Sensing device and sensor apparatus
First Claim
1. A sensing device comprising:
- a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and connected to the electrode pairs to allow a passage of electric signals, wherein a conductive characteristic, of the same kind of the conductors, are all similar.
1 Assignment
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Accused Products
Abstract
A sensing device, such as an angular speed detecting device, includes a vibrator for improving detection precision. The vibrator is displaceably supported on a substrate and is vibrated in the direction of an X-axis by driving electrodes. Detecting electrodes detect vibrations of the vibrator in the direction of a Y-axis caused by a Coriolis'"'"' force resulting from the angular speed occurring about a Z-axis. Each of the driving and detecting electrodes includes a movable electrode that is connected to the vibrator and that is displaced together therewith on the substrate and a fixed electrode fixed onto the substrate in such a manner as to face the movable electrode. By equalizing conductors connected to fixed electrodes of the driving electrodes and conductors connected to fixed electrodes of the detecting electrodes in length, width, and thickness, respectively, one electrical characteristic is set for those of the wiring portions which function in the same manner.
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Citations
27 Claims
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1. A sensing device comprising:
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a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and connected to the electrode pairs to allow a passage of electric signals, wherein a conductive characteristic, of the same kind of the conductors, are all similar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
a plurality of beams provided between the substrate and the vibrator to displace the vibrator, wherein;
a distance between at least one beam and an adjacent member, about any side of the beam, extends equidistant and parallel to the beam.
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4. The sensing device according to claim 3, wherein the adjacent member is an adjacent beam.
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5. The sensing device according to claim 3, wherein the distance is at least 30 micrometer(μ
- m).
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6. The sensing device according to claim 1, wherein:
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the vibrator is connected to a plurality of beams connected to the substrate;
each of the fixed electrodes is fixed to the substrate and has a plurality of electrode fingers that extend parallel to one another;
each of the movable electrodes has a plurality of electrode fingers that extend parallel to one another and that are interleaved among the electrode fingers of the fixed electrode;
the vibrator has a plurality of square through-holes disposed at equal intervals; and
a spatial relationship is defined by 1/Wm−
2/Da=0,wherein;
Wm is a distance between adjacent ones of the through-holes; and
Da is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a servo electrode for suppressing vibrations of the vibrator when one of the electrodes is the servo electrode.
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7. The sensing device according to claim 6, wherein 1/Wm−
- 2/Da=0.
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8. The sensing device according to claim 1, wherein:
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the vibrator is connected to a plurality of beams connected to the substrate;
each of the fixed electrodes is fixed to the substrate and has a plurality of electrode fingers that extend parallel to one another;
each of the movable electrodes has a plurality of electrode fingers that extend parallel to one another and that are interleaved among the electrode fingers of the fixed electrode;
the vibrator has a plurality of square through-holes disposed at equal intervals; and
a spatial relationship is defined by 1/Wm−
3/Wk+2/Ds=0,wherein;
Wm is a distance between adjacent ones of the through-holes;
Wk is a width of the beams; and
Ds is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a detecting electrode for detecting displacement of the vibrator when one of the electrodes is the detecting electrode.
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9. The sensing device according to claim 8, wherein 1/Wm−
- 3/Wk+2/Ds=0.
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10. The sensing device according to claim 1, wherein:
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the vibrator is connected to a plurality of beams connected to the substrate;
each of the fixed electrodes is fixed to the substrate and has a plurality of electrode fingers that extend parallel to one another;
each of the movable electrodes has a plurality of electrode fingers that extend parallel to one another and that are interleaved among the electrode fingers of the fixed electrode;
the vibrator has a plurality of square through-holes disposed at equal intervals; and
a spatial relationship is defined by 1/Wm+1/Wk−
2/Da−
1/Dc=0,wherein;
Wm is a distance between adjacent ones of the through-holes;
Wk is a width of the beams;
Da is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a servo electrode for suppressing vibrations of the vibrator when one of the electrodes is the servo electrode; and
Dc is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a drive monitor electrode that is driven to monitor the vibrator when another one of the electrodes is the drive monitor electrode.
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11. The sensing device according to claim 10, wherein 1/Wm+1/Wk−
- 2/Da−
1/Dc=0.
- 2/Da−
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12. The sensing device according to claim 1, wherein:
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the vibrator is connected to a plurality of beams connected to the substrate;
each of the fixed electrodes is fixed to the substrate and has a plurality of electrode fingers that extend parallel to one another;
each of the movable electrodes has a plurality of electrode fingers that extend parallel to one another and that are interleaved among the electrode fingers of the fixed electrode;
the vibrator has a plurality of square through-holes disposed at equal intervals; and
a spatial relationship is defined by 1/Wm−
1/Wk−
2/Ds−
1/Dc=0,wherein;
Wm is a distance between adjacent ones of the through-holes;
Wk is a width of the beams;
Ds is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a detecting electrode for detecting displacement of the vibrator when one of the electrodes is the detecting electrode; and
Dc is a distance in a width direction between the electrode fingers of the movable and fixed electrodes of a drive monitor electrode that is driven to monitor the vibrator when another one of the electrodes is the drive monitor electrode.
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13. The sensing device according to claim 12, wherein 1/Wm−
- 1/Wk−
2/Ds−
1/Dc=0.
- 1/Wk−
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14. A sensor apparatus comprising:
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a sensing device having a vibrator displaceably supported with respect to a surface of a substrate;
at least one electric component; and
a board that receives the sensing device and the at least one electric component, wherein the surface of the substrate is directed in a gravitational direction during operation of the sensor apparatus, and wherein the sensing device is the sensing device as claimed in claim 1.
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15. A sensing device comprising:
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a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and being electrically connected to the electrode pairs to allow a passage of electric signals, wherein;
at least some of the conductors connected to the fixed electrode are spaced from the substrate. - View Dependent Claims (16, 17, 18, 19, 20)
a plurality of beams provided between the substrate and the vibrator to displace the vibrator, wherein;
a distance between at least one beam and an adjacent member, about any side of the beam, extends equidistant and parallel to the beam.
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18. The sensing device according to claim 17, wherein the adjacent member is an adjacent beam.
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19. The sensing device according to claim 17, wherein the distance is at least 30 micrometer (μ
- m).
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20. A sensor apparatus comprising:
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a sensing device having a vibrator displaceably supported with respect to a surface of a substrate;
at least one electric component; and
a board that receives the sensing device and the at least one electric component, wherein the surface of the substrate is directed in a gravitational direction during operation of the sensor apparatus, and wherein the sensing device is the sensing device as claimed in claim 15.
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21. A sensing device comprising:
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a substrate;
a vibrator displaceably supported with respect to the substrate and spaced above the substrate; and
a plurality of beams that displaceably support the vibrator with respect to the substrate, wherein a distance between at least one beam and an adjacent member, about any side of the beam, extends equidistant and parallel to the beam. - View Dependent Claims (22, 23, 24)
a sensing device having a vibrator displaceably supported with respect to a surface of a substrate;
at least one electric component; and
a board that receives the sensing device and the at least one electric component, wherein the surface of the substrate is directed in a gravitational direction during operation of the sensor apparatus, and wherein the sensing device is the sensing device as claimed in claim 21.
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25. A sensor apparatus comprising:
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a sensing device having a vibrator displaceably supported with respect to a surface of a substrate;
at least one electric component; and
a board that receives the sensing device and at least the electric component, wherein the vibrator is mounted to the surface of the substrate and the surface of the substrate is directed in a gravitational direction when the sensor apparatus is operated. - View Dependent Claims (26, 27)
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Specification