High flow conductance and high thermal conductance showerhead system and method
First Claim
1. A showerhead plate of a showerhead like precursor delivery apparatus, comprising:
- a plurality of delivery apertures placed in specified geometric pattern about the showerhead plate, where each delivery aperture is comprised of a large diameter bore to provide improved flow conduction across the showerhead plate and a smaller diameter bore that communicates with the large diameter bore to provide proper mixing of the precursor and a consistent pressure level across the entire showerhead plate to provide a uniform delivery of precursor to each delivery aperture; and
a heater means that maintains the showerhead plate at a specified constant temperature, where the heater means supply sufficient thermal energy to the showerhead plate to maintain the specified temperature and compensate for the dissipation of heat caused by the precursor as it moves through the plate, wherein the heater means is embedded in the showerhead plate.
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Accused Products
Abstract
A vapor supply apparatus, for use in a semiconductor device manufacturing process, provides high flow conductance and high thermal conductance showerhead plate for supplying various precursors to a reaction chamber. The high flow conductance and high thermal conductance showerhead plate comprises a thick plate for high thermal conductance and variable size delivery hole for high flow conductance. A variation of the high flow conductance and high thermal conductance showerhead plate having the delivery holes tilted outward can be used as a baffle to diffuse the precursor to a large area. A showerhead system using high flow conductance and high thermal conductance showerhead plates is well suitable for delivering liquid precursors.
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Citations
11 Claims
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1. A showerhead plate of a showerhead like precursor delivery apparatus, comprising:
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a plurality of delivery apertures placed in specified geometric pattern about the showerhead plate, where each delivery aperture is comprised of a large diameter bore to provide improved flow conduction across the showerhead plate and a smaller diameter bore that communicates with the large diameter bore to provide proper mixing of the precursor and a consistent pressure level across the entire showerhead plate to provide a uniform delivery of precursor to each delivery aperture; and
a heater means that maintains the showerhead plate at a specified constant temperature, where the heater means supply sufficient thermal energy to the showerhead plate to maintain the specified temperature and compensate for the dissipation of heat caused by the precursor as it moves through the plate, wherein the heater means is embedded in the showerhead plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A showerhead system with improved flow conduction and thermal conductance for a precursor delivery apparatus comprising:
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a plurality of precursor inlet ports;
a first showerhead plate having improved flow conduction and thermal conductance;
a baffle plate below the precursor inlet ports to diffuse the precursor dispensed from the inlet; and
a second showerhead plate with improved flow conduction and thermal conductance at the precursor inlet ports to diffuse the precursor dispensed from the inlet. - View Dependent Claims (11)
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Specification