Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework

• US 6,556,884 B1
• Filed: 06/16/2000
• Issued: 04/29/2003
• Est. Priority Date: 06/16/2000
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Campbell, William J., Oshelski, Anatasia L., Miller, Michael L.
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Bahta, Kidest
• Application Number:
  US09/596,260
• Time in Patent Office: 1,047 Days
• Field of Search: 700/121, 700/31, 700/174, 700/57, 700/44, 700/95, 702/174, 716/21
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32017 Adapt real process as function of changing simulation model, changing for better results
• CPC Class Codes: G05B 2219/32191 Real time statistical process monitoring
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0254 based on a quantitative model, e.g. mathematical relationships between inputs and outputs; functions: observer, Kalman filter, residual calculation, Neural Networks
• CPC Class Codes: G05B 23/0294 Optimizing process, e.g. process efficiency, product quality
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention provides for a method and an apparatus for interfacing a statistical process control system with a manufacturing control system. A manufacturing model is defined. A processing run of semiconductor devices is processed in a manufacturing facility as defined by the manufacturing model. An advanced process control analysis is performed on the processed semiconductor devices. A statistical process control analysis is performed on the processed semiconductor devices. The manufacturing facility is modified in response to the advanced process control analysis and the statistical process control analysis.

Claims

1. A method, comprising:

defining a manufacturing model;

processing semiconductor devices in a manufacturing facility as defined by said manufacturing model;

performing a process control analysis on the processed semiconductor devices using a process controller, said process control analysis comprising acquiring metrology data relating to said processing of semiconductor devices;

performing a statistical process control analysis on said processed semiconductor devices using an SPC controller;

interfacing said process controller and said SPC controller; and

modifying said manufacturing model in response to said process control analysis and said statistical process control analysis, during at least a portion of the time period when said semiconductor devices are processed.

2. The method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a photolithography process for semiconductor devices.

3. The method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes an etching process for semiconductor devices.

4. The method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a deposition process for semiconductor devices.

5. The method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes an implantation process for semiconductor devices.

6. The method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a chemical-mechanical polishing process for semiconductor devices.

7. The method described in claim 1, wherein performing a process control analysis further comprises performing a fault detection analysis.

8. The method described in claim 7, wherein performing a fault detection analysis further comprises:

acquiring production data;

performing process controller performance monitoring using said production data;

modifying said manufacturing model in response to said process controller performance monitoring; and

implementing said modified manufacturing model in said process controller.

9. The method described in claim 8, wherein acquiring production data further comprises acquiring metrology data using a metrology tool.

10. The method described in claim 1, wherein performing a statistical process control analysis further comprises:

measuring a manufacturing parameter;

calculating modification data based upon said manufacturing parameter;

performing statistical process control analysis;

performing results versus prediction analysis based upon said statistical process control analysis; and

modifying said manufacturing model based upon said calculated modification data and said results versus prediction analysis.

11. The method described in claim 10, wherein measuring manufacturing parameter further comprises measuring metrology data using a metrology tool.

12. The method described in claim 10, wherein measuring metrology data further comprises measuring a misalignment error on a semiconductor wafer.

13. The method described in claim 10, wherein measuring metro logy data further comprises measuring a misregistration on a semiconductor wafer.

14. The method described in claim 10, wherein measuring metrology data further comprises measuring polish thickness error on a semiconductor wafer.

15. The method described in claim 10, wherein performing results versus prediction analysis further comprises comparing a predicted manufacturing process behavior to a result of a measured manufacturing process.

28. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 1, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a deposition process for semiconductor devices.

16. A system, comprising:

a processing controller;

a processing tool coupled with said processing controller;

a metrology tool interfaced with said processing tool;

a communications interface coupled with said processing controller, said communications interface being capable of sending feedback signals to said processing controller;

a control modification data calculation unit interfaced with said metrology and connected to said communications interface in a feedback manner for performing feedback adjustments;

a predictor function interfaced with said processing controller;

an statistical process control analysis unit interfaced with said predictor function and said processing tool; and

a results versus prediction analysis unit interfaced with said statistical process control analysis unit and connected to said communications interface in a feedback manner for performing feedback adjustments.

17. The system described in claim 16, wherein said processing controller is a run-to-run controller.

18. The system described in claim 16, wherein said processing controller is an automatic process control (APC) system.

19. The system described in claim 16, wherein said control modification data calculation unit is a computer software program integrated into said processing controller.

20. The system described in claim 16, wherein said predictor function is a computer software program integrated into a manufacturing model.

21. The system described in claim 16, wherein said statistical process control analysis unit is a computer software program.

22. The system described in claim 16, wherein said results versus prediction analysis unit is a computer software program.

23. An apparatus, comprising:

a manufacturing facility capable of manufacturing semiconductor devices;

an automatic process control manufacturing framework coupled with said manufacturing facility, said automatic process control manufacturing framework being capable of performing fine-tune adjustments to said manufacturing facility;

a statistical process control manufacturing framework coupled with said manufacturing facility, said automatic process control manufacturing framework being capable of performing large scale adjustments to said manufacturing facility; and

a communications interface coupled with said automatic process control manufacturing framework and said statistical process control manufacturing framework, wherein said communication interface facilitates communication between said automatic process control manufacturing framework and said statistical process control manufacturing framework.

24. An apparatus for monitoring controller performance using statistical process control analysis, comprising:

means for defining a manufacturing model;

means for processing semiconductor devices in a manufacturing facility as defined by said manufacturing model;

means for performing a process control analysis on the processed semiconductor devices using a process controller, said process control analysis comprising acquiring metrology data relating to said processing of semiconductor devices;

means for performing a statistical process control analysis on said processed semiconductor devices using an SPC controller;

means for interfacing said process controller and said SPC controller; and

means for modifying said manufacturing model in response to said process control analysis and said statistical process control analysis during at least a portion of the time period when said semiconductor devices are processed.

25. A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:

defining a manufacturing model;

processing semiconductor devices in a manufacturing facility as defined by said manufacturing model;

performing a process control analysis on the processed semiconductor devices using a process controller, said process control analysis comprising acquiring metrology data relating to said processing of semiconductor devices;

performing a statistical process control analysis on said processed semiconductor devices using an SPC controller;

interfacing said process controller and said SPC controller; and

modifying said manufacturing model in response to said process control analysis and said. statistical process control analysis, during at least a portion of the time period when said semiconductor devices are processed.

26. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a photolithography process for semiconductor devices.

27. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein defining a manufacturing model further comprises defining a manufacturing model that describes an etching process for semiconductor devices.

29. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein defining a manufacturing model further comprises defining a manufacturing model that describes an implantation process for semiconductor devices.

30. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein defining a manufacturing model further comprises defining a manufacturing model that describes a chemical-mechanical polishing process for semiconductor devices.

31. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein performing a process control analysis further comprises performing a fault detection analysis.

32. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 31, wherein performing a fault detection analysis further comprises:

acquiring production data;

performing process controller performance monitoring using said production data;

modifying said manufacturing model in response to said process controller performance monitoring; and

implementing said modified manufacturing model in said process controller.

33. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 32, wherein acquiring production data further comprises acquiring metrology data using a metrology tool.

34. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 25, wherein performing a statistical process control analysis further comprises:

measuring a manufacturing parameter;

calculating modification data based upon said manufacturing parameter;

performing statistical process control analysis;

performing results versus prediction analysis based upon said statistical process control analysis; and

modifying said manufacturing model based upon said calculated modification data and said results versus prediction analysis.

35. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 34, wherein measuring said manufacturing parameter further comprises measuring metrology data using a metrology tool.

36. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 34, wherein measuring metrology data further comprises measuring a misalignment error on a semiconductor wafer.

37. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 34, wherein measuring metrology data further comprises measuring a misregistration on a semiconductor wafer.

38. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 34, wherein measuring metrology data further comprises measuring polish thickness error on a semiconductor wafer.

39. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method described in claim 34, wherein performing results versus prediction analysis further comprises comparing a predicted manufacturing process behavior to a result of a measured manufacturing process.

40. A method, comprising:

providing a process controller to control processing of a semiconductor wafer;

processing said semiconductor wafer;

providing a Statistical Process Control (SPC) controller to perform a SPC analysis;

interfacing said SPC controller with said process controller; and

performing substantially concurrent fault detection and process control based upon said interfacing of said SPC controller and said process controller, during at least a portion of the time during processing of a semiconductor wafer.

41. The method of claim 40, further comprising providing a manufacturing model to control said processing of said semiconductor wafer.

42. The method of claim 41, further comprising modifying said manufacturing model to reduce a bias in said manufacturing model based upon said interfacing of said process controller and said SPC controller.

43. The method described in claim 41, wherein performing a fault detection analysis further comprises:

acquiring production data;

performing a process controller performance monitoring using said production data;

modifying said manufacturing model in response to said process controller performance monitoring; and

implementing said modified manufacturing model in said process controller.

44. The method described in claim 41, wherein performing said SPC analysis further comprises:

measuring a manufacturing parameter;

calculating modification data based upon said manufacturing parameter;

performing statistical process control analysis;

performing results versus prediction analysis based upon said statistical process control analysis; and

modifying said manufacturing model based upon said calculated modification data and said results versus prediction analysis.