Method and apparatus for polarizing light in a VCSEL

• US 6,560,265 B2
• Filed: 09/11/2001
• Issued: 05/06/2003
• Est. Priority Date: 09/11/2001
• Status: Expired due to Term

• Current Assignee: Applied Optoelectronics
• Original Assignee: Applied Optoelectronics
• Inventors: Hwang, Wen-Yen, Baillargeon, James N.
• Primary Examiner(s): Ip; Paul
• Assistant Examiner(s): NGUYEN, DUNG T
• Application Number:
  US09/951,298
• Publication Number:
  US 20030048827A1
• Time in Patent Office: 602 Days
• Field of Search: 372/96,43,45,46,50,92,99,106
• US Class Current: 372/96
• CPC Class Codes: H01S 5/18319 comprising a periodical structure in lateral directions
• CPC Class Codes: H01S 5/18355 having a defined polarisation
• CPC Class Codes: H01S 5/18386 Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
• CPC Class Codes: H01S 5/2081 using special etching techniques
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

The present invention is directed to a VCSEL and method of fabricating same. First, a substrate is provided. Then, a first reflector is disposed (where “disposed” includes being deposited or epitaxially grown) on the substrate, which is followed by an active region being disposed on the first reflector. Then, a second reflector is disposed on the active region such that the active region is interposed between the first reflector and the second reflector. Then, a polarizer is formed inside, or on the top or bottom of, the second reflector. The polarizer contains parallel stripes of material doped differently than that of the second reflector. The polarizer polarizes the light generated from the active region.

Claims

1. A method for fabricating a vertical-cavity surface-emitting laser (VCSEL), the method comprising the steps of:

providing a substrate;

disposing a first reflector on the substrate;

disposing an active region on the first reflector;

disposing a second reflector on the active region such that the active region is interposed between the first reflector and the second reflector; and

forming a polarizer inside the second reflector, wherein the polarizer comprises parallel stripes of material doped differently than that of the second reflector, wherein the polarizer polarizes light generated from the active region.

2. The method of claim 1, wherein the stripes are composed of the same material as the second reflector.

3. The method of claim 1, wherein the second reflector is a p-type doped material and the stripes are a p+-type doped material.

4. The method of claim 1, wherein the second reflector is an n-type doped material and the stripes are an n+-type doped material.

5. The method of claim 1, wherein the second reflector is a p-type doped material and the stripes are an n-type doped material.

6. The method of claim 1, wherein the second reflector is an n-type doped material and the stripes are a p-type doped material.

7. The method of claim 1, wherein the polarizer imposes relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.

8. The method of claim 1, wherein the polarizer is monolithically formed in the bottom layers of the second reflector.

9. The method of claim 1, wherein the reflectors are distributed Bragg reflector (DBR) mirrors.

10. The method of claim 9, wherein the reflectors are semiconductor DBRs.

11. The method of claim 9, wherein the second reflector is neutrally doped and the stripes are doped with one of an n-type and a p-type material.

12. The method of claim 1, wherein the stripes are about 200 Å

thick.

13. The method of claim 1, wherein the step of forming a polarizer comprises the steps of:

growing a first layer of a first doped material on the active region;

growing a second layer of a second doped material on the first layer;

growing a third layer of the first doped material on the second layer;

etching one or more grooves through the second and third layers into the first layer; and

covering the etched grooves with the first doped material so as to form parallel stripes with the second layer.

14. A VCSEL comprising:

a substrate;

a first reflector disposed on the substrate;

an active region disposed on the first reflector; and

a second reflector disposed on the active region such that the active region is interposed between the first reflector and the second reflector, wherein the second reflector comprises a polarizer for polarizing light generated from the active region, wherein the polarizer comprises parallel stripes of material doped differently than that of the second reflector.

15. The VCSEL of claim 14, wherein the stripes are composed of the same material as the second reflector.

16. The VCSEL of claim 14, wherein the second reflector is a p-type doped material and the stripes are a p+-type doped material.

17. The VCSEL of claim 14, wherein the second reflector is an n-type doped material and the stripes are an n+-type doped material.

18. The VCSEL of claim 14, wherein the second reflector is a p-type doped material and the stripes are an n-type doped material.

19. The VCSEL of claim 14, wherein the second reflector is an n-type doped material and the stripes are a p-type doped material.

20. The VCSEL of claim 14, wherein the polarizer imposes relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.

21. The VCSEL of claim 14, wherein the polarizer is monolithically formed in the bottom layers of the second reflector.

22. The VCSEL of claim 14, wherein the reflectors are distributed Bragg reflector (DBR) mirrors.

23. The VCSEL of claim 14, wherein the reflectors are semiconductor DBRS.

24. The VCSEL of claim 23, wherein the second reflector is neutrally doped and the stripes are doped with one of an n-type and a p-type material.

25. The VCSEL of claim 14, wherein the stripes are about 200 Å

thick.

26. A method fabricating a polarizer for polarizing light in a VCSEL having a substrate, a first reflector disposed on the substrate, an active region disposed on the first reflector, and a second reflector disposed on the active region such that the active region is interposed between the first reflector and the second reflector, the method comprising the steps of:

growing a first layer of a first doped material on the active region;

growing a second layer of a second doped material on the first layer;

growing a third layer of the first doped material on the second layer;

etching one or more grooves through the second and third layers into the first layer; and

covering the etched grooves with the first doped material so as to form parallel stripes with the second layer, whereby the polarizer imposes relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.

40. The method of claim 26, wherein the first doped material is a p-type doped material and the second doped material is an n-type doped material.

41. The method of claim 26, wherein the first doped material is an n-type doped material and the second doped material is a p-type doped material.

42. The method of claim 26, wherein the first doped material is a p-type doped material and the second doped material is a p+-type doped material.

43. The method of claim 26, wherein the first doped material is an n-type doped material and the second doped material is an n+-type doped material.

27. A method for fabricating a polarizer, the method comprising:

growing a first semiconductor layer of a first doped material;

growing a second semiconductor layer of a second doped material on the first semiconductor layer;

growing a third semiconductor layer of the first doped material on the second semiconductor layer;

etching one or more grooves through the second and third semiconductor layers into the first semiconductor layer; and

covering the etched grooves with the first doped material so as to form parallel stripes with the second semiconductor layer, wherein the polarizer imposes relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.

28. The method of claim 27, wherein the first doped material is a p-type doped material and the second doped material is an n-type doped material.

29. The method of claim 27, wherein the first doped material is an n-type doped material and the second doped material is a p-type doped material.

30. The method of claim 27, wherein the first doped material is a p-type doped material and the second doped material is a p+-type doped material.

31. The method of claim 27, wherein the first doped material is an n-type doped material and the second doped material is an n+-type doped material.

32. A polarizer comprising:

a semiconductor layer having parallel stripes of material doped differently than that of the semiconductor layer, wherein the stripes are composed of the same material as the semiconductor layer, wherein the polarizer imposes relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.

33. A method for polarizing light in a VCSEL having a substrate, a first reflector disposed on the substrate, an active region disposed on the first reflector, and a second reflector disposed on the active region such that the active region is interposed between the first reflector and the second reflector, the method comprising:

generating light in the active region of the VCSEL; and

subjecting the light to a polarizer fabricated inside the second reflector, wherein the polarizer comprises parallel stripes of material doped differently than that of the second reflector.

34. The method of claim 33, wherein the stripes are composed of the same material as the second reflector.

35. The method of claim 33, wherein the second reflector is a p-type doped material and the stripes are a p+-type doped material.

36. The method of claim 33, wherein the second reflector is an n-type doped material and the stripes are an n+-type doped material.

37. The method of claim 33, wherein the second reflector is a p-type doped material and the stripes are an n-type doped material.

38. The method of claim 33, wherein the second reflector is an n-type doped material and the stripes are a p-type doped material.

39. The method of claim 33, wherein the step of subjecting the light comprises the steps of imposing relatively more loss for light having an E field vector parallel to the stripes than for light not having an E field vector parallel to the stripes.