Surface-acoustic-wave pressure sensor and associated methods
First Claim
1. A pressure and temperature sensor comprising:
- a substantially hermetically sealed insulating package;
an elastic, piezoelectric substrate deformably supported within the package along two lines substantially perpendicular to a long axis of the substrate; and
at least three surface-acoustic-wave resonators affixed to a bottom of the substrate, the three resonators comprising;
a first and a second resonator, each having a long propagation axis parallel therebetween, positioned in at least partially staggered relation along the substrate for experiencing different deformations under strain, and each having a substantially equivalent temperature coefficient; and
a third resonator having a long propagation axis nonparallel to the long axes of the first and the second resonator and a temperature coefficient different from the temperature coefficient of the first and the second resonators.
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Abstract
A pressure and temperature sensor includes a sealed insulating package and an elastic, piezoelectric substrate deformably supported within the package. At least three surface-acoustic-wave resonators are affixed to a bottom of the substrate. A first and a second resonator are positioned in parallel relation along the substrate. A third resonator has a long axis nonparallel to the long axes of the first and the second resonator. The temperature coefficients of the first and second resonators are substantially equivalent; that of the third is different from those of the first and the second resonator, for permitting a temperature change to be sensed. Electrical connectors extend between the resonators to the outside of the package. A sensing system also includes an antenna for sending and receiving electromagnetic signals to and from the device.
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Citations
16 Claims
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1. A pressure and temperature sensor comprising:
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a substantially hermetically sealed insulating package;
an elastic, piezoelectric substrate deformably supported within the package along two lines substantially perpendicular to a long axis of the substrate; and
at least three surface-acoustic-wave resonators affixed to a bottom of the substrate, the three resonators comprising;
a first and a second resonator, each having a long propagation axis parallel therebetween, positioned in at least partially staggered relation along the substrate for experiencing different deformations under strain, and each having a substantially equivalent temperature coefficient; and
a third resonator having a long propagation axis nonparallel to the long axes of the first and the second resonator and a temperature coefficient different from the temperature coefficient of the first and the second resonators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A sensor comprising:
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a hermetically sealed insulating package;
an elastically deformable piezoelectric substrate supported within the package;
at least two SAW sensing elements operable with the piezoelectric substrate, each element having at least one of a transducer and a reflector carried thereon;
a plurality of discrete stands positioned in supporting relation to the substrate along two rows, wherein the at least two SAW sensing elements are positioned relative to the two rows of the plurality of discrete stands for effecting an opposite deformation of each of the at least two SAW sensing elements under a pressure change, the at least two SAW sensing elements operable with the substrate for providing a pressure measurement; and
a third SAW sensing element positioned proximate an inflexion portion of the substrate, the third SAW sensing element having a propagation axis nonparallel to a propagation axis of the at least two SAW sensing elements, the third SAW sensing element operable with the substrate for providing a temperature measurement. - View Dependent Claims (13, 14, 15, 16)
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Specification