Flatmotor device and exposure device

• US 6,555,936 B1
• Filed: 11/30/1999
• Issued: 04/29/2003
• Est. Priority Date: 12/04/1998
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew, Tanaka, Keiichi
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): Jones, Judson
• Application Number:
  US09/450,772
• Time in Patent Office: 1,246 Days
• Field of Search: 310/12, 310/13, 310/14, 310/58, 310/60.A, 310/64, 310/65
• US Class Current: 310/12.29
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/02 Linear motors; Sectional motors
• CPC Class Codes: H02K 9/20 wherein the cooling medium vaporises within the machine casing

Abstract

To provide a flat motor device capable of suppressing a thermal effect on a peripheral environment. When currents are supplied to armature coils 34 confronting a pole unit 40, a wafer stage WST is driven along a moving surface 32a by electromagnetic force. With this operation, the armature coils 34, to which the respective currents are supplied, generate heat. The armature coils 34 are disposed in the interior of a base 32 along the moving surface. A first fluid passage 62, in which a first fluid flows in a laminar flow state, is disposed to the armature coils on the moving surface side thereof and a second fluid passage 64, in which a second fluid flows in a transition flow state, is disposed thereto on the side opposite to the moving surface, respectively. Therefore, a temperature boundary layer is formed in the flow of the first fluid, whereby the transmission of the heat of the armature coils 34 to the moving surface is effectively prevented as well as the heat can be effectively removed from the armature coils 34 by the second fluid by an increase in the heat transfer coefficient between the second fluid and a stator yoke 58.

Claims

1. A flat motor device, comprising:

a moving unit that moves along a predetermined moving surface; and

a fixed unit having the moving surface formed on a side thereof confronting the moving unit,

wherein one of the moving unit and the fixed unit includes a pole unit; and

the other of the moving unit and the fixed unit includes armature coils, a heat insulating chamber disposed adjacent a first side of the armature coils that faces toward the moving surface and a cooling chamber disposed adjacent a second side of the armature coils that faces opposite the first side.

2. A flat motor device according to claim 1, wherein interiors of the heat insulating chamber and the cooling chamber are arranged as first and second fluid passages respectively in which fluids having different flow conditions flow.

3. A flat motor device according to claim 2, further comprising a fluid supply device that supplies first and second fluids into the first and second fluid passages by regulating flow states so that the flow of the fluid in the interior of the heat insulating chamber is made to a laminar flow and the flow of the fluid in the interior of the cooling chamber is made to an approximate transition flow.

4. A flat motor device according to claim 3, wherein the fluid supply device supplies the first and second fluids into the respective first and second fluid passages so that the flowing direction of the fluid flowing in the heat insulating chamber and the flowing direction of the fluid flowing in the cooling chamber are one of a same direction or an opposite direction.

5. A flat motor device according to claim 1, wherein the fixed unit includes a first wall having the moving surface formed on one side thereof and a deformation preventing member for supporting the first wall from the other side thereof.

6. A flat motor device according to claim 5, wherein:

the fixed unit includes, in an interior thereof, the armature coils disposed along the moving surface, the heat insulating chamber disposed on the moving surface side of the armature coils and the cooling chamber disposed the side of the armature coils opposite to the moving surface side; and

a cross-sectional shape of the deformation preventing member is a tapered shape in a flow passage portion thereof in the heat insulating chamber.

7. A flat motor device according to claim 6, further comprising a plate-shaped partition member disposed on the moving surface side of the armature coils, and wherein the flow passage in the heat insulating chamber is formed between the first wall and the partition member.

8. A flat motor device according to claim 2, further comprising a temperature controller that controls the temperatures of the respective fluids to temperatures lower than an atmospheric temperature of the flat motor device.

9. A flat motor device according to claim 1, further comprising a holding member isolated from the fixed unit with respect to oscillation for holding the armature coils or the pole unit of the fixed unit.

10. An exposure device for transferring a predetermined pattern onto a substrate, wherein the exposure device includes the flat motor device according to claim 1 in a substrate stage unit for driving the substrate.

11. An exposure apparatus that exposes a pattern onto a substrate, comprising:

a substrate stage that holds the substrate, the substrate stage having a reflective portion;

a driver connected to the substrate stage to drive the substrate stage;

a position detector that cooperates with the reflective portion to detect a position of the substrate stage, the position detector receiving a reflection beam from the reflective portion;

a first fluid supply device that supplies a first fluid to a first fluid passage in a first direction, the first fluid passage being formed below a passage of the reflection beam; and

a second fluid supply device that supplies a second fluid to a second fluid passage in a second direction different from the first direction to cool at least part of the driver.

12. An exposure apparatus according to claim 11, wherein the first fluid is different from the second fluid.

13. An exposure apparatus according to claim 11, wherein the first fluid and the second fluid are a same fluid.

14. An exposure apparatus according to claim 11, wherein the second fluid passage is formed below the first fluid passage.

15. An exposure apparatus according to claim 11, wherein the driver comprises a coil and a magnet.

16. An exposure apparatus according to claim 15, wherein the second fluid supply device cools the coil.

17. An exposure apparatus according to claim 11, wherein the first fluid supply device prevents a fluctuation in air of the reflection beam.