Integrated circuit packages assembled utilizing fluidic self-assembly

• US 6,566,744 B2
• Filed: 06/21/2002
• Issued: 05/20/2003
• Est. Priority Date: 04/02/2001
• Status: Expired due to Term

• Current Assignee: RUIZHANG TECHNOLOGY LIMITED COMPANY
• Original Assignee: Alien Technology Corporation
• Inventors: Gengel, Glenn Wilhelm
• Primary Examiner(s): Talbott, David L.
• Assistant Examiner(s): Zarneke, David A.
• Application Number:
  US10/177,045
• Publication Number:
  US 20020153606A1
• Time in Patent Office: 333 Days
• Field of Search: 257/678, 257/730, 257/690, 257/700, 257/737, 257/779, 257/734
• US Class Current: 257/678
• CPC Class Codes: H01L 2224/04105 Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
• CPC Class Codes: H01L 2224/20 Structure, shape, material or disposition of high density interconnect preforms
• CPC Class Codes: H01L 2224/95085 being a liquid, e.g. for fluidic self-assembly
• CPC Class Codes: H01L 2224/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 23/13 characterised by the shape
• CPC Class Codes: H01L 23/36 Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks H01L23/28, H01L23/40, H01L23/42, H01L23/44, H01L23/46 take precedence; heating H01L23/345
• CPC Class Codes: H01L 23/4334 Auxiliary members in encapsulations H01L23/49568 takes precedence
• CPC Class Codes: H01L 23/49816 Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
• CPC Class Codes: H01L 23/5389 the chips being integrally enclosed by the interconnect and support structures
• CPC Class Codes: H01L 24/19 Manufacturing methods of high density interconnect preforms
• CPC Class Codes: H01L 24/95 at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
• CPC Class Codes: H01L 24/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 29/0657 characterised by the shape of the body
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01004 Beryllium [Be]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01024 Chromium [Cr]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01042 : Molybdenum [Mo]
• CPC Class Codes: H01L 2924/01047 : Silver [Ag]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/09701 : Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/10158 : at the passive surface
• CPC Class Codes: H01L 2924/12042 : LASER
• CPC Class Codes: H01L 2924/14 : Integrated circuits
• CPC Class Codes: H01L 2924/15153 : the die mounting substrate comprising a recess for hosting the device
• CPC Class Codes: H01L 2924/15155 : the shape of the recess being other than a cuboid
• CPC Class Codes: H01L 2924/15173 : in a single layer of the multilayer substrate
• CPC Class Codes: H01L 2924/15311 : being a ball array, e.g. BGA
• CPC Class Codes: Y10T 29/49128 : Assembling formed circuit to base
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49133 : with component orienting

Abstract

Assembly of integrated circuit packages, such as BGA packaged devices, using fluidic self-assembly. Functional components, such as integrated circuits, having a wired side are suspended in a fluid and flowed over a substrate. The substrate has a top first dielectric layer and recessed receptor regions for receiving the functional components. The functional components are deposited in the receptor regions using fluidic self-assembly such that the wired side is facing outward from the receptor region. A conductive layer is then formed on the first dielectric layer to form conductive interconnects to the functional components. A second dielectric layer is then formed on the conductive layer. The second dielectric layer has openings for receiving conductive elements. Conductive elements, such as solder balls, are deposited into the openings in the second dielectric layer and contact the conductive layer.

Claims

1. An integrated circuit package comprising:

a substrate, said substrate having a top first dielectric layer, said substrate having at least one recessed receptor region for receiving an integrated circuit;

at least one integrated circuit deposited in said receptor region, said integrated circuit having a wired side, said integrated circuit being deposited into said receptor region by fluidic self-assembly such that said wired side is facing outward from said receptor region;

a conductive layer on said first dielectric layer, said conductive layer forming conductive interconnects to said integrated circuit;

a second dielectric layer on said conductive layer, said second dielectric layer having openings for receiving conductive elements;

conductive elements, said conductive elements being deposited in said openings so that said conductive elements are in contact with said conductive layer, said conductive elements being attached in said openings.

2. The integrated circuit package of claim 1 wherein said conductive interconnects are electroplated.

3. The integrated circuit package of claim 1 wherein said substrate further comprises a thermally conductive layer.

4. The integrated circuit package of claim 3 wherein said receptor region is recessed through said first dielectric layer exposing said thermally conductive layer, and wherein said wired side of said integrated circuit is facing outward from said receptor region and the non-wired side of said integrated circuit is in contact with said thermally conductive layer.

5. The integrated circuit package of claim 1 wherein said functional components are keyed to be received by said receptor regions so that said wired side of said functional component is facing outward from said receptor region.

6. The integrated circuit package of claim 1 wherein said functional components are shaped nanoblocks.

7. The integrated circuit package of claim 1 wherein said integrated circuit is keyed to be received in said receptor region in at least one pre-determined orientation.

8. The integrated circuit package of claim 1 wherein said openings are outside the footprint of the integrated circuit.

9. The integrated circuit package of claim 1 wherein said conductive elements are solder balls.

10. The integrated circuit package of claim 9 wherein said conductive elements are attached by reflowing.

11. An integrated circuit package comprising:

a semiconductor substrate;

an integrated circuit formed on an upper surface of the semiconductor substrate to form an integrated circuit die having an upper surface and sides extending from a periphery of the upper surface, opposing ones of the sides extending downward and towards one another so that the sides are located below the upper surface;

a plurality of pads formed on the upper surface of the die and being electrically connected to the integrated circuit; and

a package substrate having upper and lower surfaces, an opening being formed in the upper surface, the opening having sides, opposing ones of the sides extending downward from a periphery of the opening, the substrate having a thickness below the opening and a portion of the thickness being metal, the die being located in the opening with the opposing sides thereof adjacent the opposing sides of the opening and the die being sufficiently close and thermally connected to the metal for heat to transfer from the die to the metal and from the metal away from the substrate.

12. The integrated circuit package of claim 11 wherein the metal forms the opposing sides of the opening in the package substrate extend downwardly and towards one another.

13. The integrated circuit package of claim 11 wherein the die contacts the metal.

14. The integrated circuit package of claim 11 wherein the die has a lower surface which is smaller than the upper surface and the sides thereof extend from the periphery of the upper surface to a periphery of the lower surface.

15. The integrated circuit package of claim 14 wherein the opening has a lower surface which is smaller than the upper surface and the sides thereof extend from the periphery of the upper surface to a periphery of the lower surface.

16. The integrated circuit package of claim 15 wherein the lower surface of the die contacts the lower surface of the opening.

17. The integrated circuit package of claim 16 wherein the metal forms the lower surface of the opening.

18. The integrated circuit package of claim 17 wherein the metal is continuous from the lower surface of the opening to the lower surface of the substrate.

19. The integrated circuit package of claim 11 wherein the metal is aluminum.

20. The integrated circuit package of claim 11 wherein the periphery of the opening has a shape which is complementary to a shape of the periphery of the upper surface of the die.

21. The integrated circuit package of claim 11 wherein the upper surface of the die is substantially flush with the upper surface of the substrate.

22. The integrated circuit package of claim 11 further comprising:

a plurality of contacts secured to the upper surface of the substrate; and

a plurality of interconnection lines, each interconnection line interconnecting a respective one of the bond pads with a respective one of the contacts.

23. The integrated circuit package of claim 22 wherein the contacts are located outside the periphery of the opening.

24. The integrated circuit package of claim 22 further comprising:

a dielectric layer formed over the upper surface of the substrate, the interconnection lines being formed on the dielectric layer.