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Toroidal low-field reactive gas source

DC
  • US 6,552,296 B2
  • Filed: 09/17/2001
  • Issued: 04/22/2003
  • Est. Priority Date: 06/26/1997
  • Status: Expired due to Term
First Claim
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1. A reactive gas source for dissociating gases in a toroidal plasma comprising:

  • a plasma chamber for containing a gas, the plasma chamber having at least one dielectric spacer that electrically isolates a region of the plasma chamber to prevent induced current flow from forming in the plasma chamber itself, the at least one dielectric spacer being protected from the plasma by a protruded plasma chamber wall;

    a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber; and

    a solid state AC switching power supply supplying an AC current to the primary winding without requiring the use of a conventional impedance matching network, the AC current inducing an AC potential inside the plasma chamber that forms the plasma that completes a secondary circuit of the transformer and dissociates the gas.

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