Remote semiconductor microscopy

• US 6,567,770 B2
• Filed: 04/09/2002
• Issued: 05/20/2003
• Est. Priority Date: 04/23/1998
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Dorough, Michael J.
• Primary Examiner(s): Hoff, Marc S.
• Assistant Examiner(s): Tsai, Carol S W
• Application Number:
  US10/118,844
• Publication Number:
  US 20020111775A1
• Time in Patent Office: 406 Days
• Field of Search: 702/33-36, 702/40, 702/58, 702/59, 702/81, 702/82-84, 702/117-119, 702/121-124, 702/126, 702/170, 702/172, 702/183, 702/184, 702/185, 702/188, 702/189, 702/198, 702/FOR-103, 702/FOR-123, 702/FOR.131, 702/FOR-134, 702/FOR.137, 702/FOR.148, 702/FOR-170, 250/306, 250/310, 250/397, 700/121, 348/87, 382/145
• US Class Current: 702/188
• CPC Class Codes: G02B 21/365 Control or image processing arrangements for digital or video microscopes G02B21/361, G02B21/362 take precedence
• CPC Class Codes: G16H 10/40 for data related to laboratory analysis, e.g. patient specimen analysis
• CPC Class Codes: G16H 80/00 ICT specially adapted for facilitating communication between medical practitioners or patients, e.g. for collaborative diagnosis, therapy or health monitoring
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H04N 7/181 for receiving images from a plurality of remote sources
• CPC Class Codes: Y10S 977/854 Semiconductor sample

Abstract

A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from the microscope over a network to remote personal computers located in the offices of process engineers. The office-based process engineers are provided real-time, or substantially real-time, views of a wafer, including peripheral views of the wafer outside cell array boundaries. The process engineer, in his office, can direct a technician, operating the microscope in the clean room complex, to display a desired cell region-of-interest with the microscope. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques.

Claims

1. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, and wherein the video capture system transmits the successive frame if a change is sensed

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video.

2. The semiconductor wafer microscopy system of claim 1, wherein the multiplexor is operable from the remote client computers.

3. The semiconductor wafer microscopy system of claim 2, wherein the multiplexor sequentially selects each of the video signals.

4. The semiconductor wafer microscopy system of claim 1, wherein the server streams the digitized video signal to the client.

5. The semiconductor wafer microscopy system of claim 1, wherein the microscope is a scanning electron microscope.

6. The semiconductor wafer microscopy system of claim 1, wherein the microscope is a scanning tunneling microscope.

7. The semiconductor wafer microscopy system of claim 1, wherein the video capture system further includes an encoder-decoder (CODEC) to compress the digitized video signals.

8. A computerized method for inspecting semiconductor wafers comprising:

generating a video signal of a view of the semiconductor wafer for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals; and

communicating the selected digitized video signal to one or more remote client computers, wherein communicating the selected includes communicating a first frame if there is no change in a successive frame.

9. The method of claim 8, wherein selectively coupling the video signals includes remotely manipulating the video capture system.

10. The method of claim 8 wherein communicating the selected digitized video signal includes streaming the video signal.

11. The method of claim 8 wherein communicating the selected digitized video signal includes communicating the digitized video signal over a wide area network.

12. The method of claim 8 wherein communicating the digitized video signal includes communicating the digitized video signal over the Internet.

13. The method of claim 8 wherein communicating the digitized video signal includes communicating the digitized video using a transport control protocol-Internet protocol.

14. A computerized method for inspecting semiconductor wafers comprising:

generating a video signal of a view of the semiconductor wafer for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals; and

communicating the selected digitized video signal to one or more remote client computers, wherein communicating the digitized video signal includes;

processing the digitized video signal;

comparing a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame; and

retransmitting the first frame instead of the successive frame as a function of the comparison.

15. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, and wherein the video capture system transmits the first frame if no change is sensed;

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video.

16. The semiconductor wafer microscopy system of claim 15, wherein the video capture system transmits the successive frame if a change is sensed.

17. A computerized method for inspecting semiconductor wafers comprising:

generating a video signal of a view of the semiconductor wafer for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals; and

communicating the selected digitized video signal to one or more remote client computers, wherein communicating the selected includes communicating a successive frame if there is a change from a prior frame.

18. The method of claim 17, wherein selectively coupling the video signals includes remotely manipulating the video capture system.

19. The method of claim 18, wherein remotely manipulating includes electronically manipulating a multiplexor in the video capture system.

20. The method of claim 18, wherein remotely manipulating includes electronically manipulating from a remote client computer.

21. The method of claim 18, wherein communicating the selected digitized video signal includes streaming the video signal.

22. The method of claim 17, wherein communicating the selected digitized video signal includes communicating the digitized video signal over a wide area network.

23. The method of claim 17, wherein communicating the digitized video signal includes communicating the digitized video signal over the Internet.

24. The method of claim 17, wherein communicating the digitized video signal includes communicating the digitized video using a transport control protocol-Internet protocol.

25. A computerized method for inspecting semiconductor wafers comprising:

generating a video signal of a view of the semiconductor wafer for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals;

comparing a successive video frame to a prior video frame; and

communicating the selected digitized video signal to one or more remote client computers, wherein communicating the selected includes;

communicating the successive frame if there is a change from the prior frame, and

communicating the prior frame if there is no change in the successive frame.

26. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, and wherein the video capture system transmits the successive frame if a change is sensed;

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video; and

a remote manipulator adapted to select the digitized video signals communicated to one or more remote client computers.

27. The semiconductor wafer microscopy system of claim 26, wherein the remote manipulator is adapted to originate an electronic signal from one or more of the remote client computers.

28. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, and wherein the video capture system transmits the first frame if no change is sensed

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video; and

a remote manipulator adapted to select the digitized video signals communicated to one or more remote client computers.

29. The semiconductor wafer microscopy system of claim 28, wherein the video capture system transmits the successive frame if a change is sensed.

30. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system connected to the plurality of microscopes, the video capture system being adapted to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, wherein the video capture system transmits the successive frame if a change is sensed, and wherein the video capture system transmits the first frame if no change is sensed;

one or more remote client computers;

a server coupled to the video capture system to communicate the digitized video signals to the one or more remote client computers for displaying the digitized video, wherein the server is adapted to provide substantially real-time display of video signals on the one or more at least one remote client computers.

31. A remote semiconductor microscopy system, comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductors;

a video capture system connected to the plurality of microscopes, the video capture system being adapted to digitize the video signals into frames;

means for comparing a first video frame to a successive video frame;

means for transmitting one of the successive frame and the first frame based on a comparison; and

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video.

32. The remote semiconductor microscopy system of claim 31, wherein the server is adapted to provide substantially real-time display of video signals on the one or more at least one remote client computers.

33. The remote semiconductor microscopy system of claim 31, wherein the server is adapted to receive an electronic signal from a remote client computer to control the video capture system.

34. A semiconductor microscopy system, comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductors;

a video capture system to digitize the video signals, wherein the video capture system includes a histogram processor adapted to sense a scene change from a first video frame to a successive video frame, wherein the video capture system transmits the successive video frame if the scene change is sensed, and wherein the video capture system transmits the first video frame if the scene change is not sensed;

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video.

35. The semiconductor microscopy system of claim 34, wherein the video capture system is adapted to use statistical data to sense a scene change.

36. The semiconductor microscopy system of claim 34, wherein the video capture system is adapted to not encode and transmit a successive video frame if no scene change is sensed.

37. A semiconductor microscopy system, comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductors;

a video capture system to digitize the video signals, wherein the video capture system includes means for expending resources with a scene change from a first video frame to a successive video frame;

a multiplexor to selectively couple the video signals from the microscopes to the video capture system;

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video.

38. The semiconductor microscopy system of claim 37, wherein the means for expending resources includes an encoder and a digitized video signal transmitter.

39. A computerized method for inspecting semiconductors comprising:

generating a video signal of a view of the semiconductor for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals;

sensing a change from a first frame to a successive frame;

transmitting the successive frame to one or more remote client computers if a change is sensed; and

transmitting the first frame to one or more remote client computers if no change is sensed.

40. The method of claim 39, wherein sensing the change includes comparing statistical data between the first frame and the second frame.

41. A computerized method for inspecting semiconductors comprising:

generating a video signal of a view of the semiconductor for each of a plurality of microscopes;

selectively coupling the video signals to a video capture system for digitizing one of the video signals;

transmitting a first video frame to one or more remote client computers;

sensing a change from the first video frame to a successive video frame;

transmitting the successive video frame to one or more remote client computers if a change is sensed; and

retransmitting the first video frame to one or more remote client computers if no change is sensed.

42. A semiconductor wafer microscopy system comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system connected to the plurality of microscopes, the video capture system being adapted to digitize the video signals and including a memory adapted to store a first frame of the video signal, wherein the video capture system senses a change from the first frame to a successive frame, wherein the video capture system transmits the successive frame if a change is sensed, and wherein the video capture system transmits the first frame if no change is sensed;

a server system coupled to the video capture system and including a server and one or more remote client computers, the server being adapted to communicate the digitized video signals to the one or more remote client computers for displaying the digitized video.

43. The semiconductor wafer microscopy system of claim 42, wherein the server system is adapted to provide substantially real-time display of video signals on the one or more at least one remote client computers.

44. A semiconductor microscopy system, comprising:

a plurality of microscopes generating video signals of microscopic views of one or more semiconductor wafers;

a video capture system connected to the plurality of microscopes and adapted to digitize the video signals, wherein the video capture system senses a change from a first frame to a successive frame, wherein the video capture system transmits the successive frame if a change is sensed, and wherein the video capture system transmits the first frame if a change is not sensed;

a multiplexor to selectively couple the video signals from the microscopes to the video capture system; and

a server coupled to the video capture system to communicate the digitized video signals to one or more remote client computers for displaying the digitized video, the server including;

a producer software module to retrieve the digitized video signal generated by the video capture system, wherein producer software module stores the digitized video signal within a software frame buffer;

a consumer software module to retrieve the digitized video signal from the software frame buffer and to process the digitized video signal for communication to one or more remote computing systems; and

a software synchronization mechanism to synchronize access to the frame buffer by the producer software module and consumer software modules.

45. The semiconductor microscopy system of claim 44, wherein the software system is implemented with object-oriented software.

46. The semiconductor microscopy system of claim 44, wherein the consumer software module compresses the digitized video signals.

47. The semiconductor microscopy system of claim 44, wherein the consumer software module compares a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame.