Optical devices

• US 6,563,141 B1
• Filed: 11/29/2000
• Issued: 05/13/2003
• Est. Priority Date: 04/14/1998
• Status: Expired due to Term

• Current Assignee: Hanger Solutions, LLC (IP Investments Group LLC)
• Original Assignee: BTG International Limited (Boston Scientific Corporation)
• Inventors: Dawson, Martin David, Martin, Robert William
• Primary Examiner(s): Meier, Stephen D.
• Application Number:
  US09/673,177
• Time in Patent Office: 895 Days
• Field of Search: 257/98, 257/103
• US Class Current: 257/98
• CPC Class Codes: H01L 33/08 with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body H01L27/15 takes precedence
• CPC Class Codes: H01L 33/465 with a resonant cavity structure
• CPC Class Codes: H01S 5/041 Optical pumping
• CPC Class Codes: H01S 5/18361 Structure of the reflectors, e.g. hybrid mirrors
• CPC Class Codes: H01S 5/18369 based on dielectric materials
• CPC Class Codes: H01S 5/32341 blue laser based on GaN or GaP
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

A solid-state, surface-emitting, optical device such as a light emitting diode (LED) or vertical cavity surface emitting laser (VCSEL) has a body of optical gain medium overlying a high reflectivity distributed BRAGG reflector (DBR) mirror which is carried on part of an underlayer. The gain layer is part of an epitaxial layered structure extending from the underlayer over the mirror.

Claims

1. A solid state, surface-emitting, optical device having an underlayer, a distributed Bragg reflector (DBR) mirror that is carried by the underlayer and a body of optical gain medium overlaying the DBR mirror,

wherein the mirror is a multi-layer dielectric having alternate layers of dielectric material with a high refractive index ratio between the adjacent layers and a reflectivity of the order of 97% or more, and

the body of gain medium is part of an epitaxial layered structure which includes a conductive preparation layer extending from the underlayer up the sides of the DBR mirror and laterally over the top of the DBR mirror where it is coalesced into a single layer.

2. A device as claimed in claim 1, wherein the high refractive index ratio is greater than 1.3.

3. A device as claimed in claim 1, wherein the underlayer (13) comprises a substrate (12) having a buffer layer which is a nitride of a group three element in the periodic table.

4. A device as claimed in claim 1, wherein the homo-epitaxial layered semi-conductor structure (15) is formed by combinations from the InAlGaN quaternary system.

5. A device as claimed in claim 4, wherein the homo-epitaxial layered semi-conductor structure (15) includes an Indium Gallium Nitride-based (InGaN) multi-quantum well structure.

6. A device as claimed in claim 1, wherein a further mirror (28) is disposed on the homo-epitaxial layered semi-conductor structure (15) in registration with the DBR mirror (14,50) so that the homo-epitaxial layered semi-conductor structure (15) functions as a solid state optical cavity.

7. A device as claimed in claim 1, wherein said conductive preparation layer is GaN.

8. A device as claimed in claim 1, wherein the DBR mirror is a column that has a substantially hexagonal cross section.

9. A device as claim in claim 1, wherein the dielectric layers of the DBR comprise MgF₂, CaF₂, Al₂O₃, ZnS, AlN, SiC, SiO₂, Si₃N₄, TiO₂ and ZrO₂ in any one of the following combinations:

SiO₂/SiC;

SiO₂/SiN, CaF₂/ZnS;

Al₂O₃/TiO₂;

SiO₂/AlN;

SiO₂/TiO₂ and SiO₂/ZrO₂.

10. A device as claimed in claim 1, wherein the DBR mirror has less than ten periods of alternating layers.

11. A solid state, surface-emitting, optical device having an underlayer, a distributed Bragg reflector mirror (DBR) that is carried by the underlayer and a body of optical gain medium overlying the DBR mirror, wherein:

the DBR mirror is a multi-layer dielectric having alternate layers of dielectric medium with a high refractive index ratio between the adjacent layers, the periodicity of the alternating layers being less than ten and

the body of gain medium is part of an epitaxial layered structure that includes a conductive preparation layer that is grown from the underlayer up the sides of the DBR mirror and laterally over the top of the DBR mirror where it is coalesced into a single layer.

12. A device as claimed in claim 11, wherein the DBR mirror is one of an array of free-standing mirrors formed by patterning the multi-layer dielectric.

13. A device as claimed in claim 11, wherein the DBR mirror has a reflectivity of the order of 97% or more.

14. A device as claimed in claim 11, wherein the high refractive index is greater than 1.3.

15. A device as claimed in claim 11, wherein the underlayer comprises a substrate having a buffer layer that is a nitride of a group three element in the periodic table.

16. A device as claimed in claim 11, wherein the conductive preparation layer is GaN.

17. A device as claimed in claim 11, wherein the epitaxial layered structure is formed by combinations from the InAlGaN quaternary system.

18. A device as claimed in claim 17, wherein the epitaxial layered structure includes an Indium Gallium Nitride-based (InGaN) multi-quantum well structure.

19. A device as claimed in claim 11, wherein the DBR mirror is a column that has a substantially hexagonal cross section.

20. A device as claimed in claim 11, wherein a further mirror is disposed on the epitaxial layered structure in registration with the DBR mirror so that the epitaxial layered structure functions as a solid state optical cavity.

21. A solid-state, surface-emitting, optical device having an underlayer, a distributed Bragg reflector mirror (DBR) that is carried by the underlayer, a body of optical gain medium overlying the DBR mirror and a pair of electrodes, wherein:

the DBR mirror is a multi-layer dielectric having alternate layers of dielectric medium with a high refractive index ratio between the adjacent layers,

the body of optical gain medium is part of an epitaxial layered structure that includes a conductive preparation layer that is grown from the underlayer up the sides of the DBR mirror and laterally over the top of the DBR mirror where it is coalesced into a single layer and

one of the electrodes is provided on the conductive preparation layer and extends at least partially over the DBR mirror.

22. A device as claimed in claim 21, wherein the DBR mirror is one of an array of free-standing mirrors formed by patterning the multi-layer dielectric.

23. A device as claimed in claim 21, wherein the DBR mirror has a reflectivity of the order of 97% or greater.

24. A device as claimed in claim 21, wherein the high refractive index is greater than 1.3.

25. A device as claimed in claim 21, wherein the underlayer comprises a substrate having a buffer layer that is a nitride of a group three element in the periodic table.

26. A device as claimed in claim 21, wherein the conductive preparation layer is GaN.

27. A device as claimed in claim 21, wherein the epitaxial layered structure is formed by combinations from the InAlGaN quaternary system.

28. A device as claimed in claim 21, wherein the epitaxial layered structure includes an Indium Gallium Nitride-based (InGaN) multi-quantum well structure.

29. A device as claimed in claim 21, wherein the DBR mirror is a column that has a substantially hexagonal cross section.

30. A device as claimed in claim 21, wherein the periodicity of the alternating layers of the DBR is less than ten.

31. A device as claimed in claim 21, wherein a further mirror is disposed on the epitaxial layered structure in registration with the DBR mirror so that the epitaxial layered structure functions as a solid state optical cavity.

32. A solid state, surface-emitting, optical device having an underlayer, a distributed Bragg reflector mirror (DBR) that is carried by the underlayer, and a body of optical gain medium overlying the DBR mirror, wherein:

the DBR mirror is a multi-layer dielectric having alternate layers of dielectric medium with a high refractive index ratio between the adjacent layers and has a substantially hexagonal cross section, and

the body of gain medium is part of an epitaxial layered structure that is grown from the underlayer up the sides of the DBR mirror and laterally over the top of the DBR mirror where it is coalesced into a single layer.

33. A device as claimed in claim 32, wherein a pair of electrodes is provided, one of the electrodes being on the conductive preparation layer and extending at least partially over the DBR mirror.

34. A device as claimed in claim 32, wherein the DBR mirror is one of an array of free-standing mirrors formed by patterning the multi-layer dielectric.

35. A device as claimed in claim 32, wherein the DBR mirror has a reflectivity of the order of 97% or greater.

36. A device as claimed in claim 32, wherein the high refractive index is greater than 1.3.

37. A device as claimed in claim 32, wherein the underlayer comprises a substrate having a buffer layer that is a nitride of a group three element in the periodic table.

38. A device as claimed in claim 32, wherein the conductive preparation layer is GaN.

39. A device as claimed in claim 32, wherein the epitaxial layered structure is formed by combinations from the InAlGaN quaternary system.

40. A device as claimed in claim 32, wherein the epitaxial layered structure includes an Indium Gallium Nitride-based (InGaN) multi-quantum well structure.

41. A device as claimed in claim 32, wherein the periodicity of the alternating layers of the DBR is less than ten.

42. A device as claimed in claim 32, wherein a further mirror is disposed on the epitaxial layered structure in registration with the DBR mirror so that the epitaxial layered structure functions as a solid state optical cavity.

43. A solid state, surface-emitting, optical device having an underlayer, a distributed Bragg reflector mirror (DBR) that is carried by the underlayer, and a body of optical gain medium overlying the DBR mirror,

the DBR mirror is a multi-layer dielectric having alternate layers of dielectric medium with a high refractive index ratio between the adjacent layers and

the body of gain medium is part of an epitaxial layered structure that is grown from the underlayer up the sides of the DBR mirror and laterally over the top of the DBR mirror where it is coalesced into a single layer,

wherein the dielectric layers of the DBR comprise MgF₂, CaF₂, Al₂O₃, ZnS, AlN, SiC, Si₃N₄ and ZrO₂.

44. A device as claimed in claim 43, wherein the alternate dielectric layers include any one of:

SiO₂/SiC;

SiO₂/SiN;

CaF₂/ZnS;

Al₂O₃/TiO₂;

SiO₂/AlN and SiO₂/ZrO₂.

45. A device as claimed in claim 43, wherein the DBR mirror is one of an array of free-standing mirrors formed by patterning the multi-layer dielectric.

46. A device as claimed in claim 43, wherein the DBR mirror has a reflectivity of the order of 97% or greater.

47. A device as claimed in claim 43, wherein the underlayer comprises a substrate having a buffer layer that is a nitride of a group three element in the periodic table.

48. A device as claimed in claim 43, wherein the conductive preparation layer is GaN.

49. A device as claimed in claim 43, wherein the epitaxial layered structure is formed by combinations from the InAlGaN quaternary system.

50. A device as claimed in claim 49, wherein the epitaxial layered structure includes an Indium Gallium Nitride-based (InGaN) multi-quantum well structure.

51. A device as claimed in claim 43, wherein the DBR mirror is a column that has a substantially hexagonal cross section.

52. A device as claimed in claim 43, wherein the periodicity of the alternating layers of the DBR is less than ten.

53. A device as claimed in claim 43, wherein a further mirror is disposed on the epitaxial layered structure in registration with the DBR mirror so that the epitaxial layered structure functions as a solid state optical cavity.