Integrated monolithic microfabricated electrospray and liquid chromatography system and method

• US 6,569,324 B1
• Filed: 10/31/2000
• Issued: 05/27/2003
• Est. Priority Date: 09/17/1998
• Status: Expired due to Term

• Current Assignee: Rheonix, Inc.
• Original Assignee: Kionix Incorporated (ROHM Co., Ltd.)
• Inventors: Schultz, Gary A., Davis, Timothy J., Moon, James E., Corso, Thomas N., Galvin, Gregory J., Lowes, Stephen
• Primary Examiner(s): Therkorn, Ernest G.
• Application Number:
  US09/703,005
• Time in Patent Office: 938 Days
• Field of Search: 250/288, 250/288.A, 210/656, 210/748, 210/198.2, 210/243, 204/600, 422/70, 436/161
• US Class Current: 210/198.2
• CPC Class Codes: G01N 2030/6013 interfaces to detectors
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize
• CPC Class Codes: G01N 30/7266 by electric field, e.g. electrospray
• CPC Class Codes: H01J 49/0018 Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
• CPC Class Codes: H01J 49/167 Capillaries and nozzles specially adapted therefor; electrostatic spraying per se B05B5/00
• CPC Class Codes: Y10T 436/24 Nuclear magnetic resonance, electron spin resonance or other spin effects or mass spectrometry
• CPC Class Codes: Y10T 436/2575 Volumetric liquid transfer

Abstract

An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

Claims

1. An integrated chemical analysis system, comprising:

a first substrate having a major surface;

a second substrate bonded to or otherwise attached to said first substrate;

a liquid chromatography system integrated in said second substrate, and configured to receive a fluid for analysis and to process and output the fluid; and

a monolithic electrospray device having an entrance orifice on an injection side and a nozzle on an ejection surface on an opposite planar side from the injection side, a channel extending continuously through the monolithic device in communication with the entrance orifice and the nozzle, and a region surrounding the nozzle recessed from the ejection surface, wherein said monolithic device is integrated on said first substrate, the injection side configured to receive the processed fluid from the liquid chromatography system, the major surface being configured to dispense the fluid by electrospraying the fluid.

2. The system of claim 1, wherein the major surface of the monolithic electrospray device is configured to dispense the processed fluid by electrospraying the fluid in a direction generally perpendicular to the major surface.

3. The system of claim 1, wherein a plurality of said liquid chromatography systems are each integrated in said second substrate, and each configured to receive a fluid for analysis and to process and output the fluid;

and a plurality of said monolithic electrospray devices, each integrated on said first substrate, the monolithic electrospray devices each having an injection side configured to receive the processed fluid from the liquid chromatography system, and each having an ejection surface configured to dispense the fluid by electrospraying the fluid.