Microwave discharge apparatus

• US 6,562,079 B1
• Filed: 01/04/2001
• Issued: 05/13/2003
• Est. Priority Date: 07/13/1998
• Status: Expired due to Fees

• Current Assignee: Toshiyuki Takamatsu
• Original Assignee: Toshiyuki Takamatsu
• Inventors: Takamatsu, Toshiyuki
• Primary Examiner(s): Berman, Jack
• Assistant Examiner(s): SMITH, JOHNNIE L
• Application Number:
  US09/743,070
• Time in Patent Office: 859 Days
• Field of Search: 118/723, 118/723.E, 118/725, 156/643, 250/250, 427/39, 427/47
• US Class Current: 118/723.0MR
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/4622 using waveguides

Abstract

A discharge tube (31) provided inside the cavity of a waveguide (4) is so structured as to monotonously decrease the cross section of the cavity in the direction in which the microwave travels and thereby to close the cavity. The waveguide (34) has vent holes (34a, 34c) made through the tube wall. A metallic member (32) monotonously decreasing the cross section of the cavity in the direction in which the microwave travels and thereby closing the cavity is provided on the opposite side to the discharge tube (31) in the direction in which the microwave travels. A fluid is made to flow through the metallic member. A gas introducing port is provided in the discharge tube (31), and a gas exhaust port is provided also in the discharge tube (31) on the opposite side to the gas introducing port with respect to the center axis of the waveguide (34). Thus, no standing wave is generated from the time when a plasma is created, the plasma absorbs energy at high efficiency, the temperature at the wall of the discharge area little increases, and the density of active particles is high.

Claims

1. A microwave electric-discharge apparatus, comprising a waveguide and a dielectric discharge tube provided in a cavity of the wave guide or an extension part of the waveguide, characterized in that the dielectric discharge tube is so formed that the cavity closes to the end with the cross section of the cavity monotonously decreasing along the direction in which a microwave travels in the waveguide, and that a gas port is formed through a waveguide wall.

2. A microwave electric-discharge apparatus according to claim 1, wherein the discharge tube has a gas introducing port on the opposite side to a gas exhaust port with respect to the central axis of the waveguide or an extension part of the waveguide between the ports.

3. A microwave electric-discharge apparatus according to claim 1, wherein the microwave plasma-generating vacuum vessel for generating a plasma by application of a microwave with a wavelength of λ

to gas under low pressure is a dielectric tube provided in the waveguide or a metallic flame connected with the waveguide, and so formed that the shape of opening in the cross section perpendicular to the direction which the dielectric tube extends to is non-circle or polygonal, at least, within a section of the dielectric tube with a length of L, that M axis is not parallel to ZX plane, at least, within a part of any section with a length of λ

/4 in the section L, that Z axis forms an angle of θ

≠

(2n+1)/2π

(n is an integer) radian with M axis, at least, at a point in whole the section L, and that the projection of the section L on M axis (cosine of a segment L₀ drawn from an end to the other of the section L against M axis) is not less than λ

/4 in length, wherein Z axis is parallel to a tangent which is drawn on any point P in the section L along the direction which the dielectric tube extends to, X axis is parallel to one of continuous segments which traverse the cross section of the dielectric tube normal to Z axis at the point P (not traverse the tube wall) with the maximum length of d, Y axis is normal to X axis, and Maxis is along the direction which a microwave travels.

4. A microwave electric-discharge apparatus according to claim 3, wherein the metallic flame enclosing the dielectric discharge tube is a rectangular waveguide, the X axis is parallel to a wall containing the longer side of the cross section of the waveguide (a wall normal to the electric field direction of a microwave or an H wall) and normal to the shorter side of the cross section of the waveguide (a wall parallel to the electric field direction of a microwave or an E plane wall), and the length of the segment d is not less than a half of the longer side of the waveguide cross section (the width of the H plane wall).

5. A microwave electric-discharge apparatus according to claim 1, wherein the unreflective-termination-shaped metallic member is provided on the opposite side of the dielectric discharge tube to the direction of the microwave oscillator (the direction of the microwave source) for terminating a microwave without reflection with contacting, at least, a part of the dielectric tube directly or indirectly with an intermediate, or located close to a part of the dielectric tube and cooled.

6. A microwave electric-discharge apparatus according to claim 2, wherein the unreflective-termination-shaped metallic member is provided on the opposite side of the dielectric discharge tube to the direction of the microwave oscillator (the direction of the microwave source) for terminating a microwave without reflection with contacting, at least, a part of the dielectric tube directly or indirectly with an intermediate, or located close to a part of the dielectric tube and cooled.

7. A microwave electric-discharge apparatus according to claim 3, wherein the unreflective-termination-shaped metallic member is provided on the opposite side of the dielectric discharge tube to the direction of the microwave oscillator (the direction of the microwave source) for terminating a microwave without reflection with contacting, at least, a part of the dielectric tube directly or indirectly with an intermediate, or located close to a part of the dielectric tube and cooled.

8. A microwave electric-discharge apparatus according to claim 4, wherein the unreflective-termination-shaped metallic member is provided on the opposite side of the dielectric discharge tube to the direction of the microwave oscillator (the direction of the microwave source) for terminating a microwave without reflection with contacting, at least, a part of the dielectric tube directly or indirectly with an intermediate, or located close to a part of the dielectric tube and cooled.

9. A microwave electric-discharge apparatus, comprising a waveguide and a dielectric discharge tube provided in a cavity of the waveguide or an extension part of the waveguide, characterized in that a metallic member provided in the cavity is so formed that the cavity closes to the end with the cross section of the cavity monotonously decreasing along the direction in which a microwave travels in the waveguide, and that a part of the dielectric discharge tube on the opposite surface to the direction in which a microwave travels, contacts the metallic member directly or indirectly with an intermediate between them, or is so close to the metallic member to enable heat conduction.

10. A microwave electric-discharge apparatus according to claim 9, wherein the discharge tube has a gas introducing port on the opposite side to a gas exhaust port with respect to the central axis of the waveguide or an extension part of the waveguide between the ports.

11. A microwave electric-discharge apparatus according to claim 9, wherein the unreflective-termination-shaped metallic member is provided on the opposite side of the dielectric discharge tube to the direction of the microwave oscillator (the direction of the microwave source) for terminating a microwave without reflection with contacting, at least, a part of the dielectric tube directly or indirectly with an intermediate, or located close to a part of the dielectric tube and cooled.