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Micromechanical component and process for its fabrication

  • US 6,556,418 B2
  • Filed: 02/28/2001
  • Issued: 04/29/2003
  • Est. Priority Date: 08/31/1998
  • Status: Expired due to Term
First Claim
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1. A micromechanical component, comprising:

  • at least one cell having;

    a cavity with a given vertical dimension;

    a membrane acting as an electrode of a capacitor of said at least one cell, said membrane homogeneously disposed with a substantially uniform thickness over said cavity;

    a counter-electrode of said capacitor disposed under said cavity;

    at least one etching channel laterally adjoining said cavity, said at least one etching channel having a vertical dimension equal to said given vertical dimension; and

    at least one closure adjoining said at least one etching channel from above and disposed outside said membrane.

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