Projection moiré method and apparatus for dynamic measuring of thermal induced warpage
First Claim
1. A method for measuring thermally induced warpage, the method comprising the steps of:
- positioning a workpiece in a chamber;
projecting a plurality of fringe patterns on said workpiece;
regulating temperature in said chamber during simulation of a predefined temperature/time profile;
recording images of said fringe patterns-projected on said workpiece;
analyzing changes in said plurality of fringe patterns; and
maintaining position of a reference point associated with said workpiece at a fixed position in space during simulation of the predefined temperature/time profile.
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Accused Products
Abstract
The projection moiré and temperature controlled chamber system houses a workpiece in the chamber and subjects the workpiece to changing temperatures according to a predefined temperature/time profile. As the workpiece is subjected to changing temperatures, a projection moiré system projects a plurality of moiré fringe patterns onto the workpiece, and a camera detects thermally induced warpage in the workpiece. The detection of thermally induced warpage, indicated by changes in the projected fringe moiré patterns on the workpiece, is analyzed by a processing unit. The temperature controlled chamber includes a plurality of heating sources, at least one cooling source, temperature probes and an adjustable support frame. Output temperature of the heating/cooling sources may be variable. The position of the support frame is adjustable and controlled by the processor in a manner such that a reference point associated with the workpiece or the frame is held in a stationery manner. The chamber may also include a plurality of air blowers and exhaust vents to facilitate temperature control within the chamber. An alternative embodiment includes a supplemental shadow moiré system.
40 Citations
35 Claims
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1. A method for measuring thermally induced warpage, the method comprising the steps of:
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positioning a workpiece in a chamber;
projecting a plurality of fringe patterns on said workpiece;
regulating temperature in said chamber during simulation of a predefined temperature/time profile;
recording images of said fringe patterns-projected on said workpiece;
analyzing changes in said plurality of fringe patterns; and
maintaining position of a reference point associated with said workpiece at a fixed position in space during simulation of the predefined temperature/time profile. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
detecting motion of said reference point as temperature is regulated in said chamber; and
adjusting at least one support post holding said workpiece such that position of said reference point is maintained at a fixed position in space as thermally induced warpages are induced in said workpiece during simulation of the prefined temperature/time profile.
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14. A system for measuring thermally induced warpage, comprising:
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means for positioning a workpiece in a chamber;
means for projecting a plurality of fringe patterns on said workpiece;
means for regulating temperature in said chamber;
means for recording images of said fringe patterns projected on said workpiece;
means for analyzing changes in said plurality of fringe patterns; and
means for maintaining position of a reference point associated with said workpiece at a fixed position in space during simulation of a predefined temperature/time profile. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A system for measuring thermally induced warpage, comprising:
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a projection moiré
system, wherein said projection moiré
system projects a plurality of fringe patterns on a workpiece;
a chamber, wherein said workpiece is positioned;
at least one heating source wherein temperature in said chamber may be increased;
at least one cooling source wherein temperature in said chamber may be decreased, such that thermally induced warpages induced in said workpiece may be analyzed; and
a moveable frame wherein said workpiece is secured thereto such that position of a reference point associated with said workpiece is maintained at a fixed position in space as thermally induced warpages are induced in said workpiece during simulation of a predefined temperature/time profile. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
a position detector which detects the position of a reference point on said workpiece;
a plurality of adjustable support posts attached to said moveable frame; and
a position controller wherein said position controller detects movement of said reference point and transmits commands to said adjustable support posts, such that said reference point is maintained at a fixed position in space during simulation of the predefined temperature/time profile.
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34. The system of claim 26, further comprising:
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a position detector which detects the position of a reference point on said moveable frame;
a plurality of adjustable support posts attached to said moveable frame;
a position controller wherein said position controller detects movement of said reference point; and
an adjusting means connected to said adjustable support posts such that said adjusting means adjusts said adjustable support posts according to a plurality of commands received from said position controller, such that said reference point is maintained at a fixed position in space during simulation of the predefined temperature/time profile.
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35. A computer readable medium having a temperature control program, the program comprising logic configured to perform the steps of:
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regulating temperature in a chamber;
storing a plurality of images recorded by a camera of a plurality of fringe patterns projected onto a workpiece;
analyzing changes in said plurality of fringe patterns; and
determining motion of a reference point associated with said workpiece based upon information provided by at least one position detector; and
controlling at least one support post holding said workpiece such that position of said reference point is maintained at a fixed position in space as thermally induced warpages are induced in said workpiece during simulation of a predefined temperature/time profile.
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Specification