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Solid immersion lens structures and methods for producing solid immersion lens structures

  • US 6,560,030 B2
  • Filed: 08/10/2001
  • Issued: 05/06/2003
  • Est. Priority Date: 08/16/2000
  • Status: Expired due to Fees
First Claim
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1. A solid immersion lens structure comprising:

  • a solid immersion lens portion of a generally spherical shape and having a minimum transverse diameter not exceeding a maximum depth and a boundary margin less than said minimum transverse diameter defining undercut margins for forming a lens having a numerical aperture greater than unity and a body portion integral with the solid immersion lens portion from which the solid immersion lens portion extends, the solid immersion lens portion being formed of a molded material in a mold, wherein said solid immersion lens portion can be separated from said mold without damaging either said solid immersion lens portion or said mold.

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