Method and apparatus for parsing event logs to determine tool operability

• US 6,564,171 B1
• Filed: 09/14/2000
• Issued: 05/13/2003
• Est. Priority Date: 09/14/2000
• Status: Expired due to Term

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Edwards, Richard, Peterson, Anastasia Oshelski
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): LE, JOHN H
• Application Number:
  US09/661,694
• Time in Patent Office: 971 Days
• Field of Search: 702/84, 702/177, 702/182, 702/185, 702/186, 702/119, 700/65, 700/110, 700/247, 395/75, 395/76, 395/680, 395/682, 370/463, 375/13, 705/1, 707/103.R
• US Class Current: 702/182
• CPC Class Codes: G05B 19/4065 Monitoring tool breakage, life or condition
• CPC Class Codes: G05B 2219/31452 Send a warning message that an event has to be monitored before the event occurs
• CPC Class Codes: G05B 2219/31483 Verify monitored data if valid or not by comparing with reference value
• CPC Class Codes: G05B 2219/50203 Tool, monitor condition tool
• CPC Class Codes: Y10S 707/99944 Object-oriented database structure

Abstract

A method for determining operability of a tool includes generating an event log including a plurality of events associated with the operation of the tool; parsing the event log to identify a crucial event; and initiating an automatic corrective action in response to identifying a crucial event. A manufacturing system includes a tool and a tool monitor. The tool is adapted to generate an event log including a plurality of events associated with the operation of the tool. The tool monitor is adapted to parse the event log to identify a crucial event and initiate an automatic corrective action in response to identifying a crucial event.

Claims

1. A method for determining operability of a tool, comprising:

defining a plurality of crucial events;

generating an event log including a plurality of events associated with the operation of the tool;

autonomously parsing the event log to identify one of the plurality of crucial events; and

initiating an automatic corrective action in response identifying the crucial event.

2. The method of claim 1, further comprising displaying the most frequently occurring events.

3. The method of claim 1, further comprising masking at least one of the events.

4. The method of claim 1, wherein parsing the event log includes identifying a single occurrence of the crucial event.

5. The method of claim 1, wherein parsing the event log includes identifying a predetermined number of occurrences of the crucial event within a predetermined time interval.

6. The method of claim 1, wherein parsing the event log includes identifying a pattern of occurrences of related events.

7. The method of claim 1, wherein parsing the event log in the method includes analyzing a pareto chart of the events.

8. The method of claim 1, wherein initiating the automatic corrective action includes sending an alert to a tool operator.

9. The method of claim 1, wherein initiating the automatic corrective action includes logging the tool out of service in response to identifying the crucial event.

10. The method of claim 9, wherein logging the tool out of service includes sending a message to a process control server.

11. A manufacturing system, comprising:

a tool adapted to generate an event log including a plurality of events associated with the operation of the tool; and

a tool monitor adapted to autonomously parse the event log to identify a crucial event from a plurality of defined crucial events and initiate an automatic corrective action in response to identifying the crucial event.

12. The manufacturing system of claim 11, wherein the tool monitor comprises a computer having a display and executing an application adapted to display the most frequently occurring events on the display.

13. The manufacturing system of claim 11, wherein the tool monitor is adapted to mask at least one of the events.

14. The manufacturing system of claim 11, wherein the tool monitor is adapted to identify a single occurrence of the crucial event.

15. The manufacturing system of claim 11, wherein the tool monitor is adapted to identify a predetermined number of occurrences of the crucial event within a predetermined time interval.

16. The manufacturing system of claim 11, wherein the tool monitor is adapted to identify a pattern of occurrences of related events.

17. The manufacturing system of claim 11, wherein the tool monitor is adapted to analyze a pareto chart of the events.

18. The manufacturing system of claim 11, wherein the automatic corrective action comprises an alert message to a tool operator.

19. The manufacturing system of claim 11, further comprising a process control server adapted to control operation of the manufacturing system, wherein the automatic corrective action comprises a message to the process control server to log the tool out of service.

20. A program storage device encoded with instructions, that when executed by a computer, perform a method for determining operability of a tool, the method comprising:

accessing an event log, the event log including a plurality of events associated with the operation of the tool;

autonomously parsing the event log to identify a crucial event from a plurality of defined crucial events; and

initiating an automatic corrective action in response to identifying the crucial event.

21. The program storage device of claim 20, wherein the method further comprises displaying the most frequently occurring events.

22. The program storage device of claim 20, wherein the method further comprises masking at least one of the events.

23. The program storage device of claim 20, wherein parsing the event log in the method includes identifying a single occurrence of the crucial event.

24. The program storage device of claim 20, wherein parsing the event log in the method includes identifying a predetermined number of occurrences of the crucial event within a predetermined time interval.

25. The program storage device of claim 20, wherein parsing the event log in the method includes identifying a pattern of occurrences of related events.

26. The program storage device of claim 20, wherein parsing the event log in the method includes analyzing a pareto chart of the events.

27. The program storage device of claim 20, wherein initiating the automatic corrective action in the method includes sending an alert to a tool operator.

28. The program storage device of claim 20, wherein initiating the automatic corrective action in the method includes logging the tool out of service in response to identifying the crucial event.

29. The program storage device of claim 28, wherein logging the tool out of service in the method includes sending a message to a process control server.

30. A manufacturing system, comprising:

a tool;

means for defining a plurality of crucial events;

means for accessing an event log, the event log including a plurality of events associated with the operation of the tool;

means for parsing the event log to identify a crucial event; and

means for initiating an automatic corrective action in response to identifying the crucial event.

31. A method for determining operability of a tool, comprising:

defining a plurality of crucial events;

generating an event log including a plurality of events associated with the operation of the tool;

autonomously parsing the event log to identify one of the plurality of crucial events; and

automatically inhibiting subsequent operation of the tool in response to identifying the crucial event.

32. A manufacturing system, comprising:

a tool adapted to generate an event log including a plurality of events associated with the operation of the tool; and

a tool monitor adapted to autonomously parse the event log to identify a crucial event from a plurality of defined crucial events and automatically inhibit subsequent operation of the tool in response to identifying the crucial event.

33. A program storage device encoded with instructions, that when executed by a computer, perform a method for determining operability of a tool, the method comprising:

accessing an event log, the event log including a plurality of events associated with the operation of the tool;

autonomously parsing the event log to identify a crucial event from a plurality of defined crucial events; and

automatically inhibiting subsequent operation of the tool in response to identifying the crucial event.