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Integrated chip having SRAM, DRAM and flash memory and method for fabricating the same

  • US 6,556,477 B2
  • Filed: 05/21/2001
  • Issued: 04/29/2003
  • Est. Priority Date: 05/21/2001
  • Status: Expired due to Term
First Claim
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1. A method for fabricating a memory system comprising the steps of:

  • providing a single substrate;

    fabricating at least one NVRAM cell on the single substrate;

    fabricating at least one DRAM cell having a deep trench capacitor on the single substrate; and

    fabricating at least one SRAM cell on the single substrate.

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  • 7 Assignments
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