Optical monitoring of the angular position of micro mirrors in an optical switch

• US 6,549,692 B1
• Filed: 02/13/2001
• Issued: 04/15/2003
• Est. Priority Date: 02/13/2001
• Status: Expired due to Fees

• Current Assignee: Rembrandt Communications LP (Rembrandt IP Management, LLC)
• Original Assignee: Tellium, Inc. (DZS, Inc.)
• Inventors: Brener, Igal, Walker, James, Harel, Roey, Bonadeo, Nicolas H.
• Primary Examiner(s): Kim, Robert H.
• Assistant Examiner(s): WANG, GEORGE Y
• Application Number:
  US09/781,306
• Time in Patent Office: 791 Days
• Field of Search: 385/18, 385/15, 385/16, 385/17, 385/19, 385/24, 385/14, 385/31, 385/33, 359/291, 359/290, 359/298
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/359 of the position of the moving element itself during switching, i.e. without monitoring the switched beams

Abstract

The position of a micro-mirror, for example, in an optical switch, may be monitored using an optical position control signals that are detected by a detector arrangement. The position of the micro-mirror may be adjusted by detecting the position of the beam spot and comparing the detected position to a desired position.

Claims

1. An optical switch for selectively switching optical signals between input fibers and output fibers, comprising:

a switching substrate including a plurality of micro-mirrors that are individually tiltable about at least a first axis relative to the switching substrate, the micro-mirrors for reflecting optical signal beams and an out-of-band optical position control signal beam incident thereto, the optical signal beams and out-of-band position control signal beam being reflected in selected angular directions based on tilt angles of the micro-mirrors about at least the first axis;

a beam splitter positioned in an optical path of the optical signal beams and the out-of-band optical position control signal beam reflected from the micro-mirrors, wherein the optical signal beams and the out-of-band position control signal beam exit the beam splitter in different directions;

an optical position detector having a sensing surface;

a lens assembly for focusing the out-of band optical position control signal beam from the beam splitter to produce at least one beam spot on the sensing surface of the optical position detector, wherein the optical position detector generates beam spot position signals indicative of the position of the at least one beam spot on the sensing surface; and

control circuitry that generates control signals for controlling tilt angles of the micro-mirrors of the switching substrate responsive to the beam spot position signals.

2. The optical switch according to claim 1, wherein the beam splitter passes the optical signal beams reflected from the micro-mirrors and reflects the out-of-band optical position control signal beam reflected from the micro-mirrors.

3. The optical switch according to claim 1, wherein the out-of-band optical position control signal beam is reflected by one of the micro-mirrors at a given time.

4. The optical switch according to claim 1, wherein control circuitry compares the beam spot position signals received from the optical position detector with stored beam spot positions.

5. An optical switch for selectively switching optical signals between input fibers and output fibers, comprising:

a switching substrate including a plurality of micro-mirrors that are individually tiltable about first and second axes relative to the switching substrate, the micro-mirrors for reflecting optical signal beams and an out-of-band optical position control signal beam incident thereto, the optical signal beams and out-of-band position control signal beam being reflected in selected angular directions based on tilt angles of the micro-mirrors about the first and second axes;

a beam splitter positioned in an optical path of the optical signal beams and the out-of-band optical position control signal beam reflected from the micro-mirrors, wherein the optical signal beams and the out-of-band position control signal beam exit the beam splitter in different directions;

an optical position detector having a sensing surface;

a lens assembly for focusing the out-of band optical position control signal beam from the beam splitter to produce at least one beam spot on the sensing surface of the optical position detector, wherein the optical position detector generates beam spot position signals indicative of the position of the at least one beam spot on the sensing surface; and

control circuitry that generates control signals for controlling tilt angles of the micro-mirrors about the first and second axes responsive to the beam spot position signals.

6. The optical switch according to claim 5, wherein the lens assembly produces first and second spot beams, and the sensing surface of the optical position detector comprises a first optical linear position detector and a second optical linear position detector, wherein the first optical linear position detector detects the position of the first spot beam in a first linear direction and the second optical linear position detector detects the position of the second spot beam in a second linear direction.

7. The optical switch according to claim 6, wherein the first linear direction is orthogonal to the second linear direction.

8. The optical switch according to claim 6, wherein the optical position detector further comprises processing circuitry that receives electrical signals output from the first and second optical linear position detectors and generates the beam spot position control signals.

9. The optical switch according to claim 5, wherein control circuitry compares the beam spot position signals received from the optical position detector with stored beam spot positions.

10. The optical switch according to claim 5, wherein the lens assembly produces a first spot beam and the sensing surface of the optical position detector detects the position of the first spot beam in two-dimensions.

11. An optical switch, comprising:

a plurality of input optical fibers for propagating optical signals and a first out-of-band optical position control signal in a forward direction;

a first plurality of lenses for converting the optical signals into optical signal beams and for converting the first out-of-band optical position control signal to a first out-of-band optical position control signal beam;

a plurality of output optical fibers that propagate a second out-of-band optical position control signal in a reverse direction;

a second plurality of lenses for converting the second out-of-band optical position control signals to a second out-of-band optical position control beam;

first and second switching substrates, each of the first and second switching substrates including a plurality of micro-mirrors that are individually tiltable about first and second axes, wherein;

(i) the micro-mirrors of the first switching substrate reflect the optical signal beams from the first plurality of lenses to selected micro-mirrors of the second switching substrate and reflect the first out-of-band optical position control beam and (ii) the micro-mirrors of the second switching substrate reflect the optical signal beams from the micro-mirrors of the first switching substrate through the second plurality of lenses and into the output fibers for propagation in the forward direction, whereby the optical signals from the input optical fibers are selectively switched to the output optical fibers, said micro-mirrors of the second switching substrate further reflecting the second out-of-band optical position control signal;

one or more beam splitters positioned in an optical path between the first and second switching substrates, wherein the one or more beam splitters allow the optical signal beams to pass between the first and second switching substrates, direct the first out-of-band optical position control signal beam in a first direction, and direct the second out-of-band optical position control signal beam in a second direction;

first and second optical position detectors, each having a sensing surface;

a first lens assembly for focusing the first out-of band optical position control signal beam from the beam splitter to produce at least one beam spot on the sensing surface of the first optical position detector, wherein the first optical position detector generates first beam spot position signals indicative of the position of the at least one beam spot on the sensing surface of the first optical position detector;

a second lens assembly for focusing the second out-of band optical position control signal beam from the beam splitter to produce at least one beam spot on the sensing surface of the second optical position detector, wherein the second optical position detector generates second beam spot position signals indicative of the position of the at least one beam spot on the sensing surface of the second optical position detector; and

control circuitry that generates control signals for controlling tilt angles of the micro-mirrors of the first and second switching substrates about the first and second axes responsive to the first and second beam spot position signals.

12. The optical switch according to claim 11, wherein the control circuitry controls the tilt angles of the micro-mirrors of the first switching substrate based on the first beam spot position signals and controls the tilt angles of the micro-mirrors of the second switching substrate based on the second beam spot position signals.

13. The optical switch according to claim 11, wherein the first out-of-band optical position control signal is propagated in one of the input optical fibers at a time.

14. The optical switch according to claim 13, wherein second out-of-band optical position control signal is propagated in one of the output optical fibers at a time.

15. The optical switch according to claim 11, wherein the first out-of-band optical position control signal is propagated in each of the input optical fibers in a time-multiplexed manner.

16. The optical switch according to claim 11, wherein the second out-of-band optical position control signal is propagated in each of the output optical fibers in a time-multiplexed manner.

17. The optical switch according to claim 11, wherein the first lens assembly produces first and second spot beams, and the sensing surface of the first optical position detector comprises a first optical linear position detector and a second optical linear position detector, wherein the first optical linear position detector detects the position of the first spot beam in a first linear direction and the second optical linear position detector detects the position of the second spot beam in a second linear direction.

18. The optical switch according to claim 11, wherein the first lens assembly produces a first spot beam and the sensing surface of the optical position detector detects the position of the first spot beam in two-dimensions.

19. A method for optically monitoring the position of micro-mirrors in an optical switch, comprising:

directing optical beams to a switching substrate, wherein the switching substrate comprises a plurality of micro-mirrors that reflect the optical beams in accordance with selected tilt angles of the micro-mirrors, the tilt angles of the micro-mirrors being individually controllable, and wherein the optical beams comprise optical signal beams and at least one of the optical beams comprises an optical signal beam and an out-of-band optical position control beam;

splitting the optical beams reflected from the micro-mirrors so that the optical signal beams and the out-of band optical position control beam are directed in different directions;

inserting the optical signal beams in selected output optical fibers; and

focusing the out-of-band optical position control beam on a sensing surface of a optical position detector, wherein a beam spot formed on the sensing surface by the focused out-of-band optical position control beam varies spatially in accordance with the tilt angle of the micro-mirror that reflected the out-of-band optical position control signal;

sensing the spatial location of the beam spot on the sensing surface;

generating beam spot position signals; and

controlling the tilt angle of the angle of the micro-mirror that reflected the out-of-band optical position control signal in accordance with the beam spot position signals.

20. The method according to claim 19, wherein the step of controlling comprises comparing the generated beam spot position signals to a desired beam spot position and generating mirror tilt adjusting signals for adjusting the tilt of the micro-mirror based on a result of the comparing step.

21. The method according to claim 19, wherein the out-of-band optical position control beam is time multiplexed into each of the optical beams such that each of the micro-mirrors successively reflects the out-of-band optical position control beam and the tilt angle of each of the micro-mirrors is controlled.

22. The method according to claim 21, wherein the tilt angles of the micro-mirrors are controlled in real time during operation of the optical switch.