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Pressure sensor for detecting differential pressure between two spaces

  • US 6,550,339 B1
  • Filed: 05/01/2000
  • Issued: 04/22/2003
  • Est. Priority Date: 05/06/1999
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor comprising:

  • a partition member;

    first and second sensor elements, each comprising;

    a semiconductor substrate having a pressure reference chamber therein;

    a diaphragm formed as a wall defining the pressure reference chamber; and

    a conversion member for converting deformation of the diaphragm into an electric signal; and

    a signal processing element for processing the electric signal that is provided in one of the first and second sensor elements, wherein the signal processing element is a signal processing circuit;

    wherein the first and second sensor elements are respectively disposed in first and second pressure spaces, which are different from each other and separated from each other by the partition member to respectively have first and second pressures;

    wherein the partition member includes thereon a conductive member that electrically connects the first sensor element with the second sensor element;

    wherein a differential pressure between the first and second pressures is detected as a relative pressure by a difference between outputs from the first and second sensor elements.

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