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Methods, complexes and system for forming metal-containing films

  • US 6,548,683 B1
  • Filed: 07/14/2000
  • Issued: 04/15/2003
  • Est. Priority Date: 10/02/1996
  • Status: Expired due to Term
First Claim
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1. A composition comprising one or more hydride complexes of the formulas:

  • embedded imageand embedded imagewherein;

    M is a Group IIIA metal;

    each R1, R2, R3, R4, and R5 group is independently H or a (C1-C30)organic group, wherein none of the R groups are joined together to form ring systems, at least one of R3 and R4 is H, and R5 is H; and

    n=1 to 6.

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