'s first portion and said second surface and decreasing light transmission through said first surface'"'"'s second portion and said second surface or initially decreasing light transmission through said first surface'"'"'s first portion and said second surface and increasing light transmission through said first surface'"'"'s second portion and said second surface.

2. The apparatus of claim 1 wherein said interferometer section and said photosensors are monolithically integrated on a single substrate.

3. The apparatus of claim 1 wherein said interferometer section and said photosensors are monolithically integrated on a silicon substrate.

4. The apparatus of claim 1 wherein said interferometer section and said photosensors are monolithically integrated on an Indium Phosphate substrate.

5. The apparatus of claim 1 wherein said interferometer section and said photosensors are monolithically integrated on a Galium Arsenide substrate.

6. The apparatus of claim 1 wherein said first partially transmissive, partially reflective surface is a semi-transparent metal.

7. The apparatus of claim 6 wherein said second partially transmissive, partially reflective surface is a semi-transparent metal.

8. The apparatus of claim 2 wherein said first partially transmissive, partially reflective surface is a semi-transparent metal and said second partially transmissive, partially reflective surface is an air/semiconductor interface.

9. The apparatus of claim 2 wherein said second partially transmissive, partially reflective surface is an air/semiconductor interface.

10. The apparatus of claim 1 wherein said partially reflective, partially transmissive, surfaces are dielectric mirrors.

11. The apparatus of claim 1 wherein said interferometer section includes a Fabry-Perot interferometer.

12. The apparatus of claim 1 wherein said photosensors are photodiodes.

13. The apparatus of claim 12 wherein said photodiodes are p⁺n silicon photodiodes.

14. The apparatus of claim 1 wherein said first and second photosensors each include a plurality of independent sensors for individually sensing light as transmitted through said first and second surfaces.

15. The apparatus of claim 1 wherein said source of monochromatic light is a laser.

16. The apparatus of claim 15 wherein said laser is a solid-state laser.

17. The apparatus of claim 1 wherein said source of monochromatic light is a light emitting diode.

18. The apparatus of claim 17 wherein said light emitting diode is an organic light emitting diode.

19. The apparatus of claim 1 wherein said photosensors are attached to said first surface.

20. The apparatus of claim 1 wherein said photosensors are attached to said second surface.

21. The apparatus of claim 1 wherein said interferometer section includes first and second Fabry-Perot interferometers, wherein an etalon of said first Fabry-Perot interferometer includes said first portion of said first surface and said second surface and wherein an etalon of said second Fabry-Perot interferometer includes said second portion of said first surface and said second surface.

22. A high sensitivity micro-electromechanical optical gyroscope comprising:

an interferometer section, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is disposed to rotate with respect to a second of said surfaces about an axis that is spaced apart from and parallel to said second surface so that an even gap exists between said surfaces when said surfaces are parallel, said first surface having first and second portions extending radially oppositely from said axis, said interferometer section including first and second Fabry-Perot interferometers, wherein an etalon of said first Fabry-Perot interferometer includes said first portion of said first surface and said second surface and wherein an etalon of said second Fabry-Perot interferometer includes said second portion of said first surface and said second surface;

a proof mass attached to said rotatably disposed first surface;

a source of monochromatic light, said light for irradiating through said first and second surfaces wherein said light is also partially reflected between said surfaces;

a first photodiode attached to said second surface outside of said gap for sensing said light as projected through said etalon of said first Fabry-Perot interferometer; and

a second photodiode attached to said second surface outside of said gap for sensing said light as projected through said second Fabry-Perot interferometer,

wherein said gap is set so that rotational forces as sensed by said gyroscope cause said first surface to rotate with respect to said second surface thereby either initially increasing light transmission through said etalon of said first Fabry-Perot interferometer and decreasing light transmission through said etalon of said second Fabry-Perot interferometer or initially decreasing light transmission through said etalon of said first Fabry-Perot interferometer and increasing light transmission through said etalon of said second Fabry-Perot interferometer.

23. The apparatus of claim 22 wherein said interferometers and said photodiodes are monolithically integrated on a silicon substrate.

24. The apparatus of claim 23 wherein said first partially transmissive, partially reflective surface is a semi-transparent metal.

25. The apparatus of claim 24 wherein said second partially transmissive, partially reflective surface is a semi-transparent metal.

26. The apparatus of claim 24 wherein said second partially transmissive, partially reflective surface is an air/semiconductor interface.

27. The apparatus of claim 26 wherein said photodiodes are p⁺n silicon photodiodes.

28. The apparatus of claim 26 wherein said first and second photodiodes are of first and second pluralities of independent photodiodes spaced at varying distances from said axis to individually sense light as transmitted through said first and second etalons, respectively.