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Structure and method for separation and transfer of semiconductor thin films onto dissimilar substrate materials

  • US 6,562,648 B1
  • Filed: 08/23/2000
  • Issued: 05/13/2003
  • Est. Priority Date: 08/23/2000
  • Status: Expired due to Term
First Claim
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1. A method for making a nitride laser diode structure comprising:

  • providing a semiconductor membrane having an optically transparent substrate attached on a first side of said semiconductor membrane;

    attaching a support substrate to a second side of said semiconductor membrane;

    removing said optically transparent substrate from said first side of said semiconductor membrane;

    placing an elastically-compliant support layer on said first side of said semiconductor membrane;

    releasing said semiconductor membrane from said support substrate; and

    placing said elastically-compliant support layer on a substrate having a high thermal conductivity.

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