Toroidal low-field reactive gas source

• US 6,552,296 B2
• Filed: 09/17/2001
• Issued: 04/22/2003
• Est. Priority Date: 06/26/1997
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: Applied Science and Technology, Inc. (MKS Instruments Incorporated)
• Inventors: Chen, Xing, Smith, Donald K., Holber, William M., Georgelis, Eric
• Primary Examiner(s): PASCHALL, MARK H
• Application Number:
  US09/953,763
• Publication Number:
  US 20020046991A1
• Time in Patent Office: 582 Days
• Field of Search: 219/121.4, 219/121.41, 219/121.42, 219/121.43, 219/121.48, 219/121.54, 219/121.57, 219/121.59, 315/111.21, 315/111.51, 156/345, 156/646.1, 156/643.1, 118/723.R, 118/723.I, 204/298.31, 204/298.21
• US Class Current: 219/121.43
• CPC Class Codes: H01J 27/16 using high-frequency excitation, e.g. microwave excitation
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts

Abstract

An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

Claims

1. A reactive gas source for dissociating gases in a toroidal plasma comprising:

a plasma chamber for containing a gas, the plasma chamber having at least one dielectric spacer that electrically isolates a region of the plasma chamber to prevent induced current flow from forming in the plasma chamber itself, the at least one dielectric spacer being protected from the plasma by a protruded plasma chamber wall;

a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber; and

a solid state AC switching power supply supplying an AC current to the primary winding without requiring the use of a conventional impedance matching network, the AC current inducing an AC potential inside the plasma chamber that forms the plasma that completes a secondary circuit of the transformer and dissociates the gas.

2. The reactive gas source of claim 1 further comprising a vacuum seal disposed adjacent the at least one dielectric spacer.

3. The reactive gas source of claim 1 wherein the at least one dielectric spacer is disposed in a recess adjacent the protruded chamber wall.

4. The reactive gas source of claim 2 wherein the vacuum seal is located outside the dielectric spacer.

5. The reactive gas source of claim 1 wherein the plasma chamber comprises at least one of a metallic material, a coated metallic material and dielectric material.

6. The reactive gas source of claim 1 wherein the AC switching power supply supplies the AC current to the primary winding without using the conventional impedance matching network.

7. The reactive gas source of claim 1 wherein the AC switching power supply comprises one or more switching transistors that supply the AC current to the primary winding without requiring the use of the conventional impedance matching network.

8. A method for dissociating gases in a plasma comprising:

confining a gas in a plasma chamber;

electrically isolating a region of the plasma chamber using at least one dielectric spacer to prevent induced current flow from forming in the plasma chamber itself;

providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

inducing an AC potential inside the plasma chamber by supplying an AC current generated by a solid state AC switching power supply, without requiring the use a conventional impedance matching network, to the primary winding of the transformer;

forming a toroidal plasma in the plasma chamber that completes a secondary circuit of the transformer and dissociates the gas; and

protecting the at least one dielectric spacer from the plasma by a protruded plasma chamber wall.

9. The method of claim 8 further comprising positioning a vacuum seal adjacent the at least one dielectric spacer.

10. The method of claim 8 further comprising disposing the at least one dielectric spacer in a recess adjacent the protruded plasma chamber wall.

11. The method of claim 8 further comprising forming a vacuum seal outside the at least one dielectric spacer.

12. The method of claim 8 wherein the plasma chamber comprises at least one of a metallic material, coated metallic material and dielectric material.

13. The method of claim 8 further comprising supplying the AC current generated by the solid state AC switching power supply to the primary winding without using the conventional impedance matching network.

14. The method of claim 8 wherein the solid state AC switching power supply comprises one or more switching transistors for supplying the AC current to the primary winding without requiring the use of the conventional impedance matching network.

15. A plasma chamber for use with a reactive gas source comprising:

an inlet for receiving a gas,

one or more chamber walls for containing the gas, the chamber walls comprising at least one of a metallic material, coated metallic material and dielectric material; and

at least one dielectric spacer that electrically isolates a region of the plasma chamber to prevent induced current flow from forming in the plasma chamber itself, the at least one dielectric spacer being protected from a plasma formed in the plasma chamber by a protrusion on the plasma chamber wall.

16. The plasma chamber of claim 15 further comprising a vacuum seal disposed adjacent the at least one dielectric spacer.

17. The plasma chamber of claim 15 wherein the at least one dielectric spacer is disposed in a recess adjacent the protrusion on the plasma chamber wall.

18. The plasma chamber of claim 16 wherein the vacuum seal is formed outside the at least one dielectric spacer.

19. A reactive gas source for dissociating gases in a toroidal plasma comprising:

a plasma chamber comprising a gas, the plasma chamber having at least one dielectric spacer that electrically isolates a region of the plasma chamber to prevent induced current flow from forming in the plasma chamber itself, the at least one dielectric spacer being protected from the plasma by a protrusion in the plasma chamber;

a gas inlet for providing the gas to the plasma chamber;

a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

a solid state AC switching power supply comprising one or more switching semiconductor devices and having an output coupled to the primary winding without requiring the use of a conventional impedance matching network, the AC switching power supply supplying an AC current to the primary winding without requiring the use of the conventional impedance matching network, the AC current inducing an AC potential inside the plasma chamber that forms the toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas.

20. A method for dissociating gases in a plasma comprising:

confining a gas in a plasma chamber;

electrically isolating a region of the plasma chamber using at least one dielectric spacer, to prevent induced current flow from forming in the plasma chamber itself;

providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

inducing an AC potential inside the plasma chamber by supplying an AC current generated by a solid state AC switching power supply, without requiring the use a conventional impedance matching network, to the primary winding of the transformer;

forming a toroidal plasma in the plasma chamber that completes a secondary circuit of the transformer and dissociates the gas; and

protecting the at least one dielectric spacer from the plasma by a protrusion in the plasma chamber.