Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
First Claim
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1. A composition, comprising:
- a film of LiCoO2 on a substrate wherein a majority of grains are oriented with their (101) and (104) planes parallel to the substrate.
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Abstract
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
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6 Claims
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1. A composition, comprising:
a film of LiCoO2 on a substrate wherein a majority of grains are oriented with their (101) and (104) planes parallel to the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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