Process for forming layers on substrates

• US 6,569,249 B1
• Filed: 04/18/2000
• Issued: 05/27/2003
• Est. Priority Date: 04/18/2000
• Status: Expired due to Fees

• Current Assignee: Clemson University
• Original Assignee: Clemson University
• Inventors: Singh, Rajendra, Poole, Kelvin F.
• Primary Examiner(s): Crispino, Richard
• Assistant Examiner(s): Tadesse, Yewebdar T.
• Application Number:
  US09/551,385
• Time in Patent Office: 1,134 Days
• Field of Search: 118/641, 118/642, 118/50.1, 118/621, 118/623, 118/300, 118/666, 118/667, 118/712, 427/508, 427/475, 204/157.15
• US Class Current: 118/666
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02521 Materials
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention is generally directed to various processes and systems for forming layers and coatings on substrates, such as semiconductor wafers and solar cells. In one embodiment, the process of the present invention is directed to forming a layer on a substrate from a liquid precursor. The liquid precursor is atomized and exposed to light energy. Besides light energy, the parent material may also be exposed to an electric field and/or to sonic energy. In an alternative embodiment of the present invention a stress measurement device monitors stress in the substrate as a layer is deposited on the substrate. This stress measurement information is then sent to a controller for automatically controlling the amount of energy, such as light energy being emitted onto the substrate.

Claims

1. An apparatus for heating and forming layers on semiconductor wafers comprising:

a thermal processing chamber adapted to contain a semiconductor wafer;

a heating device in communication with the thermal processing chamber for heating a semiconductor wafer contained in said chamber, said heating device comprising a plurality of lamps, said lamps emitting at least ultraviolet light;

a nozzle for introducing a precursor material into said thermal processing chamber, said precursor material forming a coating on said semiconductor wafer;

a sonic energy device supplying sonic energy to said precursor material as said precursor material passes through said nozzle; and

wherein the nozzle and sonic energy device are configured to emit the precursor material directly onto a semiconductor wafer contained in the thermal processing chamber.

2. An apparatus as defined in claim 1, wherein said lamps emit vacuum ultraviolet light.

3. An apparatus as defined in claim 1, further comprising a magnetic field device for creating a magnetic field within said thermal processing chamber, said magnetic field directing said precursor material onto said semiconductor wafer.

4. An apparatus as defined in claim 1, wherein said sonic energy comprises ultrasonic energy.

5. An apparatus as defined in claim 1, further comprising a temperature sensing device for sensing the temperature of said semiconductor wafer as said wafer is heated.

6. An apparatus as defined in claim 5, wherein said temperature sensing device comprises at least one pyrometer.

7. An apparatus as defined in claim 1, further comprising a gas inlet for directing a gas into said thermal processing chamber.

8. An apparatus as defined in claim 1, wherein said precursor material comprises a liquid.

9. An apparatus as defined in claim 1, wherein said precursor material comprises a gas.

10. An apparatus as defined in claim 1, wherein the sonic energy device is configured to produce liquid droplets all having a size of substantially less than about 1 micron.

11. An apparatus as defined in claim 1, wherein the sonic energy device is configured to produce liquid droplets all having a size of substantially less than about 0.5 microns.

12. An apparatus for heating and forming layers on semiconductor wafers comprising:

a thermal processing chamber adapted to contain a semiconductor wafer;

a heating device in communication with said thermal processing chamber for heating a semiconductor wafer contained in said chamber, said heating device comprising a plurality of lamps, said lamps emitting at least ultraviolet light;

a nozzle for introducing a precursor material into said thermal processing chamber, said precursor material forming a coating on said semiconductor wafer;

a magnetic field device located within said thermal processing chamber, said magnetic field device being configured to create a magnetic field in a manner that causes said precursor material to deposit on said semiconductor wafer according to a predetermined pattern.

13. An apparatus as defined in claim 12, further comprising a temperature sensing device for sensing the temperature of said semiconductor wafer as said wafer is heated.

14. An apparatus as defined in claim 13, wherein said temperature sensing device comprises at least one pyrometer.

15. An apparatus as defined in claim 12, further comprising a gas inlet for directing a gas into said thermal processing chamber.

16. An apparatus as defined in claim 12, wherein said precursor material comprises a liquid.

17. An apparatus as defined in claim 12, wherein said precursor material comprises a gas.

18. An apparatus as defined in claim 12, wherein said magnetic field device creates said magnetic field by an ion beam.

19. An apparatus as defined in claim 12, wherein said magnetic field device creates said magnetic field by an electron beam.

20. An apparatus as defined in claim 12, wherein said magnetic field device creates said magnetic field by including a voltage across two plates.

21. An apparatus as defined in claim 12, wherein the sonic energy device is configured to produce liquid droplets all having a size of substantially less than about 1 micron.

22. An apparatus as defined in claim 12, wherein the sonic energy device is configured to produce liquid droplets all having a size of substantially less than about 0.5 microns.