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Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing

  • US 6,562,518 B2
  • Filed: 03/27/2001
  • Issued: 05/13/2003
  • Est. Priority Date: 09/15/1999
  • Status: Expired due to Term
First Claim
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1. A cathode made by a process of:

  • depositing a film of LiCoO2 on a substrate;

    rapidly heating the film of LiCoO2 to a target temperature; and

    maintaining the film of LiCoO2 at the target temperature for a target annealing time of at most approximately 60 minutes, wherein a majority of grains in the film of LiCoO2 are oriented with their (101) and (104) planes parallel to the substrate.

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