Nozzle arrangement for an ink jet printhead that includes a shape memory actuator

• US 6,550,896 B2
• Filed: 07/09/2001
• Issued: 04/22/2003
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Memjet Technology Ltd. (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Tran, Huan
• Assistant Examiner(s): Do, An H.
• Application Number:
  US09/900,176
• Publication Number:
  US 20010043254A1
• Time in Patent Office: 652 Days
• Field of Search: 347/20, 347/44, 347/47, 347/54, 347/68-72, 347/55, 298/901, 310/328-330
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer

Abstract

A nozzle arrangement for an ink jet printhead includes a substrate. Nozzle chamber walls are arranged on the substrate to define a nozzle chamber of the nozzle arrangement. An actuator is provided for ejecting ink from the nozzle chamber. The actuator includes an actuating member, a portion of the actuating member being in the form of a shape memory material which is capable of generating movement of the actuating member between pre-operative and post-operative positions when the shape memory material undergoes a structural change to or from a trained shape under predetermined conditions to eject ink from the nozzle chamber. The actuator includes a transformation mechanism that is operatively arranged with respect to the shape memory material to generate said predetermined conditions.

Claims

1. A nozzle arrangement for an ink jet printhead, the nozzle arrangement comprising

a wafer substrate;

nozzle chamber walls arranged on the wafer substrate to define a nozzle chamber of the nozzle arrangement and an ink ejection port in fluid communication with the nozzle chamber, the nozzle chamber walls being the product of at least an etching process carried out on the substrate; and

an actuator for ejecting ink from the nozzle chamber, the actuator comprising;

at least one actuating member that is displaceable between pre-operative and post-operative positions with respect to the nozzle chamber walls to eject ink from the ink ejection port, at least a portion of the, or each, actuating member being in the form of a shape memory material which is capable of generating said displacement of the, or each, actuating member between pre-operative and post-operative positions when the shape memory material undergoes a structural change to or from a trained shape under predetermined conditions; and

a transformation mechanism that is operatively arranged with respect to the shape memory material to generate said predetermined conditions.

2. A nozzle arrangement as claimed in claim 1, which is the result of an integrated circuit fabrication technique so that the nozzle arrangement includes a wafer substrate and a drive circuitry layer.

3. A nozzle arrangement as claimed in claim 2, which defines a micro electro-mechanical system.

4. A nozzle arrangement as claimed in claim 3, in which the transformation mechanism is in the form of a heat-generating mechanism and the shape memory material is capable of being transformed into its trained shape on the application of heat by the heat-generating mechanism, to facilitate the generation of movement between the pre-operative and post-operative positions.

5. A nozzle arrangement as claimed in claim 4, in which said material is in the form of a shape memory alloy, the actuating member defining its pre-operative condition when said shape memory alloy is below its transformation temperature and the actuating member defining its operative condition when the shape memory alloy is above its transformation temperature.

6. A nozzle arrangement as claimed in claim 5, in which the shape memory alloy is selected so that the actuating member defines a martensitic device so that, when the actuating member is in its pre-operative condition, the shape memory alloy is in a martensitic phase and when the actuating member is in an operative condition, the shape memory alloy is in an austenitic phase.

7. A nozzle arrangement as claimed in claim 6, in which the shape memory alloy is a nickel titanium alloy.

8. A nozzle arrangement as claimed in claim 5, in which the actuating member is layered with the shape memory alloy comprising a layer of the actuating member and a further layer of the actuating member comprising a tensioned layer which is configured so that, when the tensioned layer is positioned on the layer of shape memory alloy, the layer of the shape memory alloy is deformed together with the tensioned layer into the pre-operative condition.

9. A nozzle arrangement as claimed in claim 8, in which the layer of the shape memory alloy defines a heating element that is capable of being resistively heated when a current is passed through the heating element, the layer of the shape memory alloy being electrically connected to drive circuitry within the drive circuitry layer.

10. An ink jet printhead that comprises:

a wafer substrate; and

at least one nozzle arrangement positioned on the wafer substrate, the, or each, nozzle arrangement comprising;

nozzle chamber walls arranged on the wafer substrate to define a nozzle chamber of the nozzle arrangement and an ink ejection port in fluid communication with the nozzle chamber, the nozzle chamber walls being the product of a deposition and etching process carried out on the wafer substrate; and

an actuator for ejecting ink from the nozzle chamber, the actuator comprising;

at least one actuating member that is displaceable between pre-operative and post-operative positions with respect to the nozzle chamber walls to eject ink from the ink ejection port, at least a portion of, the, or each, actuating member being in the form of a shape memory material which is capable of generating said displacement of the, or each, actuating member when the shape memory material undergoes a structural change to or from a trained shape under predetermined conditions; and

a transformation mechanism that is operatively arranged with respect to the shape memory material to generate said predetermined conditions.