Method for measuring surface leakage current of sample

• US 6,570,390 B2
• Filed: 08/29/2001
• Issued: 05/27/2003
• Est. Priority Date: 08/29/2000
• Status: Expired due to Term

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation), Rigaku Corporation
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation), Rigaku Corporation
• Inventors: Yamamoto, Yoshitsugu, Hattori, Ryo, Ito, Koichiro, Miyakuni, Shinichi, Notani, Yoshihiro, Hirayama, Taisei
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US09/941,903
• Publication Number:
  US 20020030504A1
• Time in Patent Office: 636 Days
• Field of Search: 324/501, 324/751, 250/306
• US Class Current: 324/501
• CPC Class Codes: G01N 1/44 Sample treatment involving radiation, e.g. heat
• CPC Class Codes: G01N 27/041 of a solid body

Abstract

A method of measuring a surface leakage current includes applying a voltage between a pair of electrodes, which are apart from each other on a sample surface, during a predetermined period of time. A region of the sample surface between the pair of electrodes is irradiated by energy rays during an irradiation period of time which is within the voltage application time. The energy rays may be lasers, ultraviolet rays, X-rays or an electron beam. A current flowing between the pair of electrodes is measured during the voltage application time. The energy rays irradiation causes a surface leakage current, which is caused by adhered substances, to start to flow, and when the adhered substances have been eliminated perfectly, a relatively large current caused by the adhered substances disappears. Perfect elimination of the adhered substances can be verified by confirming that the relatively large current has disappeared.

Claims

1. A method for measuring a surface leakage current of a sample, comprising:

(a) applying a voltage between a pair of electrodes, which are apart from each other on a surface of said sample, during a predetermined voltage application period of time;

(b) irradiating a region of said sample surface between said pair of electrodes with energy rays during a predetermined irradiation period of time which is within said voltage application period of time; and

(c) measuring a current flowing between said pair of electrodes during said voltage application period of time,

wherein said surface leakage current is measured using a thermoelectric analyzer which measures an electric property of said sample as a sample temperature varies.

2. A method according to claim 1, wherein said surface leakage current is measured to verify perfect elimination of adhered substances from said sample surface prior to measurement of said electric property of said sample by said thermoelectric analyzer.

3. A method according to claim 2, wherein said thermoelectric analyzer comprises a thermally stimulated current analyzer.

4. A method according to claim 3, wherein said surface leakage current is integrated during a period of time from start of flow of said surface leakage current to disappearance of said surface leakage current, and an amount of substances adhered to said sample surface is determined based on said integrated value.

5. A method according to claim 4, wherein said energy rays comprise laser beams.

6. A method according to claim 1, wherein said thermoelectric analyzer comprises a thermally stimulated current analyzer.

7. A method according to claim 1, wherein said sample comprises a high-purity compound semiconductor.

8. A method according to claim 1, wherein said surface leakage current is integrated to obtain an integrated value during a period of time from start of flow of said surface leakage current to disappearance of said surface leakage current, and an amount of substances adhered to said sample surface is determined based on said integrated value.

9. A method according to claim 1, wherein said energy rays comprise laser beams.