Method for making ink-jet printer nozzles

• US 6,557,967 B1
• Filed: 11/27/2000
• Issued: 05/06/2003
• Est. Priority Date: 10/30/1997
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lee, William T.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): OLSEN, ALLAN W
• Application Number:
  US09/722,891
• Time in Patent Office: 890 Days
• Field of Search: 216/27, 216/39, 347/20, 438/21
• US Class Current: 347/20
• CPC Class Codes: B41J 2/1433 Structure of nozzle plates
• CPC Class Codes: B41J 2/162 Manufacturing of the nozzle plates
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching

Abstract

A method for forming a chamber or nozzle structure in a substrate. The chamber is formed by first creating a surface feature, such as a pit or trench, on the surface of the substrate. A layer of resist is applied to the sidewall of the surface feature and the substrate is isotropically etched such that the etch works back up the inside of the resist on the surface feature sidewall to form a re-entrant angle between the surface feature sidewall and the top of the chamber wall. This results in a chamber that is wider than the opening between the sidewalls of the surface feature. An anisotropic etch step may be performed before or after the isotropic etch step or steps to control the final shape of the chamber.

Claims

1. An ink-jet nozzle device comprising:

a ceramic layer overlying a silicon substrate, the ceramic layer having a thickness between about 2-100 μ

m;

an aperture with an aperture sidewall extending below a free surface of the ceramic layer, the aperture sidewall defining a conduit to a chamber disposed within the ceramic layer, wherein a chamber sidewall forms a re-entrant angle with the aperture sidewall and wherein a planar chamber back wall includes an ink driver coupled to the chamber.

2. The device of claim 1 wherein the chamber sidewall forms an angle greater than 90 degrees with the back wall.

3. The device of claim 1 further comprising integrated ink-jet drive circuitry.