Method of producing an optical element having a multiple-level step-like structure through lithography

• US 6,562,253 B1
• Filed: 07/28/2000
• Issued: 05/13/2003
• Est. Priority Date: 07/30/1999
• Status: Expired due to Fees

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Ogusu, Makoto
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): Winter, Gentle E.
• Application Number:
  US09/628,695
• Time in Patent Office: 1,019 Days
• Field of Search: 65/603, 216/12, 216/24, 216/26, 216/14, 216/22, 219/121, 350/162.2, 359/571, 359/565, 369/116, 430/5, 430/30, 430/32
• US Class Current: 216/24
• CPC Class Codes: B29D 11/00 Producing optical elements, e.g. lenses or prisms grinding or polishing of optical elements B24B; constructional form of optical elements G02B; optical parts of spectacles G02C7/00
• CPC Class Codes: B29D 11/00769 Producing diffraction gratings
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Abstract

A method of producing an optical element having a multiple-level step-like structure includes a first process for providing a first mask pattern at a position corresponding to a predetermined boundary among boundaries at steps of the multiple-level step-like structure of a substrate, the first mask pattern having a width narrower than that of a single step, a second process for providing a second mask pattern upon the substrate having the first mask pattern formed thereon, the second mask pattern having a width corresponding to a single step or plural steps of the multiple-level step-like structure and a third process for processing the substrate by use of the first and second mask patterns and thereafter for removing the second mask pattern while leaving the first mask pattern there. After repeating the second and third processes plural times of a predetermined number, the first mask pattern is removed.

Claims

1. A method of producing an optical element having a multiple-level step-like structure, said method comprising:

a first process for providing a first mask pattern at a position corresponding to a predetermined boundary among boundaries at steps of the multiple-level step-like structure of a substrate, the first mask pattern having a width narrower than that of a single step;

a second process for providing a second mask pattern upon the substrate having the first mask pattern formed thereon, the second mask pattern having a width corresponding to a single step or plural steps of the multiple-level step-like structure;

a third process for processing the substrate by use of the first and second mask patterns and thereafter for removing the second mask pattern while leaving the first mask pattern there; and

after repeating the second and third processes plural times of a predetermined number, removing the first mask pattern.

2. A method according to claim 1, wherein said third process comprises performing an isotropic etching process.

3. A method according to claim 2, wherein the substrate is made of one of fluorite and quartz.

4. A method according to claim 1, wherein the first mask pattern is formed so that the position of an edge thereof or a central position thereof coincides with the predetermined boundary.

5. A method according to claim 1, wherein the width of the first mask pattern is larger than an alignment precision of a lithographic apparatus to be used for the processing performed in said third process.

6. A method according to claim 1, wherein the first mask pattern is made of one of Cr, Al, Ti, Ni, W, CrO2, TiO2 and indium tin oxide.