Automated minimization of optical path difference and reference mirror focus in white-light interference microscope objective

• US 6,552,806 B1
• Filed: 02/03/2000
• Issued: 04/22/2003
• Est. Priority Date: 02/03/2000
• Status: Expired due to Fees

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Veeco Instruments Incorporated
• Inventors: Unruh, Paul R., Swinford, Richard W., Guenther, Bryan W., Aziz, David J.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): CONNOLLY, PATRICK J
• Application Number:
  US09/497,567
• Time in Patent Office: 1,174 Days
• Field of Search: 356/497, 356/511, 356/512, 359/371
• US Class Current: 356/512
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/02087 Combining two or more images of the same region
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers

Abstract

Average fringe contrast is determined by PSI measurements at each step of relatively large translations of the reference optics and mirror of a white-light Linnik interference objective and the resulting data are used to minimize the OPD between the reference and test beam paths of the instrument. Utilizing the same algorithms used in the art to perform conventional vertical scanning interferometry, the position of minimum OPD is determined by finding the position of maximum average fringe contrast. Furthermore, by automating the system with a precise translation mechanism, operator-to-operator variations are completely eliminated and the precision of the process of OPD minimization is greatly improved. In another embodiment of the invention, the optimal focal position of the reference mirror is found at the same time by calculating the average lateral variation of fringe contrast as a function of OPD and focal position. The optimal OPD and focal position correspond to the maximum average lateral variation of fringe contrast in the resulting three-dimensional space.

Claims

1. A method for minimizing the optical path difference between a test beam path and a reference beam path produced in an interference microscope objective having a reference-arm assembly that comprises a reference lens and a reference mirror, and having first scanning means for carrying out interference measurements of a test surface, the method comprising the following steps:

(a) providing second scanning means for translating the reference-arm assembly along said reference beam path;

(b) translating the reference-arm assembly through a plurality of positions along the reference beam path using said second scanning means;

(c) measuring a fringe modulation at predetermined locations corresponding to said plurality of positions along the reference beam path;

(d) determining a location of the reference-arm assembly along the reference beam path corresponding to an optimal fringe modulation; and

(e) fixing said optimal-fringe-modulation location of the reference-arm assembly such that interferometric measurements of the test surface may be carried out by varying the optical path difference therefrom.

2. The method of claim 1, wherein said step (c) is carried out by performing phase-shifting interferometric measurements at each of said plurality of positions.

3. The method of claim 1, wherein said optimal fringe modulation is selected to correspond to a maximum fringe modulation and said step (d) is carried out by performing vertical-scanning interferometry analysis with the fringe modulation data produced by step (c) at each of said plurality of positions.

4. The method of claim 3, wherein said fringe modulation at each of said plurality of positions along the reference beam path is an average of modulation components calculated for individual pixels of a light detector.

5. The method of claim 1, wherein said second scanning means includes a gear motor.

6. The method of claim 1, wherein said steps (b), (c), (d) and (e) are carried out automatically.

7. A method for minimizing the optical path difference between a test beam path and a reference beam path produced in an interference microscope objective having a reference-arm assembly that comprises a reference lens and a reference mirror, and for contemporaneously optimizing the focal position of the reference mirror, wherein the objective comprises first scanning means for carrying out interference measurements of a test surface, the method comprising the following steps:

(a) providing second scanning means for translating the reference-arm assembly in an OPD dimension along said reference beam path;

(b) providing third scanning means for translating the reference mirror with respect to the reference lens in a focal-distance dimension along said reference beam path;

(c) measuring a fringe modulation at predetermined locations corresponding to a plurality of OPD and focal-distance positions obtained using said second and third scanning means;

(d) calculating a lateral variation of fringe modulation for each of said predetermined locations;

(e) determining an optimal OPD position and an optimal focal-distance position corresponding to an optimal lateral variation of fringe modulation; and

(f) fixing the OPD and focal-distance positions at said optimal OPD and focal-distance positions such that interferometric measurements of the test surface may be carried out by varying the OPD therefrom.

8. The method of claim 7, wherein said step (c) is carried out by performing phase-shifting interferometric measurements at each of said plurality of OPD and focal-distance positions.

9. The method of claim 7, wherein said optimal lateral variation of fringe modulation is selected to correspond to a maximum lateral variation of fringe modulation and said step (e) is carried out by finding said maximum using the lateral variation of fringe modulation calculated for said predetermined locations.

10. The method of claim 9, wherein said step (e) is carried out by performing vertical-scanning interferometry analysis with the later variation of fringe modulation data produced by step (d) at each of said plurality of positions.

11. The method of claim 9, wherein said lateral variation of fringe modulation at each of said predetermined locations is an average of lateral variation of fringe modulation components calculated for individual pixels of a light detector.

12. The method of claim 7, wherein each of said second and third scanning means includes a gear motor.

13. The method of claim 7, wherein said steps (c), (d), (e) and (f) are carried out automatically.

14. An apparatus for minimizing the optical path difference between a test beam path and a reference beam path produced in an interference microscope objective having a reference-arm assembly that comprises a reference lens and a reference mirror and having first scanning means to carry out interference measurements of a test surface, comprising:

second scanning means to effect a translation of the reference-arm assembly along said reference beam path;

means for measuring a fringe modulation at a plurality of positions along the reference beam path scanned by said second scanning means;

means for determining a position of the reference-arm assembly along the reference beam path corresponding to an optimal fringe modulation; and

means for fixing said position of the reference-arm assembly such that interferometric measurements of the test surface may be carried out by translating the reference-arm assembly therefrom.

15. The apparatus of claim 14, wherein said optimal fringe modulation is selected to correspond substantially to maximum fringe modulation.

16. The apparatus of claim 15, wherein said means for determining a position of the reference-arm assembly along the reference beam path corresponding to maximum fringe modulation includes means for carrying out vertical-scanning interferometry analysis with the fringe modulation data measured at each of said plurality of positions.

17. The apparatus of claim 14, wherein said means for measuring a fringe modulation at a plurality of positions includes means for carrying out phase-shifting interferometric measurements at each of said plurality of positions.

18. The apparatus of claim 14, wherein said fringe modulation at each of said plurality of positions along the reference beam path is an average of fringe-modulation components calculated for individual pixels of a light detector.

19. The apparatus of claim 14, wherein said second scanning means includes a gear motor.

20. An apparatus for minimizing the optical path difference between a test beam path and a reference beam path produced in an interference microscope objective having a reference-arm assembly that comprises a reference lens and a reference mirror, and for contemporaneously optimizing the focal position of the reference mirror, the apparatus having first scanning means for carrying out interference measurements of a test surface, comprising:

second scanning means for translating the reference-arm assembly in an OPD dimension along said reference beam path;

third scanning means for translating the reference mirror with respect to the reference lens in a focal-distance dimension along said reference beam path;

means for measuring a fringe modulation at predetermined locations corresponding to a plurality of OPD and focal-distance positions obtained using said second and third scanning means;

means for calculating a lateral variation of fringe modulation for each of said predetermined locations;

means for determining an optimal OPD and focal-distance position corresponding to an optimal lateral variation of fringe modulation; and

means for fixing the OPD and focal-distance positions at said optimal OPD and focal-distance positions such that interferometric measurements of the test surface may be carried out by varying the OPD therefrom.

21. The apparatus of claim 20, wherein said optimal lateral variation of fringe modulation is selected to correspond substantially to a maximum lateral variation of fringe modulation.

22. The apparatus of claim 21, wherein said means for determining an optimal OPD and focal-distance position corresponding to a maximum lateral variation of fringe modulation includes means for carrying out vertical-scanning interferometry analysis with lateral variation of fringe modulation data calculated at said predetermined locations.

23. The apparatus of claim 20, wherein said means for measuring a fringe modulation at predetermined locations corresponding to a plurality of OPD and focal-distance positions includes means for carrying out phase-shifting interferometric measurements at each of said plurality of OPD and focal-distance positions.

24. The apparatus of claim 20, wherein said lateral variation of fringe modulation for each of said predetermined locations corresponding to said plurality of OPD and focal-distance positions is an average of lateral variation of fringe-modulation components calculated for individual pixels of a light detector.

25. The apparatus of claim 20, wherein each of said second and third scanning means include a gear motor.