Methods of implementing a single shaft, dual cradle vacuum slot valve

• US 6,564,818 B2
• Filed: 01/28/2002
• Issued: 05/20/2003
• Est. Priority Date: 03/30/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Tomasch, Gregory A., Kroeker, Tony R.
• Primary Examiner(s): Scherbel, David A.
• Assistant Examiner(s): KEASEL, ERIC S
• Application Number:
  US10/059,923
• Publication Number:
  US 20020070371A1
• Time in Patent Office: 477 Days
• Field of Search: 251/158, 251/167, 251/193, 251/195, 251/211, 251/215, 251/296, 251/302, 251/327, 414/217, 414/221, 137/613, 137/614.11, 137/614.13, 137/15.23, 137/315.16, 137/315.29, 137/315.3
• US Class Current: 137/15.23
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: Y10T 137/0514 Gate valve

Abstract

A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single shaft. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The single shaft allows access to an open valve for servicing the open valve by way of stops that limit drive travel and hold the valve in an open, but not vertically-spaced, position relative to a respective slot. The open valve is easily reached by a gloved hand of a service worker. The single shaft is mounted on a first cradle, and the first cradle is mounted on a second cradle. Two separate shaft drives move the two cradles to position the single shaft to locate the valves between the slots to open one slot and close the other slot. Another separate shaft drive moves the single shaft vertically down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.

Claims

1. A method for assembling and operating a dual-sided slot valve in a semiconductor process cluster tool architecture, the method comprising the operations of:

interfacing a housing of the dual-sided slot valve between a first module and a second module;

providing the dual-sided slot valve with a first slot and a second slot for permitting transport of a substrate between the first module and the second module;

providing a first door and a second door within the housing for enabling closure of the respective first and second slots;

mounting the first door and the second door, wherein the mounting operation consists of mounting the first door and the second door to one common shaft;

mounting the one common shaft to a dual-cradle assembly comprising first and second pivotally interconnected cradles and a separate drive for each of the cradles; and

applying a slot closure force to the one common shaft to move the one common shaft toward one of the first and second slots to cause the door corresponding to the one slot to close the one slot and to allow the door corresponding to the other slot to keep the other slot open, the applying of the slot closure force being by actuating each of the separate drives to rotate the first cradle relative to the second cradle and to rotate the second cradle relative to the housing, the rotations of the pivotally interconnected first and second cradles moving the one common shaft toward the one of the first and second slots.

2. A method according to claim 1, wherein:

the actuating of each of the separate drives extends one of the drives and retracts another one of the drives.

3. A method according to claim 1, wherein:

the operation of mounting the one common shaft comprises the operations of mounting the first cradle for rotation on the second cradle, and mounting the second cradle for rotation on the housing;

the operation of mounting the one common shaft further consists of the operation of mounting the one common shaft on the first cradle; and

the applying operation further comprises the operation of moving the one common shaft relative to the first cradle to carry the doors away from the slots to permit the transport of the substrate between the first module and the second module.