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Dual wafer load lock

  • US 6,558,509 B2
  • Filed: 07/16/2001
  • Issued: 05/06/2003
  • Est. Priority Date: 11/30/1999
  • Status: Expired due to Term
First Claim
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1. Apparatus for transferring a semiconductor substrate between a first environment having a first pressure and a second environment having a vacuum pressure, the apparatus comprising:

  • a chamber body having a first side wall, a second side wall, a top and a bottom defining a chamber volume therebetween;

    a first port disposed in the first wall sealable from the first environment;

    a second port disposed in the second wall sealable from the second environment;

    a first substrate holder disposed between the top and the bottom of the chamber body;

    a second substrate holder disposed between the top of the chamber body and the first substrate holder;

    a window disposed in the top of the chamber; and

    a metrology device disposed on the chamber body, wherein the metrology device is positioned to view the chamber volume through the window.

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