Method and sensor for measuring a mass flow

• US 6,550,324 B1
• Filed: 09/04/2001
• Issued: 04/22/2003
• Est. Priority Date: 12/22/1998
• Status: Expired due to Term

• Current Assignee: Sensirion Holding AG
• Original Assignee: Sensirion AG (Sensirion Holding AG)
• Inventors: Lechner, Moriz, Mayer, Felix
• Primary Examiner(s): Noori, Max
• Assistant Examiner(s): Miller, Takisha S
• Application Number:
  US09/856,441
• Time in Patent Office: 595 Days
• Field of Search: 732/041.4, 732/041.7, 732/042.6
• US Class Current: 73/204.14
• CPC Class Codes: G01F 1/6986 with pulsed heating, e.g. dynamic methods

Abstract

A heating element (4) is arranged between two temperature sensors (5, 6) in order to measure the mass flow of a liquid or a gas. The mass flow is determined from the temperature difference of the temperature sensors (5, 6). The heating element (4) is operated by pulses in order to reduce power consumption of the device. A further reduction of the power consumption is reached by means of a monitoring circuit (12), which switches the actual measuring section (11) on only if the signals from the temperature sensors (5, 6) fulfil a threshold condition.

Claims

1. Method for measuring the mass flow of a gas or a liquid, comprising the steps of

leading the gas or the liquid over a first temperature sensor that produces a first temperature signal, a heating element and a second temperature sensor that produces a second temperature signal,

operating the heating element in cycles for saving heating energy, wherein in a first cycle phase the heating element is operated at higher temperature than in a second cycle phase, wherein the first cycle phase is shorter than the second cycle phase, and

determining the mass flow from the respective first and second temperature signals of the two temperature sensors.

2. Method of claim 1 wherein the mass flow is determined from the difference of the temperature signals of the two temperature sensors.

3. Method of claim 1 wherein the first cycle phase is at least temporarily chosen of such length that a thermal equilibrium is reached in the region of the temperature sensors.

4. Method of claim 1 wherein the temperature sensors and the heating element are arranged at least partially on a dielectric membrane, which membrane is arranged on an opening or a recess in a semiconductor device.

5. Method of claim 1 wherein two different modes of operation are provided, wherein in a first mode of operation heating pulses of a first length are generated and in a second mode of operation heating pulses of a second length are generated, wherein the first length is smaller than the second length, and in particular wherein the first length is so small that at its end no thermal equilibrium is reached in the region of the temperature sensors.

6. Method of claim 1 wherein the first cycle phase is at least five times shorter than the second cycle phase.

7. Mass flow sensor for determining the mass flow of a gas or a fluid comprising

two temperature sensors arranged in a flow direction one after the other and producing respective first and second temperature signals,

a heating element arranged between the temperature sensors and

measuring means for determining the mass flow from the respective first and second temperature signals of both temperature sensors and comprising a pulse control for feeding energy in pulses to the heating element for generating heating pulses, wherein a distance of consecutive pulses is longer than the pulses themselves.

8. The mass flow sensor of claim 7 wherein the pulse control is designed such that at least part of the heating pulses are long enough that the temperature sensors are substantially in thermal equilibrium at the end of a heating pulse.

9. The mass flow sensor of claim 7 wherein the heating element and the temperature sensors are at least partially arranged on a dielectric membrane extending over an opening or recess in a semiconductor device.

10. The mass flow sensor of claim 7 wherein the measuring means comprises a monitoring circuit and a measuring section activated by the monitoring circuit, wherein

the measuring section is designed for determining the mass flow depending on the temperature signals, and wherein

the monitoring circuit is designed for periodically monitoring the temperature signals and for activating the measuring section if the temperature signals fulfill a given threshold condition.

11. The mass flow sensor of claim 10 wherein the measuring section is designed for calibrating the monitoring circuit.

12. The mass flow sensor of claim 7 wherein the pulse control generates, in a first mode of operation during operation of the monitoring circuit, first heating pulses and, during operating of the measuring section, second heating pulses, wherein the first heating pulses have less energy than the second heating pulses.

13. The mass flow sensor of claim 10 wherein the threshold condition is determined from the deviation of a difference of the temperature signals from a given comparison value.

14. The mass flow sensor of claim 7 wherein the temperature sensors are substantially symmetrically arranged on the sides of the heating element.

15. The mass flow sensor of claim 7 having two modes of operation, wherein in a first mode of operation pulses of a first length are generated and in a second mode of operation pulses of a second length are generated, wherein the first length is smaller than the second length, and in particular wherein the first length is small enough that, at its end, no thermal equilibrium is reached in the region of the temperature sensors.

16. The mass flow sensor of claim 15 comprising a digital analog converter with adjustable resolution, wherein the resolution is set to be smaller in the first mode of operation than in the second mode of operation.

17. The mass flow sensor of claim 7 wherein the temperature sensors are thermocouples.