Method and apparatus for multifunction vacuum/nonvacuum annealing system

• US 6,546,820 B1
• Filed: 02/11/2000
• Issued: 04/15/2003
• Est. Priority Date: 02/11/2000
• Status: Expired due to Term

• Current Assignee: Applejack 199, L.P.
• Original Assignee: Ann F. Koo
• Inventors: Lim, Yuen, Van, Phuc
• Primary Examiner(s): RAEVIS, ROBERT R
• Application Number:
  US09/502,168
• Time in Patent Office: 1,159 Days
• Field of Search: 738/656, 738/658, 738/66, 738/631.1, 738/631.2, 73/280.1, 374/45, 374/57, 374/47, 374/49, 374/51, 324/693, 324/228, 324/760, 324/761, 356/300, 356/311, 356/327, 356/323, 356/244, 356/503
• US Class Current: 73/865.8
• CPC Class Codes: G01N 2203/0222 Temperature
• CPC Class Codes: G01N 2203/0226 High temperature; Heating means
• CPC Class Codes: G01N 2203/024 Corrosive
• CPC Class Codes: G01N 2203/0244 Tests performed "in situ" or after "in situ" use
• CPC Class Codes: G01N 2203/0282 Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes
• CPC Class Codes: G01N 3/60 Investigating resistance of materials, e.g. refractory materials, to rapid heat changes thermal testing of structures or apparatus G01M99/002

Abstract

An apparatus is disclosed for in situ characterizing and quantifying physical properties of thin film materials over time and in various environments. Through the utilization of multiple probes and sensors, and the processing of the data, a rapid and accurate forecast of the material'"'"'s behavior in a selected environment may be obtained. The present invention scans for a variety of properties, including film stress, film thickness, desorption, reflectivity, and resistivity. Photodetectors are used to collect reflected light which is processed by computer for analysis, while simultaneously processing data collected from the probes and sensors placed within and without the testing chamber. Data is collected and analyzed over time while sample materials are subjected to selected environments, including thermal cycling and gaseous or vacuum environments, using multiple probes according to the user'"'"'s industry needs.

Claims

1. An apparatus for simultaneously extracting multiple physical characteristics of materials, comprising:

a housing;

a chamber disposed within said housing, said chamber being capable of achieving multiple temperatures, being capable of being filled with gases, and achieving a vacuum;

material characteristic sensors disposed within said housing for providing at least a first set of data and a second set of data; and

a data correlator coupled to said material characteristic sensors, said data correlator being capable of correlating said first set of data and second set of data.

2. An apparatus as recited in claim 1, wherein said chamber is capable of being back filled with gases of choice.

3. An apparatus as recited in claim 1 further comprising a chemical sensor.

4. An apparatus as recited in claim 1, wherein the material sample support stage and shaft is capable of rotation.

5. An apparatus as recited in claim 1, further comprising a sensor for detecting mechanical characteristics of a material sample.

6. An apparatus as recited in claim 1, further comprising a mechanical sensor.

7. An apparatus as recited in claim 1, further comprising a sensor for detecting optical characteristics of a material sample.

8. An apparatus as recited in claim 1, further comprising a sensor for detecting electrical characteristics of a material sample.

9. An apparatus as recited in claim 1, further comprising a sensor for detecting particulate characteristics of a material sample.

10. An apparatus as recited in claim 9, further comprising a sensor for detecting magnetic characteristics of a material sample.

11. An apparatus as recited in claim 1, further comprising a sensor for detecting temperature characteristics of a material sample.

12. An apparatus as recited in claim 1, said data correlator being operable to correlate inflection points of said first and second sets of data with variations in temperature.

13. An apparatus as recited in claim 1, wherein an interior surface of said chamber is plated with a highly reflective, inert material.

14. An apparatus as recited in claim 13, wherein the highly reflective, inert material is gold.

15. An apparatus as recited in claim 13, wherein the highly reflective, inert material is rhodium.

16. An apparatus as recited in claim 1, further comprising a prechamber connected to said chamber to allow transfer of samples from said prechamber to said chamber through an opening in the top of said chamber without exposing the samples to ambient atmosphere.

17. An apparatus as recited in claim 1, further comprising a display connected to said correlator, said correlator being operable to control the display to provide a graph of at least one of said sets of data.

18. An apparatus as recited in claim 17, said correlator being operable to control the display to overlay multiple graphs of said sets of data on said display, such that said display simultaneously displays more than one set of said sets of data.

19. A method for extracting and analyzing physical characteristics of materials, comprising the operations of:

providing a housing;

providing a chamber disposed within said housing, said chamber being capable of achieving multiple temperatures and a vacuum;

evacuating said chamber;

backfilling said chamber with a gas;

repeating the method until a desired degree of purity is achieved;

sensing a first set of physical properties of a sample material utilizing a first sensor disposed within said housing;

sensing a second set of physical properties of said sample material utilizing a second sensor disposed within said housing; and

correlating said first set of physical properties and said second set of physical properties, whereby material characteristics of said sample material are determined.

20. A method as recited in claim 19, further comprising the operation of scanning the sample material with a scanning means to generate data signals.

21. A method as recited in claim 19, wherein the operation of scanning of the sample material comprises the operations of:

directing a laser beam onto a surface of the sample material along a scan line;

detecting a surface reflection of an incident signal;

detecting magnetic fields emanating from the sample material during thermal processing; and

developing a data base for analysis and representation of selected characteristics of the sample material.

22. A method as recited in claim 19, further comprising the operation of conveying heat to said sample material utilizing a heat source;

providing a prechamber; and

evacuating said chamber and said prechamber.