Exposure method and apparatus

• US 6,549,268 B1
• Filed: 11/17/2000
• Issued: 04/15/2003
• Est. Priority Date: 06/17/1998
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Nishi, Kenji
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US09/714,496
• Time in Patent Office: 879 Days
• Field of Search: 355/53, 355/67-77, 318/649, 310/10, 310/12, 378/37, 378/34
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 9/7015 Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece

Abstract

An exposure apparatus and method exposes a substrate with an image of a pattern on a mask via a projection optical system. The exposure apparatus and method reduce the influence of the driving reaction force of the reticle stage and/or the wafer stage on, for example, the positioning accuracy of the reticle and the wafer so that exposure can be performed highly accurately. The exposure apparatus having a mask stage which includes a first stage member which is movable in a predetermined direction and a second stage member which is movable in the predetermined direction together with the first stage member while holding the mask and which is finely movable with respect to the first stage member in a plane parallel to a plane of the base member on which the mask stage is moved, so that a position of the mask is adjusted.

Claims

1. An exposure apparatus for exposing a substrate with an image of a pattern on a mask via a projection optical system, comprising:

a mask stage which is supported movably with respect to a base member and which is movable in a predetermined direction while holding the mask, the mask stage having a reflective portion;

a mask side reaction force-reducing member which is supported movably with respect to the base member at the outside of the mask stage and which is movable to offset any reaction force generated when the mask stage is driven, the mask side reaction force-reducing member being disposed above the reflective portion of the mask stage;

an interferometer which radiates a measuring beam to the reflective portion to detect a position of the mask stage; and

a driving member which is arranged between the mask stage and the mask side reaction force-reducing member and which drives the mask stage, wherein;

the mask stage includes a first stage member which is movable in a predetermined direction; and

a second stage member which is movable in the predetermined direction together with the first stage member while holding the mask and which is finely movable with respect to the first stage member in a plane parallel to a plane of the base member on which the mask stage is moved, so that a position of the mask is adjusted.

2. The exposure apparatus according to claim 1, wherein a mass of the mask side reaction force-reducing member is not less than five times a mass of the mask stage.

3. The exposure apparatus according to claim 1, further comprising a support member which supports the base member and the projection optical system.

4. A method for producing a predetermined device, comprising the step of transferring, by exposure, a pattern onto a substrate by using the exposure apparatus as defined in claim 1.

5. The exposure apparatus according to claim 1, wherein the second stage member has the reflective portion.

6. The exposure apparatus according to claim 1, wherein the mask side reaction force-reducing member is of a rectangular shape.

7. An exposure method for exposing a substrate with an image of a pattern on a mask via a projection optical system, comprising:

moving a mask stage including a first stage member which is supported movably with respect to a base member and a second stage member which is movable together with the first stage member and holds the mask, while moving a mask side reaction force-reducing member, which is supported movably with respect to the base member and which is arranged at the outside of the first stage member to offset any driving reaction force of the mask stage;

finely moving the second stage member with respect to the first stage member in a plane which is parallel to a plane of the base member on which the mask stage is moved so that a position of the mask is adjusted; and

irradiating a measuring beam to a reflective portion of the second stage to detect a position of the mask, the reflective portion of the second stage being disposed below the mask side reaction force-reducing member.

8. The exposure method according to claim 7, wherein the base member and the projection optical system are supported by a common support member.

9. A method for producing an exposure apparatus for exposing a substrate with an image of a pattern on a mask via a projection optical system, the method comprising assembling the following components in a predetermined positional relationship:

a mask stage including a first stage member which is movable in a predetermined direction and a second stage member which is movable in the predetermined direction together with the first stage member while holding the mask and which is finely movable with respect to the first stage member, in a plane parallel to a plane on which the first stage member is moved, to adjust a position of the mask;

a mask side reaction force-reducing member which is movable to offset any reaction force generated when the mask stage is driven, at the outside of the mask stage;

a driving member which is arranged between the mask stage and the mask side reaction force-reducing member and which drives the mask stage; and

an interferometer which radiates a measuring beam to a reflective portion of the second stage to detect a position of the second stage, the reflective portion of the second stage being disposed below the mask side reaction force-reducing member.

10. The method for producing the exposure apparatus according to claim 9, wherein:

the mask stage is supported movably by a mask base; and

the mask base and the projection optical system are supported by an identical support member.

11. An exposure apparatus which exposes a pattern of a mask, comprising:

a mask stage which moves while holding the mask, the mask stage having a reflective portion;

a reaction force-reducing member disposed outside of the mask stage which moves in a direction opposite to the direction of movement of the mask stage, the reaction force-reducing member being disposed above the reflective portion of the mask stage;

a driver having a first portion connected to the mask stage and a second portion connected to the reaction force-reducing member to move the mask stage; and

a position detector which radiates a measuring beam to the reflective portion of the mask stage to detect a position of the mask stage.

12. The exposure apparatus according to claim 11, wherein the mask stage is movably supported by a base.

13. The exposure apparatus according to claim 11, wherein the reaction force-reducing member is movably supported by a base.

14. The exposure apparatus according to claim 11, wherein the position detector comprises an interferometer.

15. The exposure apparatus according to claim 11, wherein the reaction force-reducing member is of a rectangular shape.

16. A stage apparatus comprising:

a movable stage having a reflective portion;

a reaction force-reducing member disposed outside of the movable stage which moves in a direction opposite to the direction of movement of the movable stage, the reaction force-reducing member being disposed above the reflective portion of the movable stage;

a driver having a first portion connected to the movable stage and a second portion connected to the reaction force-reducing member to move the movable stage; and

a position detector which radiates a measuring beam to the reflective portion of the movable stage to detect a position of the movable stage.

17. The stage apparatus according to claim 16, wherein the movable stage is movably supported by a base.

18. The stage apparatus according to claim 16, wherein the reaction force-reducing member is movably supported by a base.

19. The stage apparatus according to claim 16, wherein the position detector comprises an interferometer.

20. The stage apparatus according to claim 16, wherein the reaction force-reducing member is of rectangular shape.