Capacitive based pressure sensor design

• US 6,568,274 B1
• Filed: 08/11/2000
• Issued: 05/27/2003
• Est. Priority Date: 02/04/1998
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Denner, John, Grudzien, Chris P., Lischer, Jeff, Weight, Kristen, Lucas, Paul D.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): FERGUSON SAMRETH, MARISSA LIANA
• Application Number:
  US09/637,980
• Time in Patent Office: 1,019 Days
• Field of Search: 713/718, 737/24, 737/28, 738/61, 737/06, 731/52, 737/18, 361/283, 361/283.4, 340/196
• US Class Current: 73/718
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

A pressure transducer assembly includes a first body, a second body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. The electrode is disposed in the first chamber. A portion of the diaphragm flexes in a first direction in response to pressure in the first chamber being greater than pressure in the second chamber. A portion of the diaphragm flexes in a second direction, opposite the first direction, in response to pressure in the second chamber being greater than pressure in the first chamber. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers. In some embodiments, the electrode is suspended from a hub and spoke mounting. In some embodiments the electrode is entirely metallic. In other embodiments, the electrode includes a ceramic disk with a conductive film formed on the disk and the disk is coupled to the housing with a ceramic rod. In some embodiments, the transducer also has a low thermal coefficient of expansion member connected to the housing for reducing warping in response to temperature changes. In additional embodiments, the disk includes a groove that reduces the effects of temperature variations on a ceramic electrode.

Claims

1. A pressure transducer assembly, comprising:

(A) a housing member defining an interior cavity, said housing member having a first coefficient of thermal expansion;

(B) a diaphragm mounted in said housing member and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) an electrode disposed in said first chamber and joined to said housing member, said electrode including a conductor, said electrode having a second coefficient of thermal expansion, said second coefficient being different from said first coefficient; and

(D) a low thermal coefficient of expansion member rigidly connected to said housing member proximate where said electrode is joined to said housing member, said low thermal coefficient of expansion member having a third coefficient of thermal expansion, said third coefficient being lower than said first and second coefficients.

2. The assembly of claim 1, wherein said housing member has an opening, a portion of said electrode extending into said opening, said low thermal coefficient of expansion member including a plug in said opening.

3. The assembly of claim 1, said housing member having a portion that extends substantially parallel to said diaphragm, said portion including an opening, said electrode being joined to said housing member at said opening, said portion having a surface facing away from said diaphragm, said low thermal coefficient of expansion member being disposed on said surface facing away from said diaphragm.

4. The assembly of claim 3, wherein said low thermal coefficient of expansion member is formed as a strip.

5. The assembly of claim 1, wherein said housing member is made of metal and said low thermal coefficient of expansion member is made of ceramic.

6. The assembly of claim 1, wherein said housing member includes a hub-and-spoke assembly in the first chamber and the electrode is joined at the hub.

7. The assembly of claim 1, wherein said housing member has an annular portion and a portion that is substantially parallel to the diaphragm, the low thermal coefficient of expansion member being disposed on the portion of the housing member that is substantially parallel to the diaphragm.

8. The assembly of claim 1, further comprising a joining element to connect said electrode to said housing.

9. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) an electrode mounting defining an aperture in said first chamber;

(D) a first electrode having a first conductive plate and a first support that are both metallic;

(E) a second electrode having a second conductive plate and a second support that are both metallic; and

(F) a dielectric material at least partially disposed in said aperture, said dielectric material joining said first electrode and said second electrode to said electrode mounting and insulating said first electrode from said second electrode.

10. The assembly of claim 9, wherein a surface of said first conductive plate proximate to the diaphragm and a surface of said second conductive plate proximate to the diaphragm are coplanar.

11. The assembly of claim 10, wherein said the surfaces of said first and second conductive plates proximate to said diaphragm are coplanar with an intermediate surface of said body.

12. The assembly of claim 11, further comprising an annular spacer disposed between the intermediate surface of said body and the diaphragm.

13. The assembly of claim 10, wherein said first conductive plate is substantially circular and said second conductive plate is substantially annular and said second conductive plate substantially surrounds said first conductive plate.

14. The assembly of claim 13, wherein said first conductive plate and said second conductive plate are concentric.

15. The assembly of claim 14, wherein said second support has a tubular portion, said first support extending into said tubular portion.

16. The assembly of claim 15, said dielectric material having a first annular portion and a annular second portion, the first annular portion joining the first support to the second support and the second annular portion joining the second support to the housing member.

17. The assembly of claim 16, the second support having a tubular portion enclosing the first support, the first support and the tubular portion extending into the aperture, the dielectric material joining the first support and the tubular portion and the housing in said aperture.

18. The assembly of claim 10, wherein said first support is formed from the same material as said first conductive plate and said second support is formed from the same material as said second conductive plate.

19. The assembly of claim 10, wherein said first support, second support and said body have substantially the same thermal coefficient of expansion.

20. A pressure transducer assembly comprising:

(A) a housing member defining an interior cavity;

(B) a diaphragm mounted in said housing member and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) an electrode disposed in said first chamber, including a ceramic disk having a conductor disposed on a first surface facing said diaphragm and a ceramic post joined to the ceramic disk at a second surface opposite said first surface; and

(D) a groove formed on said second surface around the ceramic post.

21. The assembly of claim 20, wherein said housing member defines an aperture and said ceramic post is joined to said housing member with an elastic joint in said aperture.

22. The assembly of claim 21, wherein said aperture is a recess in a surface of said housing member parallel to said diaphragm.

23. The assembly of claim 20, wherein said ceramic post is formed as a monolithic ceramic piece with said ceramic disk.

24. The assembly of claim 20, wherein said groove is circular.

25. The assembly of claim 24, wherein said groove has an inner diameter approximately equal to a diameter of said ceramic post.

26. The assembly of claim 20, wherein said groove is approximately half as deep as said ceramic disk.

27. A pressure transducer assembly comprising:

(A) a body having an interior surface and defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a hub disposed in said first chamber;

(D) one or more spokes disposed in said first chamber, each of said spokes extending from a first end to a second end, said first end of each of said spokes contacting said interior surface, said second end of each of said spokes contacting said hub;

(E) a conductor disposed in said first chamber, said conductor being connected to said hub, a capacitance between said conductor and said diaphragm being representative of a difference between said pressures in said first and second chambers.

28. The assembly of claim 27, wherein said spokes define reentrant grooves.

29. The assembly of claim 27, wherein said case, said spokes, and said hub are of a monolithic construction.