Apparatus for depositing a thin film on a data recording disk

• US 6,571,729 B2
• Filed: 11/01/2001
• Issued: 06/03/2003
• Est. Priority Date: 07/28/1999
• Status: Expired due to Term

• Current Assignee: Anelva Corporation (Canon Inc.)
• Original Assignee: Anelva Corporation (Canon Inc.)
• Inventors: Watanabe, Naoki, Sasaki, Hiromi, Watabe, Osamu
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): CROWELL, ANNA M
• Application Number:
  US09/985,090
• Publication Number:
  US 20020028286A1
• Time in Patent Office: 579 Days
• Field of Search: 118/723.R, 118/723.E, 204/298.02, 204/298.25
• US Class Current: 118/723.00R
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: G11B 5/8408 protecting the magnetic layer
• CPC Class Codes: Y10S 428/90 Magnetic feature

Abstract

An apparatus for depositing a protective film on a data recording disk, including the steps of depositing a magnetic film layer as a data recording layer on a surface of a substrate while the substrate is at a magnetic film deposition temperature; heating the substrate with the magnetic film layer thereon to a protective film deposition temperature; and depositing a protective film on the magnetic film layer while the substrate is at the protective film deposition layer; wherein the protective film deposition temperature is higher than the magnetic film deposition temperature.

Claims

1. An apparatus for depositing a protective film on top of a magnetic film that has already been deposited as a data recording layer on a surface of a data recording disk substrate, comprising:

means for forming a magnetic film as a data recording layer on a data recording disk at a magnetic film deposition temperature;

means for forming a protective film on top of the magnetic film at a protective film deposition temperature, which is higher than the magnetic film deposition temperature;

an intermediate heating chamber which is equipped with a heating mechanism, the intermediate heating chamber is provided between the magnetic film forming means, in which the magnetic film is deposited on the surface of the substrate, and the protective film forming means in which the protective film is deposited and laminated on top of the magnetic film, and

airtight connections are made between the magnetic film forming means and the intermediate heating chamber and between the intermediate heating chamber and the protective film forming means, whereby the magnetic film forming, the intermediate heating, and the protective film forming can be performed successively without exposing the substrate to the atmosphere.

2. The apparatus of claim 1, wherein the protective film forming means deposits a protective film by plasma chemical vapor deposition and is equipped with a biasing mechanism that applies a high frequency voltage to the substrate whereby a negative bias voltage is conferred to the substrate through the interaction between the high frequency and the plasma, causing positive ions in the plasma to impinge on the substrate.

3. The apparatus of claim 1, wherein the protective film forming means is equipped with an ion source and deposits a protective film by ion beam vapor deposition.

4. The apparatus of claim 1, wherein the protective film forming means is equipped with a plasma forming means that forms an electron cyclotron resonant plasma, and in that plasma chemical vapor deposition is performed by the plasma formed by this plasma forming means.

5. An apparatus for depositing a protective film on top of a magnetic film that has already been deposited as a data recording layer on a surface of a data recording disk substrate, comprising:

a magnetic film deposition chamber in which a magnetic film is formed as a data recording layer on a data recording disk at a magnetic film deposition temperature;

a protective film deposition chamber in which a protective film is formed on top of the magnetic film at a protective film deposition temperature, the protective film deposition temperature is higher than the magnetic film deposition temperature; and

a heater for heating the data recording disk substrate to the protective film deposition temperature before forming the protective film,

wherein the heater is located between the magnetic film deposition chamber and the protective film deposition chamber.

6. An apparatus for depositing a protective film on top of a magnetic film that has already been deposited as a data recording layer on a surface of a data recording disk substrate, comprising:

a sputtering chamber in which a magnetic film is formed as a data recording layer on a data recording disk at a magnetic film deposition temperature;

a chemical vapor deposition chamber in which a protective film is formed on top of the magnetic film at a protective film deposition temperature, the protective film deposition temperature is higher than the magnetic film deposition temperature; and

a heater for heating the data recording disk substrate to the protective film deposition temperature before forming the protective film,

wherein the heater is located between the magnetic film deposition chamber and the protective film deposition chamber.