Electrically-coupled mechanical band-pass filter

• US 6,549,099 B2
• Filed: 06/29/2001
• Issued: 04/15/2003
• Est. Priority Date: 06/29/2001
• Status: Expired due to Term

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Taussig, Carl P.
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US09/896,472
• Publication Number:
  US 20030006861A1
• Time in Patent Office: 655 Days
• Field of Search: 333/186, 333/197, 333/200, 333/218
• US Class Current: 333/186
• CPC Class Codes: H03H 9/525 for microelectro-mechanical filters

Abstract

The present invention provides an electromechanical band-pass filter for use in PIRM memory arrays utilizing miniature micro-movers on a single substrate. The band-pass filter includes first and second masses, each mass being independently movable in a common direction relative to the substrate and to other mass. A first spring element has one end attached to the substrate and the other end attached to the first mass. A second spring element has one end attached to the first mass and the other end attached to the second mass. An input transducer is provided for receiving an input frequency and applying a force to the first mass in the direction of motion of the first mass, the force being representative of the input frequency. An output transducer is associated with the first and second masses for providing an output frequency representative of the relative motion between the first and second masses.

Claims

1. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass, the second mass being connected only to the first mass;

an input transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

an output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses.

2. The band-pass filter of claim 1, wherein the first and second masses comprise a drive unit that determines the output frequency by the movement between the first and second masses.

3. The band-pass filter of claim 2, wherein the drive unit includes a capacitor associated with the movement between the first and second masses to determine the output frequency by variations in the capacitance of the capacitor.

4. The band-pass filter of claim 1, wherein the first and second masses comprise a comb drive with interleaved teeth, and wherein the movement between the first and second masses is determined by variations in capacitance in the comb drive.

5. The band-pass filter of claim 1, wherein the input transducer comprises an oscillator for generating the input frequency, the oscillator being capacitively coupled to the first mass to move the first mass relative to the input frequency.

6. The band-pass filter of claim 5, wherein the output transducer comprises an electrical output element mechanically linked to the first mass and capacitively coupled to the second mass to generate the output frequency.

7. The band-pass filter of claim 6, wherein the substrate provides a common capacitance for capacitively coupling with the first and second masses.

8. The band-pass filter of claim 6, wherein the input transducer is electrically isolated from the output transducer.

9. The band-pass filter of claim 1, wherein the output frequency is twice the input frequency.

10. The band-pass filter of claim 1, wherein the amplitude of the input frequency is scaled with the square root of the input frequency.

11. The band-pass filter of claim 1, wherein the output frequency is a mathematical function of the mass of each of the first and second masses and the stiffness of the first and second spring elements.

12. The band-pass filter of claim 11, wherein the mass of the first mass is equal to the mass of the second mass.

13. The band-pass filter of claim 12 wherein the mathematical function is expressed by the equation:

$F_o=\frac{3\pm <br><br>\sqrt{5}}{2}<br><br>\sqrt{\frac{k}{m}},$

where F_o is the output frequency in cycles per second, k is the spring element stiffness for each of the first and second spring elements in units of newtons per meter, and m is the mass of each of the first and second masses in units of kilograms.

14. The band-pass filter of claim 1 wherein the first and second masses move in a common direction and the input force is applied in the common direction.

15. The method of filtering the frequency of an input oscillator on a substrate common with first and second masses, each mass being independently movable in at least one direction, and first and second spring elements, comprising:

connecting one end of the first spring element to the first mass and the other end of the first spring element to the substrate;

connecting one end of the second spring element to the first mass and the other end of the second spring element to the second mass, the second mass being connected only to the first mass;

applying an input force to the first mass influenced by an input frequency provided by an input transducer, the input force leaving a component in the direction of motion of the first mass; and

generating an output frequency influenced by the relative motion between the first and second masses by means of an output transducer associated with the first and second masses.

16. The method of claim 15, wherein a variable capacitor is associated with the movement between the first and second masses to determine the output frequency by variations in the capacitance of the capacitor.

17. The method of claim 16, wherein the first and second masses are disposed relative to each other to provide the variable capacitor.

18. The method of claim 15, wherein the input frequency is generated by the input oscillator, and further comprising capacitively coupling to oscillator to the first mass to move the first mass relative to the input frequency.

19. The method of claim 15, and further comprising mechanically linking the output transducer to the first mass and capacitively coupling the output transducer to the second mass to generate the output frequency.

20. The method of claim 15, and further comprising electrically isolating the input transducer from the output transducer.

21. The method of claim 15 and further comprising scaling the amplitude of the input frequency with the square root of the input frequency.

22. The method of claim 15 wherein the first and second masses move in a common direction and the input force is applied in the common direction.

23. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

the first and second masses comprising a drive unit that determines the output frequency by the movement between the first and second masses;

wherein the drive unit includes a capacitor associated with the movement between the first and second masses to determine the output frequency by variations in the capacitance of the capacitor;

an input transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

and output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses.

24. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

the first and second masses comprising a comb drive with interleaved teeth, and wherein the movement between the first and second masses is determined by variations in capacitance in the comb drive;

an input transducer for receiving and input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

an output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses.

25. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

an input transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

an output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses;

wherein the input transducer comprises and oscillator for generating the input frequency, the oscillator being capacitively coupled to the first mass to move the first mass relative to the input frequency, and the output transducer comprises an electrical output element mechanically linked to the first mass and capacitively coupled to the second mass to generate the output frequency.

26. The band-pass filter of claim 25, wherein the substrate provides a common capacitance for capacitively coupling with the first and second masses.

27. The band-pass filter of claim 25, wherein the input transducer is electrically isolated from the output transducer.

28. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

an output transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

in output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses;

wherein the output frequency is twice the input frequency.

29. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

an input transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

an output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses;

wherein the amplitude of the input frequency is scaled with the square root of the input frequency.

30. An electrically-coupled, mechanical band-pass filter fabricated on a substrate, comprising:

first and second masses, each mass being independently movable in a direction of motion relative to the substrate and to the other mass;

a first spring element having one end attached to the substrate and the other end attached to the first mass;

a second spring element having one end attached to the first mass and the other end attached to the second mass;

an input transducer for receiving an input frequency and applying an input force to the first mass, the input force having a force component in the direction of motion of the first mass, the input force being influenced by the input frequency; and

an output transducer associated with the first and second masses for providing an output frequency influenced by the relative motion between the first and second masses;

wherein the output frequency is a mathematical function of the mass of each of the first and second masses and the stiffness of the first and second spring elements;

wherein the mass of the first mass is equal to the mass of the second mass.

31. The band-pass filter of claim 30 wherein the mathematical function is expressed by the equation:

$\mathrm{Fo}=\frac{3\pm <br><br>\sqrt{5}}{2}<br><br>\sqrt{\frac{k}{m}},$

wherein Fo is the output frequency in cycles per second, k is the spring element stiffness for each of the first and second spring elements in units of newtons per meter, and m is the mass of each of the first and second masses in units of kilograms.

32. The method of filtering the frequency of an input oscillator on a substrate common with first and second masses, each mass being independently movable in at least one direction, and first and second spring elements, comprising:

connecting one end of the first spring element to the first mass and the other end of the first spring element to the substrate;

connecting one end of the second spring element to the first mass and the other end of the second spring element to the second mass;

applying an input force to the first mass influenced by an input frequency provided by an input transducer, the input force having a component in the direction of motion of the first mass; and

generating an output frequency influenced by the relative motion between the first and second masses by means of an output transducer associated with the first and second masses;

wherein a variable capacitor is associated with the movement between the first and second masses to determine the output frequency by variations in the capacitance of the capacitor, the first and second masses being disposed relative to each other to provide the variable capacitor.

33. The method of filtering the frequency of an oscillator on a substrate common with first and second masses, each mass being independently movable in at least one direction, and first and second spring elements, comprising:

connecting one end of the first spring element to the first mass and the other end of the first spring element to the substrate;

connecting one end of the second spring element to the first mass and the other end of the second spring element to the second mass;

applying an input force to the first mass influenced by an input frequency provided by an input transducer, the input force having a component in the direction of motion of the first mass;

generating an output frequency influenced by the relative motion between the first and second masses by means of an output transducer associated with the first and second masses; and

mechanically linking the output transducer to the first mass and capacitively coupling the output transducer to the second mass to generate the output frequency.

34. The method of filtering the frequency of an oscillator on a substrate common with first and second masses, each mass being independently movable in at least one direction, and first and second spring elements, comprising:

connecting one end of the first spring element to the first mass and the other end of the first spring element to the substrate;

connecting one end of the second spring element to the first mass and the other end of the second spring element to the second mass;

applying an input force to the first mass influenced by an input frequency provided by an input transducer, the input force having a component in the direction of motion of the first mass;

generating an output frequency influenced by the relative motion between the first and second masses by means of an output transducer associated with the first and second masses; and

scaling the amplitude of the input frequency with the square root of the input frequency.