Electrostatic discharge protection for sensors

• US 6,555,888 B2
• Filed: 07/01/2002
• Issued: 04/29/2003
• Est. Priority Date: 12/30/1998
• Status: Expired due to Term

• Current Assignee: Apple Inc.
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Inventors: Lepert, Arnaud Yves, Thomas, Danielle A.
• Primary Examiner(s): Pham; Long
• Assistant Examiner(s): Peralta; Ginette
• Application Number:
  US10/186,801
• Publication Number:
  US 20020164862A1
• Time in Patent Office: 302 Days
• Field of Search: 257/222,225,226,232-4,252,277,306,415-18,457-8,487-8,340,532,600,632 438/250-54,393-7,238 369/126 361/283-1 341/33 382/124 324/661-2,671
• US Class Current: 257/415
• CPC Class Codes: G06V 40/1329 Protecting the fingerprint sensor against damage caused by the finger

Abstract

A structure and method is disclosed for dissipating electrostatic charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry, and a conductive layer and passivation layers disposed over the underlying dielectric layer wherein the conductive layer diffuses electrostatic charges at the surface of the integrated circuit.

Claims

1. A portion of an integrated circuit, comprising:

a plurality of conductive plates which form capacitors with an object placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object; and

a composite protection layer that isolates the conductive plates and protects the conductive plates from damage, wherein the composite protection layer comprises;

an insulating layer between and over the plurality of conductive plates; and

a conductive electrostatic discharge region overlying at least a portion of dielectric region,

wherein at least a portion of the protective layer includes an opening therethrough over at least one of the conductive plates.

2. The integrated circuit portion of claim 1, wherein the insulating layer further comprises a passivation layer to further protect the conductive plates from damage.

3. The integrated circuit portion of claim 2, wherein the conductive electrostatic discharge region includes an opening therethrough over at least some of the conductive plates.

4. The integrated circuit portion of claim 3, further comprising:

a passivation layer over the composite protection layer, the passivation layer having an opening therethrough coinciding with the opening through the conductive electrostatic discharge region.

5. The integrated circuit portion of claim 3, further comprising:

a passivation layer over the composite protection layer and within the opening through the conductive electrostatic discharge region.

6. The integrated circuit portion of claim 2, wherein the dielectric layer comprises a first dielectric layer of oxide or doped glass disposed under a second dielectric layer of nitride.

7. The integrated circuit portion of claim 2, further comprising:

a passivation layer of silicon carbide or silicon nitride disposed over at least a portion of the composite protection layer.

8. A portion of an integrated circuit, comprising:

a dielectric layer over a plurality of conductive plates which form capacitors with an object placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object, the dielectric layer isolating the conductive plates; and

a conductive layer disposed over at least a portion of the dielectric layer and disposed over or adjacent to one or more conductive plates, wherein the conductive layer dissipates an electrostatic charge in a manner that prevents the electrostatic charge from reaching the plurality of conductive plates and wherein the conductive layer includes an opening therethrough over at least one of the conductive plates.

9. The integrated circuit portion of claim 8, further comprising:

a passivation layer disposed over at least a portion of the dielectric layer.

10. The integrated circuit portion of claim 9, wherein the conductive layer is disposed over substantially all of the dielectric layer, and wherein the passivation layer is disposed over substantially all of the conductive layer.

11. The integrated circuit portion of claim 9, wherein the conductive layer is disposed over substantially all of the dielectric layer, and wherein the passivation layer is disposed over a portion of the conductive layer adjacent to the conductive plates.

12. The integrated circuit portion of claim 9, wherein the conductive layer is disposed over a portion of the dielectric layer adjacent to the conductive plates, and wherein the passivation layer is disposed over the conductive layer.

13. The integrated circuit portion of claim 9, wherein the conductive layer is disposed over a portion of the dielectric layer adjacent to the conductive plates, and wherein the passivation layer is disposed over the conductive layer and over the dielectric layer not covered by the conductive layer.

14. The integrated circuit portion of claim 9, wherein the passivation layer is disposed over the dielectric layer adjacent to the conductive plates, and wherein the conductive layer is disposed over the dielectric layer substantially over the conductive plates.

15. The integrated circuit portion of claim 14, wherein the conductive layer and passivation layer are substantially planar.

16. The integrated circuit portion of claim 9, wherein every 2 of the plurality of the conductive plates forms a capacitive sensor and wherein the conductive layer is only disposed over at least a portion of 1 of every 2 conductive plates of the capacitive sensor and is adjacent to the other conductive plate of the capacitive sensor.

17. A device, comprising:

a plurality of conductive plates, each pair of conductive plates forming a capacitor with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object,

a dielectric layer over the conductive plates, the dielectric layer isolating the conductive plates;

a passivation layer over the dielectric layer, the passivation layer having openings therethrough over the conductive plates; and

electrostatic discharge regions over the conductive plates at least within the openings through the passivation layer.

18. The device of claim 17, wherein the dielectric layer comprises a first dielectric layer of oxide or doped glass disposed under a second dielectric layer of nitride.

19. The device of claim 17, wherein the passivation layer comprises silicon carbide or silicon nitride.

20. The device of claim 17, wherein the passivation layer has opening therethrough only over one of each pair of conductive plates forming a capacitive sensor.