Nozzle plate and a manufacturing process thereof
First Claim
1. A nozzle plate for an ink jet head provided with nozzle orifices through which ink is to be ejected,wherein the nozzle orifices are formed in the nozzle plate by an excimer laser device with a working lens which has a numerical aperture (NA) set to 0.13 or more and 0.35 or less, wherein the range of the numerical aperture is determined based on size of a round portion produced around the nozzle orifice and a focal depth of an optical system used in the excimer laser device, and wherein the value 0.13 is selected so that an amount of the round portion becomes lower than a predetermined amount and approximately corresponds to 2 μ
- m size of the round portion, and the value 0.35 is selected so that the nozzle plate and the working lens are easily positioned when the nozzle orifices are formed by the excimer laser device.
1 Assignment
0 Petitions
Accused Products
Abstract
A nozzle plate is provided with nozzle orifices 2 through which ink is to be ejected, the nozzle orifices 2 being formed by an excimer laser. A manufacturing process for manufacturing the nozzle plate in which the nozzle orifices 2 are formed by the excimer laser uses a working lens having a numerical aperture (NA) set to 0.13 or more and 0.35 or less.
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Citations
14 Claims
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1. A nozzle plate for an ink jet head provided with nozzle orifices through which ink is to be ejected,
wherein the nozzle orifices are formed in the nozzle plate by an excimer laser device with a working lens which has a numerical aperture (NA) set to 0.13 or more and 0.35 or less, wherein the range of the numerical aperture is determined based on size of a round portion produced around the nozzle orifice and a focal depth of an optical system used in the excimer laser device, and wherein the value 0.13 is selected so that an amount of the round portion becomes lower than a predetermined amount and approximately corresponds to 2 μ - m size of the round portion, and the value 0.35 is selected so that the nozzle plate and the working lens are easily positioned when the nozzle orifices are formed by the excimer laser device.
- View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A manufacturing process for manufacturing a nozzle plate for an ink jet head provided with nozzle orifices though which ink is to be ejected,
wherein an excimer laser device with a working lens which has a numerical aperture (NA) set to a range of 0.13 or more and 0.35 or less is utilized for forming the nozzle orifices in the nozzle plate, wherein the range of the numerical aperture is determined based on size of a round portion produced around the nozzle orifice and a focal depth of an optical system used in the excimer laser device, and wherein the value 0.13 is selected so that an amount of the round portion becomes lower than a predetermined amount, and the value 0.35 is selected so that the nozzle plate and the working lens are easily positioned when the nozzle orifices are formed by the excimer laser device.
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14. A nozzle plate for an ink jet head provided with nozzle orifices through which ink is to be ejected,
wherein the nozzle orifices are formed in the nozzle plate by an excimer laser device with a working lens which has a numerical aperture (NA) set to 0.13 or more and 0.35 or less, wherein the range of the numerical aperture is determined based on size of a round portion produced around the nozzle orifice and a focal depth of an optical system used in the excimer laser device, and wherein the value 0.13 is selected so that an amount of the round portion becomes lower than a predetermined amount, and the value 0.35 is selected so that the nozzle plate and the working lens are easily positioned when the nozzle orifices are formed by the excimer laser device and approximately corresponds to 1 μ - m of the focal depth.
Specification