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Multipass cavity for illumination and excitation of moving objects

  • US 6,563,583 B2
  • Filed: 10/12/2001
  • Issued: 05/13/2003
  • Est. Priority Date: 10/12/2000
  • Status: Expired due to Term
First Claim
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1. A beam detection system for use with an illumination system, to enable detection of beam misalignment in four degrees of freedom, comprising:

  • (a) a beam splitter disposed in an illumination system light path, said illumination system light path originating in said illumination system, said beam splitter separating an illumination system light beam traveling along the illumination system light path into a first beam that is directed along a first light path and a second beam that is directed along a second light path;

    (b) a first position sensitive detector disposed in said first light path to receive said first beam, said first position sensitive detector determining an angular error associated with said illumination system light beam; and

    (c) a second position sensitive detector disposed in said second light path to receive said second beam;

    said second position sensitive detector determining at positional error associated with said illumination system light beam.

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