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Shunted multiple throw MEMS RF switch

  • US 6,570,750 B1
  • Filed: 04/19/2000
  • Issued: 05/27/2003
  • Est. Priority Date: 04/19/2000
  • Status: Expired due to Term
First Claim
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1. Normally open multiple ported integrated circuit radio frequency transmission line metallic mechanical electrical switching apparatus comprising the combination of:

  • an integrated circuit substrate member;

    a plurality of semiconductor material layers disposed on said substrate member, said semiconductor material layers comprising a plurality of electrical transistor members;

    an array of spaced apart metallic transmission line ground member elements residing on an upper surface portion of said semiconductor material layers;

    a metallic first radio frequency energy transmission line signal conveying member disposed intermediate elements of said metallic transmission line ground member array on said upper surface portion of said semiconductor material layers;

    said metallic first radio frequency energy transmission line signal conveying member interconnecting a switch contact area on said surface portion of said semiconductor material layers with one of a transmission line radio frequency source and load member;

    a second metallic radio frequency energy transmission line signal conveying member disposed intermediate elements of said metallic transmission line ground member array on said upper surface portion of said semiconductor material layers;

    a third metallic radio frequency energy transmission line signal conveying member disposed intermediate elements of said metallic transmission line ground member array on said upper surface portion of said semiconductor material layers;

    said second and third metallic radio frequency energy transmission line signal conveying members each including a selectively movable portion extending in segregated overlap over a part of said first metallic radio frequency energy transmission line signal conveying member and normally resident in open switch spring biased physical segregation from said metallic first radio frequency energy transmission line signal conveying member and said upper surface portion of said semiconductor material layers and said substrate member;

    said second and third metallic radio frequency energy transmission line signal conveying members being individually movable into positions of close intimate spacing with respect to said first metallic radio frequency energy transmission line signal conveying member during individual energized, closed switch operating conditions;

    a raised metallic backstop member extending from one of said metallic transmission line ground members over said selectively movable portions of said second and third radio frequency energy transmission line signal conveying members;

    said backstop member being engaged by and grounding said selectively movable portions of said second and third metallic radio frequency energy transmission line signal conveying members in said spring biased open switch condition thereof;

    first electrostatic force generating electrical potential apparatus connected between said first metallic radio frequency energy transmission line signal conveying member and said second metallic radio frequency energy transmission line signal conveying member and selectively generating an electrical potential achieving said individual energized, closed switch operating condition of said second metallic radio frequency energy transmission line signal conveying member;

    second electrostatic force generating electrical potential apparatus connected between said first metallic radio frequency energy transmission line signal conveying member and said third metallic radio frequency energy transmission line signal conveying member and selectively generating an electrical potential achieving said individual energized, closed switch operating condition of said third metallic radio frequency energy transmission line signal conveying member.

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