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Dynamically balanced microelectromechanical devices

  • US 6,571,630 B1
  • Filed: 07/09/2002
  • Issued: 06/03/2003
  • Est. Priority Date: 03/25/1999
  • Status: Expired due to Term
First Claim
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1. A process for balancing a tuning fork gyroscope comprising the steps of:

  • providing a tuning fork gyroscope having a proof mass and at least one support beam therefor and further having a quadrature bias reflecting unbalance in the dynamics of motion of the gyroscope proof mass and support beam;

    modifying at least one said support beam extending between a proof mass and a frame to reduce the quadrature bias.

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