Method and apparatus for forming deposition film, and method for treating substrate

• US 6,562,400 B2
• Filed: 04/30/2001
• Issued: 05/13/2003
• Est. Priority Date: 05/01/2000
• Status: Expired due to Fees

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Tsuzuki, Hidetoshi, Kanai, Masahiro, Takai, Yasuyoshi, Tamura, Hideo, Shimoda, Hiroshi
• Primary Examiner(s): VERSTEEG, STEVEN H
• Application Number:
  US09/844,071
• Publication Number:
  US 20010055647A1
• Time in Patent Office: 743 Days
• Field of Search: 432/8, 427/177, 427/444, 427/402, 204/192.12, 204/298.25, 204/298.24, 204/298.26, 204/298.35, 216/58, 216/83
• US Class Current: 427/177
• CPC Class Codes: C23C 14/562 for coating elongated substrates
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: H01L 31/20 such devices or parts thereof comprising amorphous semiconductor materials
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

A gas adsorptive member is disposed in a space communicating with film deposition chambers, and deposition films are deposited while continuously feeding gas components released from this member, thereby enabling the high quality and uniform deposition films to be formed on the substrate with good reproducibility.

Claims

1. A method for treating a substrate comprising the steps of:

(a) reeling off a rolled substrate in a first vacuum chamber;

(b) treating the substrate;

(c) reeling up the substrate on a roll in a second vacuum chamber, said second vacuum chamber also containing a rolled surface protection sheet; and

(d) simultaneously reeling up said rolled surface protection sheet and said substrate in said second vacuum chamber in axial alignment with each other, wherein a gas is released from the surface of said surface protection sheet during step (d) in amounts from 1.3×

10<sup>−

6</sup> to 1.3×

10<sup>−

1</sup> Pa·

l/s-cm².

2. A method of for treating a substrate comprising the steps of:

(a) reeling off a rolled substrate in a first vacuum chamber;

(b) treating the substrate;

(c) reeling up the substrate on a roll in a second vacuum chamber, said second vacuum chamber also containing a rolled surface protection sheet;

(d) simultaneously reeling up said rolled surface protection sheet and said substrate in said second vacuum chamber in axial alignment with each other, wherein a gas is released from the surface of said surface protection sheet during step (d); and

(e) allowing the gas to be absorbed on the surface protection sheet prior to placing the rolled surface protection sheet in the second vacuum chamber.

3. A method of for treating a substrate comprising the steps of:

(a) reeling off a rolled substrate in a first vacuum chamber;

(b) treating the substrate;

(c) reeling up the substrate on a roll in a second vacuum chamber, said second vacuum chamber also containing a rolled surface protection sheet;

(d) simultaneously reeling up said rolled surface protection sheet and said substrate in said second vacuum chamber in axial alignment with each other, wherein a gas is released from the surface of said surface protection sheet during step (d); and

(e) heat-treating the surface protection sheet prior to placing the rolled surface protection sheet in the second vacuum chamber.

4. A methof for treating a substrate comprising the steps of:

(a) reeling off a rolled substrate in a first vacuum chamber;

(b) treating the substrate;

(c) reeling up the substrate on a roll in a second vacuum chamber, said second vacuum chamber also containing a rolled surface protection sheet;

(d) simultaneously reeling up said rolled surface protection sheet and said substrate in said second vacuum chamber in axial alignment with each other, wherein a gas is released from the surface of said surface protection sheet during step (d); and

(e) heat-treating the surface protection sheet and allowing the gas to be absorbed on the surface protection sheet prior to placing the rolled surface protection sheet in the second vacuum chamber.