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Perforated work piece, and method for producing it

  • US 6,558,770 B1
  • Filed: 11/08/2000
  • Issued: 05/06/2003
  • Est. Priority Date: 05/08/1998
  • Status: Expired due to Term
First Claim
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1. A perforated work piece, comprising:

  • a substrate made from silicon and having a first region, a second region, a first main surface and a second main surface, said first region having pores formed therein which traverse said substrate from said first main surface to said second main surface, and said second region having further pores formed therein which, starting from said first main surface, extend into said substrate but do not traverse said substrate.

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