Externally excited torroidal plasma source with a gas distribution plate

• US 6,551,446 B1
• Filed: 08/11/2000
• Issued: 04/22/2003
• Est. Priority Date: 08/11/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Tanaka, Tsutomu, Ye, Yan, Ramaswamy, Kartik, Nguyen, Andrew, Hanawa, Hiroji, Collins, Kenneth S.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US09/637,174
• Time in Patent Office: 984 Days
• Field of Search: 118/723.I, 118/723.IR, 118/723.AN, 156/345, 315/111.51
• US Class Current: 156/345.48
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma

Abstract

A plasma reactor for processing a workpiece includes a vacuum enclosure, including a wall, defining a vacuum chamber, the vacuum chamber having a main chamber portion on one side of the wall and a plenum on another side of the wall, the plenum communicating with the chamber portion through at least one opening in the wall, a workpiece support within the main chamber portion and facing the wall. A gas distribution plate is adjacent the wall and faces the workpiece support and is coupled to a reactive process gas supply for injecting reactive process gases directly into a process region adjacent the workpiece support. A gas injection port at the plenum is coupled to a diluent gas supply for injecting diluent gases into the plenum. A coil antenna adapted to accept RF power is inductively coupled to the interior of said plenum, and is capable of maintaining a plasma in a reentrant path through the plenum and across the process region.

Claims

1. A plasma reactor for processing a workpiece, said plasma reactor comprising:

a vacuum enclosure, including a wall, defining a vacuum chamber, said vacuum chamber having a main chamber portion on one side of said wall and a plenum on another side of said wall, said plenum communicating with said chamber portion through at least one opening in said wall;

a workpiece support within said main chamber portion and facing said wall;

a gas distribution plate coupled to said wall, said wall separating said main chamber portion from the plenum, facing said workpiece support and coupled to a reactive process gas supply for injecting reactive process gases directly into a process region adjacent said workpiece support;

a gas injection port at said plenum coupled to a diluent gas supply for injecting diluent gases into said plenum; and

a first coil antenna adapted to accept RF power, inductively coupled to the interior of said plenum, and capable of maintaining a plasma in a reentrant path through the plenum and across the process region.

2. The reactor of claim 1 wherein said plenum comprises a hollow conduit and said wall has a pair of openings connected to respective ends of said conduit.

3. The reactor of claim 2 wherein:

said enclosure comprises a side wall and a ceiling;

said conduit is connected to openings in opposite sides of said side wall.

4. The reactor of claim 2 wherein:

said enclosure comprise a side wall and a ceiling;

said conduit is connected to openings in said ceiling near opposite sides of said wafer support.

5. The reactor of claim 1 wherein said plenum comprises an enclosure enclosing an azimuthally circular annular volume and said opening in said wall comprises a circular annular opening coinciding with said plenum.

6. The reactor of claim 3 wherein a central void is enclosed between said plenum and said vacuum enclosure, said coil antenna being disposed within said central void.

7. The reactor of claim 6 further comprising an access pipe extending in a longitudinal direction from the outside of said plenum to said central void, and conductors running through said access pipe and connected to said coil antenna.

8. The reactor of claim 6 wherein said coil antenna comprises plural windings in said central void, said plural windings having respective axes disposed at respective angles about an axis of said workpiece support.

9. The reactor of claim 8 wherein said plural windings are coupled to respective plural RF signals of a common frequency and different phases so as to produce a plasma current rotating in a plane parallel to a plane of said workpiece support.