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Antifuse structure and method of making

  • US 6,559,516 B1
  • Filed: 01/16/2002
  • Issued: 05/06/2003
  • Est. Priority Date: 01/16/2002
  • Status: Expired due to Fees
First Claim
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1. An antifuse structure, comprising:

  • an antifuse between first and second thermal conduction regions, wherein;

    each of the first and second thermal conduction regions has a portion of low thermal conductivity and a portion of high thermal conductivity; and

    the portion having low thermal conductivity is between the respective said portion of high thermal conductivity and the antifuse;

    wherein;

    each said portion having high thermal conductivity includes an electrically conductive line;

    the portion having low thermal conductivity of the first thermal conduction region includes a first electrode;

    the portion having low thermal conductivity of the second first thermal conduction region includes a second electrode; and

    a control element interfacing the second electrode and being selected from the group consisting of diode and a tunnel junction.

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