Acceleration sensor

• US 6,561,030 B2
• Filed: 05/31/2001
• Issued: 05/13/2003
• Est. Priority Date: 12/27/1993
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Matsumoto, Masahiro, Miki, Masayuki, Suzuki, Seikou
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US09/867,523
• Publication Number:
  US 20010023615A1
• Time in Patent Office: 712 Days
• Field of Search: 734/93, 734/97, 735/140.1, 735/142.1, 735/142.3, 735/143.2, 735/143.6, 280/735, 361/280, 361/283.1, 361/283.3
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.

Claims

1. An air bag system including:

an air bag;

a substrate;

an enclosure;

an acceleration detection element;

an electronic circuit electrically connected with said acceleration detection element and with a conductor pattern provided on the substrate through a conductor provided on a surface of said enclosure, said electronic circuit outputting an electric signal according to acceleration detected by said acceleration detection element;

a drive circuit connected with said electronic circuit, said drive circuit opening said air bag on the basis of the electric signal;

wherein said enclosure is fixed to said substrate and said acceleration detection element and said electronic circuit are installed in said enclosure so that the acceleration detection direction of said detection element is substantially parallel to said substrate.

2. An air bag system according to claim 1, wherein said acceleration detection element and said electronic circuit are hermetically sealed in said enclosure.

3. An air bag system according to claim 1, wherein said acceleration detection element has a weight and a beam supporting said weight formed on a silicon plate.